JP6236145B2 - ガラス基板洗浄方法 - Google Patents

ガラス基板洗浄方法 Download PDF

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Publication number
JP6236145B2
JP6236145B2 JP2016511790A JP2016511790A JP6236145B2 JP 6236145 B2 JP6236145 B2 JP 6236145B2 JP 2016511790 A JP2016511790 A JP 2016511790A JP 2016511790 A JP2016511790 A JP 2016511790A JP 6236145 B2 JP6236145 B2 JP 6236145B2
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Prior art keywords
glass substrate
alkaline solution
solution
range
glass
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Expired - Fee Related
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Japanese (ja)
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JP2016523792A5 (cg-RX-API-DMAC10.html
JP2016523792A (ja
Inventor
ジーン エニックス，ダーウィン
ジーン エニックス，ダーウィン
中村，好寛
ヴェンカタチャラム，シヴァ
ジャニナ ワルチャク，ワンダ
ジャニナ ワルチャク，ワンダ
ワン，リーミン
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Corning Inc
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Corning Inc
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2016511790A 2013-04-30 2014-04-29 ガラス基板洗浄方法 Expired - Fee Related JP6236145B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361817532P 2013-04-30 2013-04-30
US61/817,532 2013-04-30
PCT/US2014/035771 WO2014179251A1 (en) 2013-04-30 2014-04-29 Method of cleaning glass substrates

Publications (3)

Publication Number Publication Date
JP2016523792A JP2016523792A (ja) 2016-08-12
JP2016523792A5 JP2016523792A5 (cg-RX-API-DMAC10.html) 2017-06-15
JP6236145B2 true JP6236145B2 (ja) 2017-11-22

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US (1) US9561982B2 (cg-RX-API-DMAC10.html)
JP (1) JP6236145B2 (cg-RX-API-DMAC10.html)
KR (1) KR20160002911A (cg-RX-API-DMAC10.html)
CN (1) CN105340057B (cg-RX-API-DMAC10.html)
TW (1) TWI603790B (cg-RX-API-DMAC10.html)
WO (1) WO2014179251A1 (cg-RX-API-DMAC10.html)

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US20140318578A1 (en) 2014-10-30
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CN105340057A (zh) 2016-02-17
TWI603790B (zh) 2017-11-01
CN105340057B (zh) 2018-01-16
JP2016523792A (ja) 2016-08-12
WO2014179251A1 (en) 2014-11-06
KR20160002911A (ko) 2016-01-08

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