JP6230353B2 - パターン形状を有する膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子機器の製造方法 - Google Patents

パターン形状を有する膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子機器の製造方法 Download PDF

Info

Publication number
JP6230353B2
JP6230353B2 JP2013198446A JP2013198446A JP6230353B2 JP 6230353 B2 JP6230353 B2 JP 6230353B2 JP 2013198446 A JP2013198446 A JP 2013198446A JP 2013198446 A JP2013198446 A JP 2013198446A JP 6230353 B2 JP6230353 B2 JP 6230353B2
Authority
JP
Japan
Prior art keywords
film
photocurable composition
light
mold
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013198446A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015065308A (ja
JP2015065308A5 (enExample
Inventor
伊藤　俊樹
伊藤　　俊樹
晋吾 石田
晋吾 石田
陽司 川▲崎▼
陽司 川▲崎▼
酒井　啓太
啓太 酒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2013198446A priority Critical patent/JP6230353B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to CN201480053312.7A priority patent/CN105580109B/zh
Priority to PCT/JP2014/004839 priority patent/WO2015045348A1/en
Priority to KR1020167010639A priority patent/KR101788493B1/ko
Priority to EP14847055.2A priority patent/EP3061121B1/en
Priority to US15/024,797 priority patent/US20160219717A1/en
Priority to TW103132793A priority patent/TWI539232B/zh
Publication of JP2015065308A publication Critical patent/JP2015065308A/ja
Publication of JP2015065308A5 publication Critical patent/JP2015065308A5/ja
Application granted granted Critical
Publication of JP6230353B2 publication Critical patent/JP6230353B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/245—Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70681—Metrology strategies
    • G03F7/70683—Mark designs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Integrated Circuits (AREA)
JP2013198446A 2013-09-25 2013-09-25 パターン形状を有する膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子機器の製造方法 Expired - Fee Related JP6230353B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2013198446A JP6230353B2 (ja) 2013-09-25 2013-09-25 パターン形状を有する膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子機器の製造方法
PCT/JP2014/004839 WO2015045348A1 (en) 2013-09-25 2014-09-22 Method for forming a patterned film, method for manufacturing optical component, method for manufacturing circuit board, and method for manufacturing electronic component
KR1020167010639A KR101788493B1 (ko) 2013-09-25 2014-09-22 패턴 형상을 갖는 막의 형성 방법, 광학 부품의 제조 방법, 회로 기판의 제조 방법, 및 전자 부품의 제조 방법
EP14847055.2A EP3061121B1 (en) 2013-09-25 2014-09-22 Method for forming a patterned film, method for manufacturing an optical component, method for manufacturing an integrated circuit element, method for manufacturing an electronic component, and method for forming a relief pattern
CN201480053312.7A CN105580109B (zh) 2013-09-25 2014-09-22 图案化膜的形成方法、光学组件的制造方法、电路板的制造方法和电子组件的制造方法
US15/024,797 US20160219717A1 (en) 2013-09-25 2014-09-22 Method for forming a patterned film, method for manufacturing optical component, method for manufacturing circuit board, and method for manufacturing electronic component
TW103132793A TWI539232B (zh) 2013-09-25 2014-09-23 形成圖案化薄膜之方法、製造光學元件之方法、製造電路板之方法及製造電子元件之方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013198446A JP6230353B2 (ja) 2013-09-25 2013-09-25 パターン形状を有する膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子機器の製造方法

Publications (3)

Publication Number Publication Date
JP2015065308A JP2015065308A (ja) 2015-04-09
JP2015065308A5 JP2015065308A5 (enExample) 2016-11-04
JP6230353B2 true JP6230353B2 (ja) 2017-11-15

Family

ID=52742520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013198446A Expired - Fee Related JP6230353B2 (ja) 2013-09-25 2013-09-25 パターン形状を有する膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子機器の製造方法

Country Status (7)

Country Link
US (1) US20160219717A1 (enExample)
EP (1) EP3061121B1 (enExample)
JP (1) JP6230353B2 (enExample)
KR (1) KR101788493B1 (enExample)
CN (1) CN105580109B (enExample)
TW (1) TWI539232B (enExample)
WO (1) WO2015045348A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6403627B2 (ja) 2015-04-14 2018-10-10 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法
US10578965B2 (en) * 2016-03-31 2020-03-03 Canon Kabushiki Kaisha Pattern forming method
AU2018234668A1 (en) * 2017-03-16 2019-09-12 Molecular Imprints, Inc. Optical polymer films and methods for casting the same
CN115257026A (zh) 2017-10-17 2022-11-01 奇跃公司 用于铸造聚合物产品的方法和装置
TWI728489B (zh) * 2019-10-04 2021-05-21 永嘉光電股份有限公司 利用可溶解性模仁的壓印方法及相關壓印系統
TWI758185B (zh) * 2021-05-12 2022-03-11 永嘉光電股份有限公司 提升脫模穩定性之壓印方法及相關壓印系統

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104781A (en) 1977-02-24 1978-09-12 Fujisawa Mfg Apparatus for filling bread dough into mold
EP1309897A2 (en) 2000-08-01 2003-05-14 Board Of Regents, The University Of Texas System Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
JP2006516065A (ja) * 2002-08-01 2006-06-15 モレキュラー・インプリンツ・インコーポレーテッド インプリント・リソグラフィの散乱計測アラインメント
JP3700001B2 (ja) * 2002-09-10 2005-09-28 独立行政法人産業技術総合研究所 インプリント方法及び装置
US7136150B2 (en) 2003-09-25 2006-11-14 Molecular Imprints, Inc. Imprint lithography template having opaque alignment marks
JP4290177B2 (ja) 2005-06-08 2009-07-01 キヤノン株式会社 モールド、アライメント方法、パターン形成装置、パターン転写装置、及びチップの製造方法
KR100790899B1 (ko) * 2006-12-01 2008-01-03 삼성전자주식회사 얼라인 마크가 형성된 템플릿 및 그 제조 방법
NL2004932A (en) * 2009-07-27 2011-01-31 Asml Netherlands Bv Imprint lithography template.
NL2005266A (en) * 2009-10-28 2011-05-02 Asml Netherlands Bv Imprint lithography.
JP5618588B2 (ja) 2010-03-24 2014-11-05 キヤノン株式会社 インプリント方法
JP5679850B2 (ja) * 2011-02-07 2015-03-04 キヤノン株式会社 インプリント装置、および、物品の製造方法
KR101354742B1 (ko) * 2011-06-30 2014-01-22 가부시끼가이샤 도시바 템플릿 기판 및 그 제조 방법
JP2013070033A (ja) * 2011-09-05 2013-04-18 Canon Inc インプリント装置、インプリント方法及び物品の製造方法

Also Published As

Publication number Publication date
EP3061121A4 (en) 2017-06-28
KR101788493B1 (ko) 2017-10-19
US20160219717A1 (en) 2016-07-28
EP3061121B1 (en) 2019-08-28
CN105580109A (zh) 2016-05-11
JP2015065308A (ja) 2015-04-09
KR20160063359A (ko) 2016-06-03
TWI539232B (zh) 2016-06-21
WO2015045348A1 (en) 2015-04-02
CN105580109B (zh) 2017-09-15
EP3061121A1 (en) 2016-08-31
TW201512769A (zh) 2015-04-01

Similar Documents

Publication Publication Date Title
JP6230353B2 (ja) パターン形状を有する膜の製造方法、光学部品の製造方法、回路基板の製造方法、電子機器の製造方法
KR101667132B1 (ko) 광경화물의 제조 방법
JP6494185B2 (ja) インプリント方法および装置
KR101790460B1 (ko) 임프린트용 형의 패턴의 결정 방법, 임프린트 방법 및 장치
JP5932500B2 (ja) インプリント方法およびインプリント装置、それを用いた物品の製造方法
JP7022615B2 (ja) インプリント方法、インプリント装置、モールドの製造方法、および、物品の製造方法
JP2014110368A (ja) ナノインプリント方法およびそれを用いたパターン化基板の製造方法
KR102874686B1 (ko) 임프린트용 몰드, 임프린트 방법 및 물품의 제조 방법
JP6827755B2 (ja) インプリント装置及び物品の製造方法
US20170140922A1 (en) Generating method, imprinting method, imprint apparatus, program, and method of manufacturing article
JP6304921B2 (ja) インプリント方法およびインプリント装置、それを用いた物品の製造方法
US20220026799A1 (en) Nanoimprint lithography process using low surface energy mask
JP7041545B2 (ja) インプリント装置、物品の製造方法及びモールド
JP2023089742A (ja) 運動制御装置、リソグラフィー装置、平坦化装置、処理装置および物品製造方法
JP7194068B2 (ja) モールド作製方法、および物品の製造方法
JP7414627B2 (ja) インプリント装置、インプリント方法、および物品の製造方法
JP2018019041A (ja) 液体充填方法、インプリント方法、及び物品の製造方法
JP2023083029A (ja) インプリント方法、パターン形成方法、インプリント装置、インプリント用モールドおよび物品の製造方法
JP2024003899A (ja) インプリントシステム、基板、インプリント方法、レプリカモールド製造方法及び、物品の製造方法
JP2023068882A (ja) インプリント装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160914

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160914

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170919

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20171017

R151 Written notification of patent or utility model registration

Ref document number: 6230353

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees