JP6218309B2 - マスクブランク収納ケース及びマスクブランク収納体 - Google Patents

マスクブランク収納ケース及びマスクブランク収納体 Download PDF

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Publication number
JP6218309B2
JP6218309B2 JP2013135569A JP2013135569A JP6218309B2 JP 6218309 B2 JP6218309 B2 JP 6218309B2 JP 2013135569 A JP2013135569 A JP 2013135569A JP 2013135569 A JP2013135569 A JP 2013135569A JP 6218309 B2 JP6218309 B2 JP 6218309B2
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Japan
Prior art keywords
mask blank
case
contact
storage case
contact portion
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JP2013135569A
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English (en)
Japanese (ja)
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JP2014029519A (ja
Inventor
康弘 水越
康弘 水越
孝雄 樋口
孝雄 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
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Hoya Corp
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Publication date
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Priority to JP2013135569A priority Critical patent/JP6218309B2/ja
Publication of JP2014029519A publication Critical patent/JP2014029519A/ja
Application granted granted Critical
Publication of JP6218309B2 publication Critical patent/JP6218309B2/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
JP2013135569A 2012-06-28 2013-06-27 マスクブランク収納ケース及びマスクブランク収納体 Active JP6218309B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013135569A JP6218309B2 (ja) 2012-06-28 2013-06-27 マスクブランク収納ケース及びマスクブランク収納体

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012145778 2012-06-28
JP2012145778 2012-06-28
JP2013135569A JP6218309B2 (ja) 2012-06-28 2013-06-27 マスクブランク収納ケース及びマスクブランク収納体

Publications (2)

Publication Number Publication Date
JP2014029519A JP2014029519A (ja) 2014-02-13
JP6218309B2 true JP6218309B2 (ja) 2017-10-25

Family

ID=50139207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013135569A Active JP6218309B2 (ja) 2012-06-28 2013-06-27 マスクブランク収納ケース及びマスクブランク収納体

Country Status (2)

Country Link
JP (1) JP6218309B2 (ko)
KR (1) KR102125579B1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6787168B2 (ja) * 2017-02-15 2020-11-18 住友金属鉱山株式会社 二次電池用電極の搬送ケース及びその使用方法
TWI720850B (zh) * 2020-03-19 2021-03-01 家登精密工業股份有限公司 光罩盒

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203383A (ja) * 1985-02-26 1986-09-09 ホ−ヤ株式会社 基板保持構造
JP2525823B2 (ja) 1987-08-05 1996-08-21 パイオニア株式会社 リ−ルサ−ボ回路
JP2532084Y2 (ja) * 1989-12-12 1997-04-09 信越ポリマー株式会社 マスク収納容器
JP3046003B2 (ja) * 1998-08-10 2000-05-29 ホーヤ株式会社 電子デバイス用ガラス基板及びその製造方法
JP2003264225A (ja) * 2002-03-12 2003-09-19 Shin Etsu Polymer Co Ltd ガラス基板収納容器
JP2009179351A (ja) * 2008-01-30 2009-08-13 Hoya Corp マスクブランク収納ケース及びマスクブランクの収納方法、並びにマスクブランク収納体
JP6050981B2 (ja) * 2012-07-30 2016-12-21 Hoya株式会社 マスクブランク収納ケース、及びマスクブランク収納体

Also Published As

Publication number Publication date
KR20140001788A (ko) 2014-01-07
KR102125579B1 (ko) 2020-07-07
JP2014029519A (ja) 2014-02-13

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