JP6138931B2 - 層を転写するためのプロセス - Google Patents

層を転写するためのプロセス Download PDF

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Publication number
JP6138931B2
JP6138931B2 JP2015519373A JP2015519373A JP6138931B2 JP 6138931 B2 JP6138931 B2 JP 6138931B2 JP 2015519373 A JP2015519373 A JP 2015519373A JP 2015519373 A JP2015519373 A JP 2015519373A JP 6138931 B2 JP6138931 B2 JP 6138931B2
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JP
Japan
Prior art keywords
bonding layer
donor substrate
support substrate
substrate
transfer process
Prior art date
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Application number
JP2015519373A
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English (en)
Japanese (ja)
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JP2015525964A (ja
JP2015525964A5 (enExample
Inventor
ミシェル ブルーエル,
ミシェル ブルーエル,
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
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Publication date
Application filed by Soitec SA filed Critical Soitec SA
Publication of JP2015525964A publication Critical patent/JP2015525964A/ja
Publication of JP2015525964A5 publication Critical patent/JP2015525964A5/ja
Application granted granted Critical
Publication of JP6138931B2 publication Critical patent/JP6138931B2/ja
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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19Preparing inhomogeneous wafers
    • H10P90/1904Preparing vertically inhomogeneous wafers
    • H10P90/1906Preparing SOI wafers
    • H10P90/1914Preparing SOI wafers using bonding
    • H10P90/1916Preparing SOI wafers using bonding with separation or delamination along an ion implanted layer, e.g. Smart-cut
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/12OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising dopants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302Non-deposition formation processes
    • H10P14/6322Formation by thermal treatments
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P54/00Cutting or separating of wafers, substrates or parts of devices
    • H10P54/50Cutting or separating of wafers, substrates or parts of devices by scoring, breaking or cleaving
    • H10P54/52Cutting or separating of wafers, substrates or parts of devices by scoring, breaking or cleaving by cleaving
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10Isolation regions comprising dielectric materials
    • H10W10/181Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Recrystallisation Techniques (AREA)
  • Ceramic Products (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Electromagnetism (AREA)
  • Heat Sensitive Colour Forming Recording (AREA)
JP2015519373A 2012-06-26 2013-06-14 層を転写するためのプロセス Active JP6138931B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1201802 2012-06-26
FR1201802A FR2992464B1 (fr) 2012-06-26 2012-06-26 Procede de transfert d'une couche
PCT/IB2013/001252 WO2014001869A1 (en) 2012-06-26 2013-06-14 Process for transferring a layer

Publications (3)

Publication Number Publication Date
JP2015525964A JP2015525964A (ja) 2015-09-07
JP2015525964A5 JP2015525964A5 (enExample) 2017-04-13
JP6138931B2 true JP6138931B2 (ja) 2017-05-31

Family

ID=48782549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015519373A Active JP6138931B2 (ja) 2012-06-26 2013-06-14 層を転写するためのプロセス

Country Status (8)

Country Link
US (1) US9343351B2 (enExample)
EP (1) EP2865004B1 (enExample)
JP (1) JP6138931B2 (enExample)
KR (1) KR102007315B1 (enExample)
CN (1) CN104584203B (enExample)
FR (1) FR2992464B1 (enExample)
SG (1) SG11201408606TA (enExample)
WO (1) WO2014001869A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3007892B1 (fr) * 2013-06-27 2015-07-31 Commissariat Energie Atomique Procede de transfert d'une couche mince avec apport d'energie thermique a une zone fragilisee via une couche inductive
US9966466B2 (en) * 2016-08-08 2018-05-08 Globalfoundries Inc. Semiconductor-on-insulator wafer, semiconductor structure including a transistor, and methods for the formation and operation thereof
CN108365083B (zh) * 2018-02-07 2022-03-08 济南晶正电子科技有限公司 用于声表面波器件的复合压电衬底的制造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1351308B1 (en) * 1996-08-27 2009-04-22 Seiko Epson Corporation Exfoliating method and transferring method of thin film device
US6291314B1 (en) * 1998-06-23 2001-09-18 Silicon Genesis Corporation Controlled cleavage process and device for patterned films using a release layer
TW452866B (en) * 2000-02-25 2001-09-01 Lee Tien Hsi Manufacturing method of thin film on a substrate
FR2817394B1 (fr) * 2000-11-27 2003-10-31 Soitec Silicon On Insulator Procede de fabrication d'un substrat notamment pour l'optique, l'electronique ou l'optoelectronique et substrat obtenu par ce procede
FR2855909B1 (fr) * 2003-06-06 2005-08-26 Soitec Silicon On Insulator Procede d'obtention concomitante d'au moins une paire de structures comprenant au moins une couche utile reportee sur un substrat
US7052978B2 (en) * 2003-08-28 2006-05-30 Intel Corporation Arrangements incorporating laser-induced cleaving
FR2860249B1 (fr) * 2003-09-30 2005-12-09 Michel Bruel Procede de fabrication d'une structure en forme de plaque, en particulier en silicium, application de procede, et structure en forme de plaque, en particulier en silicium
US20060240275A1 (en) * 2005-04-25 2006-10-26 Gadkaree Kishor P Flexible display substrates
DE102006007293B4 (de) * 2006-01-31 2023-04-06 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen eines Quasi-Substratwafers und ein unter Verwendung eines solchen Quasi-Substratwafers hergestellter Halbleiterkörper
JP5284576B2 (ja) * 2006-11-10 2013-09-11 信越化学工業株式会社 半導体基板の製造方法
JP2008153411A (ja) * 2006-12-18 2008-07-03 Shin Etsu Chem Co Ltd Soi基板の製造方法
EP1986229A1 (en) * 2007-04-27 2008-10-29 S.O.I.T.E.C. Silicon on Insulator Technologies Method for manufacturing compound material wafer and corresponding compound material wafer
US20090179160A1 (en) * 2008-01-16 2009-07-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor substrate manufacturing apparatus
KR20100008123A (ko) * 2008-07-15 2010-01-25 고려대학교 산학협력단 이중 히트 씽크층으로 구성된 지지대를 갖춘 고성능수직구조의 반도체 발광소자
JP5496608B2 (ja) * 2008-11-12 2014-05-21 信越化学工業株式会社 Soi基板の作製方法
JP5643509B2 (ja) * 2009-12-28 2014-12-17 信越化学工業株式会社 応力を低減したsos基板の製造方法
CN101866874B (zh) * 2010-06-01 2013-05-22 中国科学院上海微系统与信息技术研究所 一种利用层转移技术制备绝缘体上锗硅材料的方法

Also Published As

Publication number Publication date
CN104584203B (zh) 2018-03-20
EP2865004A1 (en) 2015-04-29
WO2014001869A1 (en) 2014-01-03
CN104584203A (zh) 2015-04-29
US20150187638A1 (en) 2015-07-02
JP2015525964A (ja) 2015-09-07
FR2992464A1 (fr) 2013-12-27
FR2992464B1 (fr) 2015-04-03
KR20150023514A (ko) 2015-03-05
EP2865004B1 (en) 2020-07-29
SG11201408606TA (en) 2015-01-29
KR102007315B1 (ko) 2019-08-06
US9343351B2 (en) 2016-05-17

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