CN104584203B - 用于转印层的工艺 - Google Patents
用于转印层的工艺 Download PDFInfo
- Publication number
- CN104584203B CN104584203B CN201380033314.5A CN201380033314A CN104584203B CN 104584203 B CN104584203 B CN 104584203B CN 201380033314 A CN201380033314 A CN 201380033314A CN 104584203 B CN104584203 B CN 104584203B
- Authority
- CN
- China
- Prior art keywords
- transfer printing
- bonding layer
- printing process
- donor substrate
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
- H10P90/19—Preparing inhomogeneous wafers
- H10P90/1904—Preparing vertically inhomogeneous wafers
- H10P90/1906—Preparing SOI wafers
- H10P90/1914—Preparing SOI wafers using bonding
- H10P90/1916—Preparing SOI wafers using bonding with separation or delamination along an ion implanted layer, e.g. Smart-cut
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/12—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising dopants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6302—Non-deposition formation processes
- H10P14/6322—Formation by thermal treatments
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P54/00—Cutting or separating of wafers, substrates or parts of devices
- H10P54/50—Cutting or separating of wafers, substrates or parts of devices by scoring, breaking or cleaving
- H10P54/52—Cutting or separating of wafers, substrates or parts of devices by scoring, breaking or cleaving by cleaving
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
- H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Recrystallisation Techniques (AREA)
- Ceramic Products (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Electromagnetism (AREA)
- Heat Sensitive Colour Forming Recording (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1201802 | 2012-06-26 | ||
| FR1201802A FR2992464B1 (fr) | 2012-06-26 | 2012-06-26 | Procede de transfert d'une couche |
| PCT/IB2013/001252 WO2014001869A1 (en) | 2012-06-26 | 2013-06-14 | Process for transferring a layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104584203A CN104584203A (zh) | 2015-04-29 |
| CN104584203B true CN104584203B (zh) | 2018-03-20 |
Family
ID=48782549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380033314.5A Active CN104584203B (zh) | 2012-06-26 | 2013-06-14 | 用于转印层的工艺 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9343351B2 (enExample) |
| EP (1) | EP2865004B1 (enExample) |
| JP (1) | JP6138931B2 (enExample) |
| KR (1) | KR102007315B1 (enExample) |
| CN (1) | CN104584203B (enExample) |
| FR (1) | FR2992464B1 (enExample) |
| SG (1) | SG11201408606TA (enExample) |
| WO (1) | WO2014001869A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3007892B1 (fr) * | 2013-06-27 | 2015-07-31 | Commissariat Energie Atomique | Procede de transfert d'une couche mince avec apport d'energie thermique a une zone fragilisee via une couche inductive |
| US9966466B2 (en) * | 2016-08-08 | 2018-05-08 | Globalfoundries Inc. | Semiconductor-on-insulator wafer, semiconductor structure including a transistor, and methods for the formation and operation thereof |
| CN108365083B (zh) * | 2018-02-07 | 2022-03-08 | 济南晶正电子科技有限公司 | 用于声表面波器件的复合压电衬底的制造方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6486008B1 (en) * | 2000-02-25 | 2002-11-26 | John Wolf International, Inc. | Manufacturing method of a thin film on a substrate |
| CN1478295A (zh) * | 2000-11-27 | 2004-02-25 | S��O��I��Tec��Ե���Ϲ輼����˾ | 尤其是用于光学器件、电子器件或光电器件的衬底的制造方法和经其得到的衬底 |
| CN1883031A (zh) * | 2003-09-30 | 2006-12-20 | 特雷西特技术公司 | 制造片形结构的方法、特别是由硅制造片形结构的方法、所述方法的应用、和由此制备的片形结构、特别是由硅制造的片形结构 |
| CN101207009A (zh) * | 2006-12-18 | 2008-06-25 | 信越化学工业株式会社 | Soi基板的制造方法 |
| CN101558486A (zh) * | 2007-04-27 | 2009-10-14 | 硅绝缘体技术有限公司 | 制造复合材料晶片的方法以及相应的复合材料晶片 |
| CN101866874A (zh) * | 2010-06-01 | 2010-10-20 | 中国科学院上海微系统与信息技术研究所 | 一种利用层转移技术制备绝缘体上锗硅材料的方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1351308B1 (en) * | 1996-08-27 | 2009-04-22 | Seiko Epson Corporation | Exfoliating method and transferring method of thin film device |
| US6291314B1 (en) * | 1998-06-23 | 2001-09-18 | Silicon Genesis Corporation | Controlled cleavage process and device for patterned films using a release layer |
| FR2855909B1 (fr) * | 2003-06-06 | 2005-08-26 | Soitec Silicon On Insulator | Procede d'obtention concomitante d'au moins une paire de structures comprenant au moins une couche utile reportee sur un substrat |
| US7052978B2 (en) * | 2003-08-28 | 2006-05-30 | Intel Corporation | Arrangements incorporating laser-induced cleaving |
| US20060240275A1 (en) * | 2005-04-25 | 2006-10-26 | Gadkaree Kishor P | Flexible display substrates |
| DE102006007293B4 (de) * | 2006-01-31 | 2023-04-06 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zum Herstellen eines Quasi-Substratwafers und ein unter Verwendung eines solchen Quasi-Substratwafers hergestellter Halbleiterkörper |
| JP5284576B2 (ja) * | 2006-11-10 | 2013-09-11 | 信越化学工業株式会社 | 半導体基板の製造方法 |
| US20090179160A1 (en) * | 2008-01-16 | 2009-07-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor substrate manufacturing apparatus |
| KR20100008123A (ko) * | 2008-07-15 | 2010-01-25 | 고려대학교 산학협력단 | 이중 히트 씽크층으로 구성된 지지대를 갖춘 고성능수직구조의 반도체 발광소자 |
| JP5496608B2 (ja) * | 2008-11-12 | 2014-05-21 | 信越化学工業株式会社 | Soi基板の作製方法 |
| JP5643509B2 (ja) * | 2009-12-28 | 2014-12-17 | 信越化学工業株式会社 | 応力を低減したsos基板の製造方法 |
-
2012
- 2012-06-26 FR FR1201802A patent/FR2992464B1/fr active Active
-
2013
- 2013-06-14 KR KR1020147036692A patent/KR102007315B1/ko active Active
- 2013-06-14 JP JP2015519373A patent/JP6138931B2/ja active Active
- 2013-06-14 WO PCT/IB2013/001252 patent/WO2014001869A1/en not_active Ceased
- 2013-06-14 CN CN201380033314.5A patent/CN104584203B/zh active Active
- 2013-06-14 EP EP13735407.2A patent/EP2865004B1/en active Active
- 2013-06-14 SG SG11201408606TA patent/SG11201408606TA/en unknown
- 2013-06-14 US US14/409,361 patent/US9343351B2/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6486008B1 (en) * | 2000-02-25 | 2002-11-26 | John Wolf International, Inc. | Manufacturing method of a thin film on a substrate |
| CN1478295A (zh) * | 2000-11-27 | 2004-02-25 | S��O��I��Tec��Ե���Ϲ輼����˾ | 尤其是用于光学器件、电子器件或光电器件的衬底的制造方法和经其得到的衬底 |
| CN1883031A (zh) * | 2003-09-30 | 2006-12-20 | 特雷西特技术公司 | 制造片形结构的方法、特别是由硅制造片形结构的方法、所述方法的应用、和由此制备的片形结构、特别是由硅制造的片形结构 |
| CN101207009A (zh) * | 2006-12-18 | 2008-06-25 | 信越化学工业株式会社 | Soi基板的制造方法 |
| CN101558486A (zh) * | 2007-04-27 | 2009-10-14 | 硅绝缘体技术有限公司 | 制造复合材料晶片的方法以及相应的复合材料晶片 |
| CN101866874A (zh) * | 2010-06-01 | 2010-10-20 | 中国科学院上海微系统与信息技术研究所 | 一种利用层转移技术制备绝缘体上锗硅材料的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6138931B2 (ja) | 2017-05-31 |
| EP2865004A1 (en) | 2015-04-29 |
| WO2014001869A1 (en) | 2014-01-03 |
| CN104584203A (zh) | 2015-04-29 |
| US20150187638A1 (en) | 2015-07-02 |
| JP2015525964A (ja) | 2015-09-07 |
| FR2992464A1 (fr) | 2013-12-27 |
| FR2992464B1 (fr) | 2015-04-03 |
| KR20150023514A (ko) | 2015-03-05 |
| EP2865004B1 (en) | 2020-07-29 |
| SG11201408606TA (en) | 2015-01-29 |
| KR102007315B1 (ko) | 2019-08-06 |
| US9343351B2 (en) | 2016-05-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI685892B (zh) | 用於製造固體層的方法 | |
| US8993461B2 (en) | Method for curing defects in a semiconductor layer | |
| EP1435111B1 (fr) | Procede de fabrication de couches minces contenant des microcomposants | |
| JP4290068B2 (ja) | ウェーハ製造方法 | |
| JP2009135468A5 (ja) | 半導体基板及び半導体装置の作製方法 | |
| KR20180010274A (ko) | 본드 및 릴리스 레이어 이송 프로세스 | |
| CN107454892A (zh) | 用于切削材料的晶片制造和晶片处理的方法 | |
| KR101972914B1 (ko) | 산화물층을 포함하는 구조 내에 위치한 결합 인터페이스의 안정화 방법 및 획득된 구조 | |
| KR102715222B1 (ko) | 화합물 반도체 기판, 펠리클막, 및 화합물 반도체 기판의 제조 방법 | |
| JP2013533621A (ja) | 注入および照射により基板を調製する方法 | |
| CN104584203A (zh) | 用于转印层的工艺 | |
| CN106041330A (zh) | 用于制造固体层的方法和设备以及根据该方法制造的晶片 | |
| JP2012038932A (ja) | 半導体ウェーハの薄厚化方法および貼り合せウェーハの製造方法 | |
| JP2021522682A5 (enExample) | ||
| CN101364534A (zh) | 使复合衬底沿脆化面断裂的方法和装置 | |
| CN102203911B (zh) | 通过启动和光流加热薄板的层的方法和设备 | |
| TW202243061A (zh) | 自基板分離結構之方法 | |
| US8563399B2 (en) | Detachable substrate and processes for fabricating and detaching such a substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |