CN104584203B - 用于转印层的工艺 - Google Patents

用于转印层的工艺 Download PDF

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Publication number
CN104584203B
CN104584203B CN201380033314.5A CN201380033314A CN104584203B CN 104584203 B CN104584203 B CN 104584203B CN 201380033314 A CN201380033314 A CN 201380033314A CN 104584203 B CN104584203 B CN 104584203B
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CN
China
Prior art keywords
transfer printing
bonding layer
printing process
donor substrate
substrate
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CN201380033314.5A
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English (en)
Chinese (zh)
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CN104584203A (zh
Inventor
M·布鲁尔
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Soitec SA
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Soitec SA
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19Preparing inhomogeneous wafers
    • H10P90/1904Preparing vertically inhomogeneous wafers
    • H10P90/1906Preparing SOI wafers
    • H10P90/1914Preparing SOI wafers using bonding
    • H10P90/1916Preparing SOI wafers using bonding with separation or delamination along an ion implanted layer, e.g. Smart-cut
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/12OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising dopants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302Non-deposition formation processes
    • H10P14/6322Formation by thermal treatments
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P54/00Cutting or separating of wafers, substrates or parts of devices
    • H10P54/50Cutting or separating of wafers, substrates or parts of devices by scoring, breaking or cleaving
    • H10P54/52Cutting or separating of wafers, substrates or parts of devices by scoring, breaking or cleaving by cleaving
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10Isolation regions comprising dielectric materials
    • H10W10/181Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Recrystallisation Techniques (AREA)
  • Ceramic Products (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Electromagnetism (AREA)
  • Heat Sensitive Colour Forming Recording (AREA)
CN201380033314.5A 2012-06-26 2013-06-14 用于转印层的工艺 Active CN104584203B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1201802 2012-06-26
FR1201802A FR2992464B1 (fr) 2012-06-26 2012-06-26 Procede de transfert d'une couche
PCT/IB2013/001252 WO2014001869A1 (en) 2012-06-26 2013-06-14 Process for transferring a layer

Publications (2)

Publication Number Publication Date
CN104584203A CN104584203A (zh) 2015-04-29
CN104584203B true CN104584203B (zh) 2018-03-20

Family

ID=48782549

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380033314.5A Active CN104584203B (zh) 2012-06-26 2013-06-14 用于转印层的工艺

Country Status (8)

Country Link
US (1) US9343351B2 (enExample)
EP (1) EP2865004B1 (enExample)
JP (1) JP6138931B2 (enExample)
KR (1) KR102007315B1 (enExample)
CN (1) CN104584203B (enExample)
FR (1) FR2992464B1 (enExample)
SG (1) SG11201408606TA (enExample)
WO (1) WO2014001869A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3007892B1 (fr) * 2013-06-27 2015-07-31 Commissariat Energie Atomique Procede de transfert d'une couche mince avec apport d'energie thermique a une zone fragilisee via une couche inductive
US9966466B2 (en) * 2016-08-08 2018-05-08 Globalfoundries Inc. Semiconductor-on-insulator wafer, semiconductor structure including a transistor, and methods for the formation and operation thereof
CN108365083B (zh) * 2018-02-07 2022-03-08 济南晶正电子科技有限公司 用于声表面波器件的复合压电衬底的制造方法

Citations (6)

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US6486008B1 (en) * 2000-02-25 2002-11-26 John Wolf International, Inc. Manufacturing method of a thin film on a substrate
CN1478295A (zh) * 2000-11-27 2004-02-25 S��O��I��Tec��Ե���Ϲ輼����˾ 尤其是用于光学器件、电子器件或光电器件的衬底的制造方法和经其得到的衬底
CN1883031A (zh) * 2003-09-30 2006-12-20 特雷西特技术公司 制造片形结构的方法、特别是由硅制造片形结构的方法、所述方法的应用、和由此制备的片形结构、特别是由硅制造的片形结构
CN101207009A (zh) * 2006-12-18 2008-06-25 信越化学工业株式会社 Soi基板的制造方法
CN101558486A (zh) * 2007-04-27 2009-10-14 硅绝缘体技术有限公司 制造复合材料晶片的方法以及相应的复合材料晶片
CN101866874A (zh) * 2010-06-01 2010-10-20 中国科学院上海微系统与信息技术研究所 一种利用层转移技术制备绝缘体上锗硅材料的方法

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EP1351308B1 (en) * 1996-08-27 2009-04-22 Seiko Epson Corporation Exfoliating method and transferring method of thin film device
US6291314B1 (en) * 1998-06-23 2001-09-18 Silicon Genesis Corporation Controlled cleavage process and device for patterned films using a release layer
FR2855909B1 (fr) * 2003-06-06 2005-08-26 Soitec Silicon On Insulator Procede d'obtention concomitante d'au moins une paire de structures comprenant au moins une couche utile reportee sur un substrat
US7052978B2 (en) * 2003-08-28 2006-05-30 Intel Corporation Arrangements incorporating laser-induced cleaving
US20060240275A1 (en) * 2005-04-25 2006-10-26 Gadkaree Kishor P Flexible display substrates
DE102006007293B4 (de) * 2006-01-31 2023-04-06 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen eines Quasi-Substratwafers und ein unter Verwendung eines solchen Quasi-Substratwafers hergestellter Halbleiterkörper
JP5284576B2 (ja) * 2006-11-10 2013-09-11 信越化学工業株式会社 半導体基板の製造方法
US20090179160A1 (en) * 2008-01-16 2009-07-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor substrate manufacturing apparatus
KR20100008123A (ko) * 2008-07-15 2010-01-25 고려대학교 산학협력단 이중 히트 씽크층으로 구성된 지지대를 갖춘 고성능수직구조의 반도체 발광소자
JP5496608B2 (ja) * 2008-11-12 2014-05-21 信越化学工業株式会社 Soi基板の作製方法
JP5643509B2 (ja) * 2009-12-28 2014-12-17 信越化学工業株式会社 応力を低減したsos基板の製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6486008B1 (en) * 2000-02-25 2002-11-26 John Wolf International, Inc. Manufacturing method of a thin film on a substrate
CN1478295A (zh) * 2000-11-27 2004-02-25 S��O��I��Tec��Ե���Ϲ輼����˾ 尤其是用于光学器件、电子器件或光电器件的衬底的制造方法和经其得到的衬底
CN1883031A (zh) * 2003-09-30 2006-12-20 特雷西特技术公司 制造片形结构的方法、特别是由硅制造片形结构的方法、所述方法的应用、和由此制备的片形结构、特别是由硅制造的片形结构
CN101207009A (zh) * 2006-12-18 2008-06-25 信越化学工业株式会社 Soi基板的制造方法
CN101558486A (zh) * 2007-04-27 2009-10-14 硅绝缘体技术有限公司 制造复合材料晶片的方法以及相应的复合材料晶片
CN101866874A (zh) * 2010-06-01 2010-10-20 中国科学院上海微系统与信息技术研究所 一种利用层转移技术制备绝缘体上锗硅材料的方法

Also Published As

Publication number Publication date
JP6138931B2 (ja) 2017-05-31
EP2865004A1 (en) 2015-04-29
WO2014001869A1 (en) 2014-01-03
CN104584203A (zh) 2015-04-29
US20150187638A1 (en) 2015-07-02
JP2015525964A (ja) 2015-09-07
FR2992464A1 (fr) 2013-12-27
FR2992464B1 (fr) 2015-04-03
KR20150023514A (ko) 2015-03-05
EP2865004B1 (en) 2020-07-29
SG11201408606TA (en) 2015-01-29
KR102007315B1 (ko) 2019-08-06
US9343351B2 (en) 2016-05-17

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