JP6135088B2 - 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置 - Google Patents

超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置 Download PDF

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Publication number
JP6135088B2
JP6135088B2 JP2012226671A JP2012226671A JP6135088B2 JP 6135088 B2 JP6135088 B2 JP 6135088B2 JP 2012226671 A JP2012226671 A JP 2012226671A JP 2012226671 A JP2012226671 A JP 2012226671A JP 6135088 B2 JP6135088 B2 JP 6135088B2
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Japan
Prior art keywords
groove
reinforcing member
ultrasonic transducer
substrate
ultrasonic
Prior art date
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JP2012226671A
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English (en)
Japanese (ja)
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JP2014078906A (ja
JP2014078906A5 (enExample
Inventor
友亮 中村
友亮 中村
康憲 大西
康憲 大西
一輝 吉田
一輝 吉田
甲午 遠藤
甲午 遠藤
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2012226671A priority Critical patent/JP6135088B2/ja
Priority to EP13188051.0A priority patent/EP2719471A3/en
Priority to CN201310471388.9A priority patent/CN103720486B/zh
Priority to US14/051,563 priority patent/US9508916B2/en
Publication of JP2014078906A publication Critical patent/JP2014078906A/ja
Publication of JP2014078906A5 publication Critical patent/JP2014078906A5/ja
Priority to US15/213,544 priority patent/US20160329482A1/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4405—Device being mounted on a trolley
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4411—Device being modular
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4427—Device being portable or laptop-like
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Veterinary Medicine (AREA)
  • Medical Informatics (AREA)
  • Biophysics (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Gynecology & Obstetrics (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP2012226671A 2012-10-12 2012-10-12 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置 Active JP6135088B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012226671A JP6135088B2 (ja) 2012-10-12 2012-10-12 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
EP13188051.0A EP2719471A3 (en) 2012-10-12 2013-10-10 Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus
CN201310471388.9A CN103720486B (zh) 2012-10-12 2013-10-10 超声波转换器装置、探测头、超声波探测器及电子设备
US14/051,563 US9508916B2 (en) 2012-10-12 2013-10-11 Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus
US15/213,544 US20160329482A1 (en) 2012-10-12 2016-07-19 Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012226671A JP6135088B2 (ja) 2012-10-12 2012-10-12 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置

Publications (3)

Publication Number Publication Date
JP2014078906A JP2014078906A (ja) 2014-05-01
JP2014078906A5 JP2014078906A5 (enExample) 2015-11-19
JP6135088B2 true JP6135088B2 (ja) 2017-05-31

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Country Status (4)

Country Link
US (2) US9508916B2 (enExample)
EP (1) EP2719471A3 (enExample)
JP (1) JP6135088B2 (enExample)
CN (1) CN103720486B (enExample)

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JP5900107B2 (ja) * 2012-03-30 2016-04-06 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6102075B2 (ja) * 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP6252280B2 (ja) 2014-03-20 2017-12-27 セイコーエプソン株式会社 超音波デバイスユニットおよびプローブ並びに電子機器および超音波画像装置
WO2016002971A1 (ja) * 2014-07-04 2016-01-07 セイコーエプソン株式会社 超音波センサー
JP6476633B2 (ja) * 2014-07-31 2019-03-06 セイコーエプソン株式会社 圧電デバイス
JP6314777B2 (ja) * 2014-09-30 2018-04-25 セイコーエプソン株式会社 超音波センサー並びにプローブおよび電子機器
JP6451216B2 (ja) * 2014-10-31 2019-01-16 セイコーエプソン株式会社 超音波プローブ、電子機器および超音波画像装置
JP2016181841A (ja) * 2015-03-24 2016-10-13 セイコーエプソン株式会社 超音波センサー及びその駆動方法
CN104809431B (zh) * 2015-04-03 2018-04-27 业成光电（深圳）有限公司 超声波感测装置
CN107530006A (zh) * 2015-04-17 2018-01-02 太阳诱电株式会社 振动波形传感器和波形分析装置
JP6597026B2 (ja) * 2015-07-30 2019-10-30 セイコーエプソン株式会社 超音波デバイス及び超音波モジュール
JP6617536B2 (ja) * 2015-11-30 2019-12-11 セイコーエプソン株式会社 圧電デバイス、圧電モジュール及び電子機器
DE102015224763A1 (de) * 2015-12-10 2017-06-14 Robert Bosch Gmbh Schallwandleranordnung und Verfahren zur Herstellung einer Schallwandleranordnung
DE102015224767A1 (de) * 2015-12-10 2017-06-14 Robert Bosch Gmbh Schallwandleranordnung und Verfahren zur Herstellung einer Schallwandleranordnung
JP6805630B2 (ja) * 2016-08-24 2020-12-23 セイコーエプソン株式会社 超音波デバイス、超音波モジュール、及び超音波測定装置
JP6683096B2 (ja) * 2016-09-30 2020-04-15 セイコーエプソン株式会社 超音波デバイス、超音波探触子、及び超音波装置
JP6753293B2 (ja) * 2016-12-09 2020-09-09 セイコーエプソン株式会社 超音波デバイス及び超音波装置
JP6862820B2 (ja) * 2016-12-26 2021-04-21 セイコーエプソン株式会社 超音波デバイス及び超音波装置
CN108039405B (zh) * 2018-01-11 2023-10-20 中国工程物理研究院总体工程研究所 一种压电元件、压电传感器和速度及位移检测装置
JP7205191B2 (ja) * 2018-11-22 2023-01-17 セイコーエプソン株式会社 超音波センサー、及び電子機器
CN110031905B (zh) * 2019-05-16 2021-04-09 武昌理工学院 一种远距离微波探测装置及探测方法
JP7666217B2 (ja) * 2021-08-05 2025-04-22 セイコーエプソン株式会社 超音波デバイス、超音波診断装置
JP2024141333A (ja) * 2023-03-29 2024-10-10 セイコーエプソン株式会社 超音波プローブ

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JP6102075B2 (ja) 2012-03-30 2017-03-29 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
JP5900107B2 (ja) 2012-03-30 2016-04-06 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置

Also Published As

Publication number Publication date
EP2719471A3 (en) 2015-11-18
CN103720486B (zh) 2017-12-01
CN103720486A (zh) 2014-04-16
US9508916B2 (en) 2016-11-29
JP2014078906A (ja) 2014-05-01
EP2719471A2 (en) 2014-04-16
US20160329482A1 (en) 2016-11-10
US20140103781A1 (en) 2014-04-17

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