JP6116198B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP6116198B2
JP6116198B2 JP2012251482A JP2012251482A JP6116198B2 JP 6116198 B2 JP6116198 B2 JP 6116198B2 JP 2012251482 A JP2012251482 A JP 2012251482A JP 2012251482 A JP2012251482 A JP 2012251482A JP 6116198 B2 JP6116198 B2 JP 6116198B2
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JP
Japan
Prior art keywords
grinding
stop layer
flow path
forming member
path forming
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012251482A
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English (en)
Japanese (ja)
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JP2014097639A (ja
JP2014097639A5 (enExample
Inventor
明夫 後藤
明夫 後藤
広志 樋口
広志 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012251482A priority Critical patent/JP6116198B2/ja
Priority to US14/076,426 priority patent/US9517625B2/en
Priority to CN201310573190.1A priority patent/CN103818119B/zh
Publication of JP2014097639A publication Critical patent/JP2014097639A/ja
Publication of JP2014097639A5 publication Critical patent/JP2014097639A5/ja
Application granted granted Critical
Publication of JP6116198B2 publication Critical patent/JP6116198B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2012251482A 2012-11-15 2012-11-15 液体吐出ヘッドの製造方法 Active JP6116198B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012251482A JP6116198B2 (ja) 2012-11-15 2012-11-15 液体吐出ヘッドの製造方法
US14/076,426 US9517625B2 (en) 2012-11-15 2013-11-11 Liquid discharge head and method of manufacturing the same
CN201310573190.1A CN103818119B (zh) 2012-11-15 2013-11-15 液体排出头及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012251482A JP6116198B2 (ja) 2012-11-15 2012-11-15 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2014097639A JP2014097639A (ja) 2014-05-29
JP2014097639A5 JP2014097639A5 (enExample) 2016-01-07
JP6116198B2 true JP6116198B2 (ja) 2017-04-19

Family

ID=50681296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012251482A Active JP6116198B2 (ja) 2012-11-15 2012-11-15 液体吐出ヘッドの製造方法

Country Status (3)

Country Link
US (1) US9517625B2 (enExample)
JP (1) JP6116198B2 (enExample)
CN (1) CN103818119B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6041527B2 (ja) * 2012-05-16 2016-12-07 キヤノン株式会社 液体吐出ヘッド
JP6230279B2 (ja) * 2013-06-06 2017-11-15 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6376690B2 (ja) * 2014-08-28 2018-08-22 東芝テック株式会社 液滴噴射装置および画像形成装置
US10239321B2 (en) * 2015-12-02 2019-03-26 Canon Kabushiki Kaisha Liquid ejection head and method for manufacturing flow passage member of liquid ejection head
JP2017105172A (ja) * 2015-12-02 2017-06-15 キヤノン株式会社 液体吐出ヘッドおよび液体吐出ヘッドの流路部材の製造方法
JP2018089957A (ja) * 2016-12-02 2018-06-14 株式会社リコー インクジェット記録装置、印刷装置、及び硬化物製造方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6176571B1 (en) * 1996-03-28 2001-01-23 Sony Corporation Printer
JPH10307381A (ja) * 1997-03-04 1998-11-17 Fuji Photo Film Co Ltd 液体噴射装置及び液体噴射装置の製造方法
JP3826608B2 (ja) * 1999-03-17 2006-09-27 富士写真フイルム株式会社 液体吐出部表面の撥水膜形成
JP2003053966A (ja) * 2000-06-12 2003-02-26 Seiko Epson Corp インクジェット式記録ヘッド
JP2002001966A (ja) 2000-06-22 2002-01-08 Ricoh Co Ltd 記録ヘッドと記録ヘッドの製造方法及びインクジェット記録装置
EP1172215B1 (en) * 2000-07-10 2017-09-20 Canon Kabushiki Kaisha Ink jet recording head and recording apparatus
JP3592208B2 (ja) * 2000-07-10 2004-11-24 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
US6679595B2 (en) * 2001-02-08 2004-01-20 Brother Kogyo Kabushiki Kaisha Ink jet recording apparatus
US6627467B2 (en) * 2001-10-31 2003-09-30 Hewlett-Packard Development Company, Lp. Fluid ejection device fabrication
US7171748B2 (en) * 2002-08-30 2007-02-06 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording head
KR100529307B1 (ko) * 2002-09-04 2005-11-17 삼성전자주식회사 모노리틱 잉크제트 프린트 헤드 및 이의 제조 방법
JP2005231115A (ja) * 2004-02-18 2005-09-02 Canon Inc 液体吐出用ヘッドおよびその製造方法
JP4581600B2 (ja) * 2004-09-28 2010-11-17 ブラザー工業株式会社 インクジェットプリンタ用ヘッド
JP2006137030A (ja) * 2004-11-10 2006-06-01 Canon Inc 液体吐出記録ヘッド及びその製造方法
JP2006218735A (ja) * 2005-02-10 2006-08-24 Canon Inc インクジェット記録ヘッドおよびその製造方法
JP4713269B2 (ja) * 2005-08-08 2011-06-29 ソニー株式会社 液体吐出型記録ヘッドの製造方法
JP2007118313A (ja) * 2005-10-26 2007-05-17 Sony Corp 液吐出ヘッド及び液体吐出装置
US7600856B2 (en) * 2006-12-12 2009-10-13 Eastman Kodak Company Liquid ejector having improved chamber walls
JP2009202338A (ja) * 2008-02-26 2009-09-10 Brother Ind Ltd 液滴噴射装置及び液滴噴射装置の製造方法
JP2009208349A (ja) * 2008-03-04 2009-09-17 Fujifilm Corp ノズルプレートの凸部製造方法、ノズルプレート、インクジェットヘッド及び画像形成装置
US20090233386A1 (en) * 2008-03-12 2009-09-17 Yimin Guan Method for forming an ink jetting device
US8499453B2 (en) 2009-11-26 2013-08-06 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head, and method of manufacturing discharge port member
US8528209B2 (en) 2009-12-15 2013-09-10 Canon Kabushiki Kaisha Method for manufacturing discharge port member and method for manufacturing liquid discharge head
JP5701000B2 (ja) * 2010-10-07 2015-04-15 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
US8636340B2 (en) * 2011-03-14 2014-01-28 Funai Electric Co., Ltd. Printheads and method for assembling printheads

Also Published As

Publication number Publication date
CN103818119A (zh) 2014-05-28
US9517625B2 (en) 2016-12-13
JP2014097639A (ja) 2014-05-29
CN103818119B (zh) 2016-03-09
US20140132672A1 (en) 2014-05-15

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