JP6234095B2 - 液体吐出ヘッド及びその製造方法 - Google Patents
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Description
まず、表面1a側にエネルギー発生素子2を有する基板1を用意した。基板1としては、表面1aの結晶方位が(100)であるシリコン基板を用いた。エネルギー発生素子2としては、TaSiNで形成される発熱抵抗体を用いた。基板1の表面側には、複数の芯部材9を形成した。芯部材9の形成は、以下のように行った。まず、基板1の表面側に、非感光性のポリイミド(製品名:PI2611、日立化成デュポンマイクロシステムズ社製)をスピンコートで塗布した。続けてポリイミド上にポジ型のレジスト(製品名:iP5700、東京応化社製)を塗布した。次に、レジストに露光を行い、レジストとポリイミドを一括でアルカリ液によって現像した。レジストを剥離後、オーブンベークを行い脱水縮合させることで、ポリイミドからなる芯部材9を形成した(図2(a))。尚、芯部材9として用いたポリイミドのガラス転移温度は400℃であった。芯部材は、基板1の表面1aを上方からみたときに、エネルギー発生素子を覆わないようにし、また最大の幅を10μmとした。基板1の表面1aからの高さは20μmとした。
・CABOJET 300(キャボット製、自己分散顔料) 3.0質量部
・グリセリン 5.0質量部
・ジエチレングリコール 5.0質量部
・アセチレノールE100(川研ファインケミカル製、界面活性剤) 0.2質量部
・水 86.8質量部
その後、液体吐出ヘッドのノズル層(芯部材、被覆部材、及び吐出口形成部材)が基板から剥離しているかを顕微鏡で確認したところ、剥離は確認されなかった。
CVD法により芯部材9を覆うSiN膜を成膜し、被覆部材10を形成する工程(図2(b−1))までは、実施例1と同様とした。
複数の芯部材9の間の領域を、ポリイミドからなる充填材料11で充填する工程(図2(c))までは、実施例1と同様とした。
Claims (14)
- 基板と、前記基板の表面側に、液体を吐出するエネルギーを発生するエネルギー発生素子と、液体の流路の側壁部材と、前記液体が吐出される吐出口を形成する吐出口形成部材と、を有する液体吐出ヘッドであって、
前記液体の流路は、側壁が前記側壁部材で形成され、天井が前記吐出口形成部材で形成されており、
前記側壁部材は、前記基板の表面から延在する芯部材と、前記芯部材の表面を覆う被覆部材とで形成されており、
前記被覆部材は、前記基板の表面を覆い、
前記吐出口形成部材は、無機材料で形成されており、
前記芯部材は、ノボラック樹脂、ポリイミド、ポリエーテルエーテルケトン、ポリアミド、ポリアミドイミド、ポリエーテルアミド、ポリエーテルイミド、エポキシ樹脂、ポリフェニレンサルファイド、ポリアリレート、ポリサルフォン、ポリエーテルサルフォン、ポリベンゾイミダゾールの少なくとも1つで形成されていることを特徴とする液体吐出ヘッド。 - 基板と、前記基板の表面側に、液体を吐出するエネルギーを発生するエネルギー発生素子と、液体の流路の側壁部材と、前記液体が吐出される吐出口を形成する吐出口形成部材と、を有する液体吐出ヘッドであって、
前記液体の流路は、側壁が前記側壁部材で形成され、天井が前記吐出口形成部材で形成されており、
前記側壁部材は、前記基板の表面から延在する芯部材と、前記芯部材の表面を覆う被覆部材とで形成されており、
前記被覆部材は、前記基板の表面を覆い、
前記吐出口形成部材は、無機材料で形成されており、
前記被覆部材は、前記エネルギー発生素子を被覆していないことを特徴とする液体吐出ヘッド。 - 基板と、前記基板の表面側に、液体を吐出するエネルギーを発生するエネルギー発生素子と、液体の流路の側壁部材と、前記液体が吐出される吐出口を形成する吐出口形成部材と、を有する液体吐出ヘッドであって、
前記液体の流路は、側壁が前記側壁部材で形成され、天井が前記吐出口形成部材で形成されており、
前記側壁部材は、前記基板の表面から延在する芯部材と、前記芯部材の表面を覆う被覆部材とで形成されており、
前記被覆部材は、前記基板の表面を覆い、
前記吐出口形成部材は、無機材料で形成されており、
前記吐出口形成部材は、前記芯部材の天井部分と接触していることを特徴とする液体吐出ヘッド。 - 前記芯部材は、ノボラック樹脂、ポリイミド、ポリエーテルエーテルケトン、ポリアミド、ポリアミドイミド、ポリエーテルアミド、ポリエーテルイミド、エポキシ樹脂、ポリフェニレンサルファイド、ポリアリレート、ポリサルフォン、ポリエーテルサルフォン、ポリベンゾイミダゾールの少なくとも1つで形成される請求項2または3に記載の液体吐出ヘッド。
- 前記被覆部材は、前記エネルギー発生素子を被覆している請求項1または3に記載の液体吐出ヘッド。
- 前記被覆部材は、前記エネルギー発生素子を被覆していない請求項1または3に記載の液体吐出ヘッド。
- 前記吐出口形成部材は、前記芯部材の天井部分と接触している請求項1または2に記載の液体吐出ヘッド。
- 前記吐出口形成部材は、前記芯部材の天井部分との間に、前記被覆部材を介している1または2に記載の液体吐出ヘッド。
- 前記被覆部材は、窒化シリコン、酸化シリコン、炭化シリコン、炭窒化シリコンの少なくとも1つで形成される請求項1乃至8のいずれか1項に記載の液体吐出ヘッド。
- 前記吐出口形成部材は、窒化シリコン、酸化シリコン、炭化シリコン、炭窒化シリコンの少なくとも1つで形成される請求項1乃至9のいずれか1項に記載の液体吐出ヘッド。
- 前記液体の流路の底は、被覆部材で形成されている請求項1乃至10のいずれか1項に記載の液体吐出ヘッド。
- 請求項1乃至11のいずれか1項に記載の液体吐出ヘッドを製造する方法であって、
表面側にエネルギー発生素子を有する基板を用意する工程と、
前記基板の表面側に、複数の芯部材を形成する工程と、
前記基板の表面及び前記芯部材を被覆部材で被覆する工程と、
前記複数の芯部材の間の領域を充填し、かつ前記被覆部材の天井部分を覆う充填材料を付与する工程と、
前記充填材料を、少なくとも前記被覆部材が露出するまで除去する工程と、
吐出口形成部材を形成する工程と、
を有し、前記被覆部材の露出の検出を、前記被覆部材が露出したことによるトルク変化を検出するトルク検出法で行うことを特徴とする液体吐出ヘッドの製造方法。 - 請求項1乃至11のいずれか1項に記載の液体吐出ヘッドを製造する方法であって、
表面側にエネルギー発生素子を有する基板を用意する工程と、
前記基板の表面側に、複数の芯部材を形成する工程と、
前記基板の表面及び前記芯部材を被覆部材で被覆する工程と、
前記複数の芯部材の間の領域を充填し、かつ前記被覆部材の天井部分を覆う充填材料を付与する工程と、
前記充填材料を、少なくとも前記被覆部材と、前記芯部材の天井部分とが露出するまで除去する工程と、
吐出口形成部材を形成する工程と、
を有することを特徴とする液体吐出ヘッドの製造方法。 - 前記芯部材の天井部分の露出の検出を、前記芯部材の天井部分が露出したことによるトルク変化を検出するトルク検出法で行う請求項13に記載の液体吐出ヘッドの製造方法。
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US10239321B2 (en) | 2015-12-02 | 2019-03-26 | Canon Kabushiki Kaisha | Liquid ejection head and method for manufacturing flow passage member of liquid ejection head |
JP2017105172A (ja) * | 2015-12-02 | 2017-06-15 | キヤノン株式会社 | 液体吐出ヘッドおよび液体吐出ヘッドの流路部材の製造方法 |
JP7045980B2 (ja) * | 2018-11-09 | 2022-04-01 | ユニ・チャーム株式会社 | リサイクルパルプ繊維を製造する方法、及びリサイクルパルプ繊維 |
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US6569343B1 (en) * | 1999-07-02 | 2003-05-27 | Canon Kabushiki Kaisha | Method for producing liquid discharge head, liquid discharge head, head cartridge, liquid discharging recording apparatus, method for producing silicon plate and silicon plate |
JP2001287373A (ja) * | 1999-11-30 | 2001-10-16 | Canon Inc | インクジェット記録ヘッドの製造方法、および該製造方法により製造されたインクジェット記録ヘッド |
US6644786B1 (en) * | 2002-07-08 | 2003-11-11 | Eastman Kodak Company | Method of manufacturing a thermally actuated liquid control device |
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US7600856B2 (en) | 2006-12-12 | 2009-10-13 | Eastman Kodak Company | Liquid ejector having improved chamber walls |
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