JP6097216B2 - 電子デバイス用のゲート絶縁層 - Google Patents

電子デバイス用のゲート絶縁層 Download PDF

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Publication number
JP6097216B2
JP6097216B2 JP2013526346A JP2013526346A JP6097216B2 JP 6097216 B2 JP6097216 B2 JP 6097216B2 JP 2013526346 A JP2013526346 A JP 2013526346A JP 2013526346 A JP2013526346 A JP 2013526346A JP 6097216 B2 JP6097216 B2 JP 6097216B2
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Japan
Prior art keywords
polymer
insulating layer
gate insulating
group
formula
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JP2013526346A
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English (en)
Japanese (ja)
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JP2013541191A (ja
JP2013541191A5 (fr
Inventor
ミュラー，デイヴィッド，クリストフ
カル，トビー
ミスキーウィチ，パウエル
カラスコ−オロツコ，ミゲル
ベル，アンドリュー
エルス，エドモンド
ローデス，ラリー，エフ．
藤田一義
エヌジー，ヘンドラ
カンダナラチチ，プラモッド
スミス，スティーブン
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Merck Patent GmbH
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Merck Patent GmbH
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Publication of JP2013541191A publication Critical patent/JP2013541191A/ja
Publication of JP2013541191A5 publication Critical patent/JP2013541191A5/ja
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F32/00—Homopolymers and copolymers of cyclic compounds having no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F232/00—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F32/00—Homopolymers and copolymers of cyclic compounds having no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
    • C08F32/02—Homopolymers and copolymers of cyclic compounds having no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system having no condensed rings
    • C08F32/04—Homopolymers and copolymers of cyclic compounds having no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system having no condensed rings having one carbon-to-carbon double bond
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L45/00—Compositions of homopolymers or copolymers of compounds having no unsaturated aliphatic radicals in side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic or in a heterocyclic ring system; Compositions of derivatives of such polymers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/478—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a layer of composite material comprising interpenetrating or embedded materials, e.g. TiO2 particles in a polymer matrix
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/141—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/151—Copolymers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/464—Lateral top-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/80—Constructional details
    • H10K10/88—Passivation; Containers; Encapsulations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Thin Film Transistor (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
  • Formation Of Insulating Films (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2013526346A 2010-09-02 2011-08-26 電子デバイス用のゲート絶縁層 Active JP6097216B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP10009118 2010-09-02
EP10009118.0 2010-09-02
US37979910P 2010-09-03 2010-09-03
US61/379,799 2010-09-03
PCT/EP2011/004282 WO2012028279A1 (fr) 2010-09-02 2011-08-26 Couche isolante de grille destinée à des dispositifs électroniques

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017027227A Division JP6334020B2 (ja) 2010-09-02 2017-02-16 電子デバイス用のゲート絶縁層

Publications (3)

Publication Number Publication Date
JP2013541191A JP2013541191A (ja) 2013-11-07
JP2013541191A5 JP2013541191A5 (fr) 2014-10-16
JP6097216B2 true JP6097216B2 (ja) 2017-03-15

Family

ID=44534260

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JP2013526346A Active JP6097216B2 (ja) 2010-09-02 2011-08-26 電子デバイス用のゲート絶縁層
JP2017027227A Active JP6334020B2 (ja) 2010-09-02 2017-02-16 電子デバイス用のゲート絶縁層

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Country Status (11)

Country Link
US (2) US9175123B2 (fr)
EP (2) EP2611841B1 (fr)
JP (2) JP6097216B2 (fr)
KR (1) KR101842735B1 (fr)
CN (3) CN105038069B (fr)
DE (1) DE112011102917T5 (fr)
GB (1) GB2497451A (fr)
RU (1) RU2013114414A (fr)
SG (1) SG187955A1 (fr)
TW (1) TWI618723B (fr)
WO (1) WO2012028279A1 (fr)

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Also Published As

Publication number Publication date
CN105038069A (zh) 2015-11-11
JP2013541191A (ja) 2013-11-07
GB201303582D0 (en) 2013-04-10
CN105038069B (zh) 2017-10-17
CN103261250A (zh) 2013-08-21
WO2012028279A9 (fr) 2012-05-31
KR101842735B1 (ko) 2018-03-27
WO2012028279A1 (fr) 2012-03-08
US20120056183A1 (en) 2012-03-08
TW201219432A (en) 2012-05-16
US9647222B2 (en) 2017-05-09
EP2676979B1 (fr) 2016-07-13
CN104877292A (zh) 2015-09-02
DE112011102917T5 (de) 2013-09-05
EP2611841B1 (fr) 2015-10-28
SG187955A1 (en) 2013-03-28
US9175123B2 (en) 2015-11-03
EP2676979A1 (fr) 2013-12-25
RU2013114414A (ru) 2014-10-10
KR20130114121A (ko) 2013-10-16
US20150372246A1 (en) 2015-12-24
JP6334020B2 (ja) 2018-05-30
EP2611841A1 (fr) 2013-07-10
TWI618723B (zh) 2018-03-21
JP2017141446A (ja) 2017-08-17
CN103261250B (zh) 2016-11-09
GB2497451A8 (en) 2013-06-19
GB2497451A (en) 2013-06-12

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