JP6094786B2 - フィラメント交換器及びフィラメント交換構造 - Google Patents

フィラメント交換器及びフィラメント交換構造 Download PDF

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Publication number
JP6094786B2
JP6094786B2 JP2012117041A JP2012117041A JP6094786B2 JP 6094786 B2 JP6094786 B2 JP 6094786B2 JP 2012117041 A JP2012117041 A JP 2012117041A JP 2012117041 A JP2012117041 A JP 2012117041A JP 6094786 B2 JP6094786 B2 JP 6094786B2
Authority
JP
Japan
Prior art keywords
filament
exchanger
vacuum chamber
auxiliary
support structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012117041A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013243098A (ja
Inventor
佳宏 滝上
佳宏 滝上
良 中矢
良 中矢
茂久 田村
茂久 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Ion Equipment Co Ltd
Original Assignee
Nissin Ion Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Ion Equipment Co Ltd filed Critical Nissin Ion Equipment Co Ltd
Priority to JP2012117041A priority Critical patent/JP6094786B2/ja
Priority to CN201310009476.7A priority patent/CN103426705B/zh
Priority to KR1020130008031A priority patent/KR101341827B1/ko
Publication of JP2013243098A publication Critical patent/JP2013243098A/ja
Application granted granted Critical
Publication of JP6094786B2 publication Critical patent/JP6094786B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/14—Dismountable vessels or containers, e.g. for replacing cathode heater
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/186—Valves

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Packages (AREA)
JP2012117041A 2012-05-22 2012-05-22 フィラメント交換器及びフィラメント交換構造 Active JP6094786B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012117041A JP6094786B2 (ja) 2012-05-22 2012-05-22 フィラメント交換器及びフィラメント交換構造
CN201310009476.7A CN103426705B (zh) 2012-05-22 2013-01-10 灯丝更换器和灯丝更换结构
KR1020130008031A KR101341827B1 (ko) 2012-05-22 2013-01-24 필라멘트 교환기 및 필라멘트 교환 구조

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012117041A JP6094786B2 (ja) 2012-05-22 2012-05-22 フィラメント交換器及びフィラメント交換構造

Publications (2)

Publication Number Publication Date
JP2013243098A JP2013243098A (ja) 2013-12-05
JP6094786B2 true JP6094786B2 (ja) 2017-03-15

Family

ID=49651295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012117041A Active JP6094786B2 (ja) 2012-05-22 2012-05-22 フィラメント交換器及びフィラメント交換構造

Country Status (3)

Country Link
JP (1) JP6094786B2 (ko)
KR (1) KR101341827B1 (ko)
CN (1) CN103426705B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6474036B2 (ja) * 2015-03-11 2019-02-27 日新イオン機器株式会社 部材交換器
JP6455494B2 (ja) * 2016-09-15 2019-01-23 日新イオン機器株式会社 イオン源
CN106653529B (zh) * 2016-10-31 2018-07-24 中国电子科技集团公司第四十八研究所 一种宽束流的条形离子源
US20230375445A1 (en) * 2022-05-19 2023-11-23 Fei Company Broad ion beam (bib) systems for more efficient processing of multiple samples

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835851A (ja) * 1981-08-28 1983-03-02 Jeol Ltd 電子線装置におけるフイラメント交換機構
JPS61104538A (ja) * 1984-10-26 1986-05-22 Hitachi Ltd イオン源
JPH04292841A (ja) * 1991-03-20 1992-10-16 Ishikawajima Harima Heavy Ind Co Ltd 電子銃カソードの真空内交換機構
JP3518320B2 (ja) * 1998-02-27 2004-04-12 日新電機株式会社 イオン源およびそのフィラメント交換方法
TWI274978B (en) * 2004-02-25 2007-03-01 Advanced Display Proc Eng Co Apparatus for manufacturing flat-panel display
JP2008234895A (ja) * 2007-03-19 2008-10-02 Ihi Corp イオン源及びそのフィラメント交換方法
JP2008246380A (ja) * 2007-03-30 2008-10-16 Ihi Corp 真空処理装置及びそのメンテナンス方法
JP4491795B2 (ja) 2007-03-30 2010-06-30 株式会社Ｉｈｉ 物品交換機構および物品交換方法
JP2009245725A (ja) * 2008-03-31 2009-10-22 Jeol Ltd 電子ビーム発生装置
JP2010015750A (ja) 2008-07-02 2010-01-21 Ihi Corp 電気機能体の交換機構と交換方法
JP2013004272A (ja) 2011-06-15 2013-01-07 Nissin Ion Equipment Co Ltd イオン源およびイオン注入装置

Also Published As

Publication number Publication date
KR20130130619A (ko) 2013-12-02
KR101341827B1 (ko) 2013-12-17
CN103426705B (zh) 2016-05-18
CN103426705A (zh) 2013-12-04
JP2013243098A (ja) 2013-12-05

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