WO2012046775A1 - 荷電粒子線用試料装置 - Google Patents
荷電粒子線用試料装置 Download PDFInfo
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- WO2012046775A1 WO2012046775A1 PCT/JP2011/072994 JP2011072994W WO2012046775A1 WO 2012046775 A1 WO2012046775 A1 WO 2012046775A1 JP 2011072994 W JP2011072994 W JP 2011072994W WO 2012046775 A1 WO2012046775 A1 WO 2012046775A1
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- WIPO (PCT)
- Prior art keywords
- sample
- atmosphere
- charged particle
- particle beam
- blocking
- Prior art date
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- 239000002245 particle Substances 0.000 title claims abstract description 19
- 230000000903 blocking effect Effects 0.000 claims description 66
- 238000012545 processing Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 238000000921 elemental analysis Methods 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 238000002955 isolation Methods 0.000 abstract 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000011149 active material Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
- H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2005—Seal mechanisms
- H01J2237/2006—Vacuum seals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/204—Means for introducing and/or outputting objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
Definitions
- the present invention relates to a charged particle beam sample apparatus, particularly when a sample is transferred between a focused ion beam processing observation apparatus (hereinafter referred to as “FIB”) and a scanning electron microscope (hereinafter referred to as “SEM”). It relates to a suitable sample device.
- FIB focused ion beam processing observation apparatus
- SEM scanning electron microscope
- FIB has been used for microfabrication of samples, and it has been widely practiced to observe the micromachined sample by SEM, analyze defects and the like by this SEM observation, and return the sample to the FIB for further processing.
- SEM micromachined sample
- Various sample apparatuses have been conventionally proposed for various problems.
- Patent Document 1 necessary information is stored in a sample cartridge for transporting a sample so that a processing site by FIB or an observation site by SEM can be easily discriminated at the time of sample delivery. It has been proposed to enable alignment by simply mounting the cartridge on the FIB or SEM.
- the atmosphere holding Li is a vacuum or an inert gas, for example, when the sample is delivered, for example, when the sample is transferred from the FIB to the SEM. It is necessary to maintain an atmosphere such as Ar gas.
- the present invention has been made in view of such recent needs, and the object of the present invention is to facilitate sample transfer between the FIB and the SEM with the atmosphere shut off.
- An object of the present invention is to provide a charged particle beam sample device.
- a feature of the present invention is that, in a charged particle beam sample device that delivers a sample between an FIB and an SEM, the atmosphere communicated with the sample chamber of the FIB or the SEM and isolated from the outside air And a mechanism for removing the lid in the sample exchanger when an atmosphere-blocking sample holder for isolating the sample from the outside air with the lid in place is inserted into the sample exchanger. Therefore, it is easy to deliver, process or observe the sample in a state where the atmosphere is shut off.
- the sample can be easily delivered in an atmosphere isolated from the outside air, even if the material is highly active and easily reacts with moisture and oxygen in the atmosphere, from processing to observation and further analysis of the material. It is also possible to carry out a series of steps without exposure to the atmosphere.
- FIG. 2A is a cross-sectional view of the sample exchanger according to the present invention
- FIG. 1A is a cross-sectional view in which an atmosphere-blocking sample holder is mounted
- FIG. ) Is a side view equipped with an atmosphere blocking sample holder.
- FIG. 1 is an explanatory diagram of an operation for carrying in an atmosphere-blocking sample holder according to one embodiment of the present invention, wherein FIG. 1 (a) is a side view of the atmosphere-blocking sample holder carried in, and FIG. FIG.
- FIG. 4C is a side view when the atmosphere-blocking sample holder is carried into the sample chamber.
- FIG. 1A is a top view of an atmosphere blocking unit
- FIG. 2B is a cross-sectional view of the atmosphere blocking unit
- FIG. FIG. 2A is an example of an atmosphere blocking sample holder according to the present invention
- FIG. 1A is a top view of the atmosphere blocking sample holder
- FIG. 2B is a cross-sectional view of the atmosphere blocking sample holder
- FIG. It is sectional drawing of a sample holder.
- FIG. 2 is an example of an exchangeable sample stage according to the present invention, in which FIG. (A) is a top view of the exchangeable sample stage, and (b) is a cross-sectional view of the exchangeable sample stage.
- FIG. 4 is another embodiment of the exchangeable sample stage according to the present invention, in which FIG. (A) is a top view of the exchangeable sample stage, and (b) is a cross-sectional view of the exchangeable sample stage.
- FIG. 4 is another embodiment of the exchangeable sample stage according to the present invention, in which FIG. (A) is a top view of the exchangeable sample stage, and (b) is a cross-sectional view of the exchangeable sample stage.
- FIG. 4 is another embodiment of the exchangeable sample stage according to the present invention, in which FIG. (A) is a top view of the exchangeable sample stage, and (b) is a cross-sectional view of the exchangeable sample stage.
- FIG. 1 shows a basic configuration diagram of an FIB atmosphere blocking system according to an embodiment of the present invention.
- the FIB casing 1 includes an ion gun 2, an electrostatic lens 3, a sample chamber 4, and a sample exchanger 5.
- the ion beam 6 generated from the ion gun 2 is focused by the electrostatic lens 3 and irradiated onto the sample.
- An atmosphere blocking sample holder 7 is inserted into and pulled out of the sample chamber 4, and this insertion and withdrawal is performed by sliding the sample holder 7 through the communicating sample exchanger 5 by pushing back the exchange rod 11.
- the sample chamber 4 and the sample exchanger 5 communicate with each other through a gate.
- the exchange rod 11 is separated and pulled back into the sample exchanger 5.
- the gate is closed and FIB processing is performed.
- the atmosphere blocking sample holder 7 is screwed to the tip of the exchange rod 11 and is detachable. More specifically, for example, at least a part on the tip side of the exchange rod 11 is threaded to form a male screw portion, and the sample holder 7 has a screw hole 13 (female screw) corresponding to the tip screw portion of the exchange rod 11. : Refer to FIG. 2).
- the sample holder 7 is screwed to the tip of the exchange rod 11 by rotating the exchange rod 11 and tightening the tip screw portion in the screw hole 13.
- the exchange rod 11 is rotated in the direction opposite to the screw tightening while the sample holder 7 is fixed, the sample holder 7 is separated from the exchange rod 11.
- an exchange rod 11 is inserted into the sample exchanger 5 via a sealing mechanism such as an O-ring.
- the gate to the sample chamber 4 is closed, and a vacuum pump or the like provided on the FIB casing 1 side is used to evacuate or inert gas or the like. Introduction is possible. Therefore, independently of the sample chamber 4, the inside of the sample exchanger 5 can be made an atmosphere isolated from the outside air.
- the atmosphere blocking unit 10 is firmly fixed by the atmosphere blocking unit fixing mechanism 8, and the atmosphere blocking sample holder lid 9 is attached to and detached from the atmosphere blocking sample holder 7 through the atmosphere blocking unit 10.
- the atmosphere blocking sample holder 7 is fixed to the exchange rod 11 and the atmosphere blocking sample holder 7 alone is transferred to the sample chamber 4 through the atmosphere blocking unit 10 in the sample exchanger 5.
- the atmosphere blocking sample holder lid 9 is left in the sample exchanger 5 as shown in the figure.
- the atmosphere-blocking sample holder lid 9 is mounted in the sample exchanger 5 by fixing the atmosphere-blocking sample holder 7 to the exchange rod 11 and pulling it back. It can be removed while maintaining the atmosphere in the chamber 4.
- the sample exchanger 5 is similarly connected to the SEM side case via a gate, and is isolated from the outside air independently from the sample room 4 of the SEM. It is possible to form the atmosphere.
- FIG. 2 shows the internal structure of the sample exchanger 5.
- the atmosphere blocking unit 10 is firmly fixed in the sample exchanger 5 by the atmosphere blocking unit fixing mechanism 8, and the atmosphere blocking sample holder 7 and the lid 9 slide in it so that the lid 9 can be attached and detached.
- FIG. 4A is a cross-sectional view taken along the line AA ′ in FIG. 2C in a state where the atmosphere blocking sample holder 7 and the lid 9 are to be mounted on the atmosphere blocking unit 10 in the sample exchanger 5.
- FIG. 4B is a cross-sectional view taken along the line B-B ′ in FIG. 2C with the atmosphere blocking sample holder 7 and the lid 9 mounted on the atmosphere blocking unit 10 in the sample exchanger 5.
- FIG. 4C is a partially transparent sectional view showing the state of FIG.
- the atmosphere blocking unit 10 has a slide groove 10d for sliding the sample holder 7 and a slide groove 10b for sliding the lid 9.
- 10b is wider than 10d, and both communicate with each other in the vertical direction through a step 10c.
- the sample holder 7 and the lid 9 can be detachably attached to the slide grooves 10d and 10b by sliding in the vertical direction as shown in FIG. Further, by pushing the exchange rod 11 in the direction of the arrow in FIG. 3C, the sample holder 7 is moved to a predetermined position (sample holder mounting table) in the sample chamber 4 as shown in FIGS. 3B and 3C.
- the exchange rod 11 can slide in the axial direction.
- the lid 9 slides together with the sample holder 7 until it comes into contact with the stopper 10a provided at one end of the atmosphere blocking unit 10, and remains in that position after coming into contact with the stopper 10a. Apart from the holder 7, only the sample holder 7 can be transferred to the sample chamber 4.
- FIG. 3 shows an operation explanatory diagram when the atmosphere-blocking sample holder 7 is carried into the sample chamber 4 and the sample exchanger 5.
- the exchange rod 11 is pushed as shown in the figure (b).
- the lid 9 is removed, and the exchange rod 11 is further pushed to transport the atmosphere blocking sample holder 7 to the sample chamber 4 as shown in FIG.
- the sample holder 7 is unscrewed by the exchange rod 11 and the exchange rod 11 is retracted from the sample chamber 4, and then the sample is processed.
- the screwing is released by the cooperation of the static frictional force of the sample holder 7 and the rotational torque of the exchange rod 11 in the screw loosening direction.
- the exchange rod 11 is again pushed into the sample chamber 4 and the sample holder 7 is screwed to the exchange rod 11, and then the direction indicated by the arrow in FIG. Pull out the exchange rod 11 to pull out the atmosphere blocking sample holder 7, and maintain the state of blocking the atmosphere with the outside air in the reverse procedure to the previous procedure, as shown in Fig. (A).
- the lid 9 can be attached to 7 again.
- FIG. 4 shows an embodiment of an atmosphere blocking sample unit for this purpose.
- the atmosphere cutoff sample unit 10 is fixed in the sample exchanger 5 by an atmosphere cutoff unit fixing mechanism 8.
- the atmosphere blocking sample holder 7 and the lid 9 are attached to and detached from the atmosphere blocking sample holder 7 and the atmosphere blocking sample holder lid 9 through this.
- FIG. 2A is a top view of the atmosphere blocking unit
- FIG. 2B is a sectional view of the atmosphere blocking unit
- Fig. 5 shows the structure of the atmosphere blocking sample holder.
- the atmosphere blocking sample holder 7 has an atmosphere blocking O-ring 12 to block the atmosphere, blocks the atmosphere with the atmosphere blocking sample holder lid 9, and maintains the atmosphere of the sample mounting portion.
- the atmosphere blocking sample holder lid 9 can be firmly fixed to the atmosphere blocking sample holder 7 with a holding screw 14.
- the atmosphere blocking sample holder 7 has a structure in which the exchangeable sample stage 16 can be mounted inside, determines the position to be fixed by the exchangeable sample stage guide pin 17, and is fixed by the exchangeable sample stage fixing screw 18. Further, the exchangeable sample stage 16 has a structure that can be selected and exchanged according to the processing shape and material of the sample. Further, the exchangeable sample stage 16 has a structure in which a fine sample attachment 19 can be mounted.
- FIG. 4A is a top view of the atmosphere blocking sample holder
- FIG. 4B is a sectional view of the atmosphere blocking sample holder
- FIG. 3C is a sectional view of the atmosphere blocking sample holder.
- FIG. 6 shows another embodiment of the atmosphere blocking sample holder.
- the atmosphere blocking sample holder 7 in this embodiment has a structure on which an exchangeable sample stage 16 (see FIGS. 5 and 7 and subsequent figures) can be mounted.
- an exchangeable sample stage 16 see FIGS. 5 and 7 and subsequent figures.
- the atmosphere blocking sample holder 7 is provided with a screw hole 20 for a replaceable sample stage fixing screw for fixing the replaceable sample stage 16.
- FIG. 1A is a top view of the atmosphere blocking sample holder
- FIG. 1B is a sectional view of the atmosphere blocking sample holder
- FIG. 1C is a sectional view of the atmosphere blocking sample holder.
- FIG. 7 shows an embodiment of the exchange type atmosphere shielding sample stage 16.
- the atmosphere blocking sample stage 16 is provided with a through hole for a replaceable sample stage fixing screw for fixing to the atmosphere blocking sample holder 7, and a sample pressing plate 22 and a sample pressing plate screw for fixing the original sample are installed,
- the structure can be arbitrarily positioned by the screw hole 25 for the sample pressing plate.
- a fine sample attachment 19 is provided as a part for fixing the fine sample, and this part can be easily replaced by a cartridge type.
- the material for fixing the fine sample is desirably a material that does not become an obstacle during elemental analysis and has conductivity, such as graphite carbon.
- This embodiment is characterized in that the sample surface on which the original sample is mounted and the sample surface on which the fine sample is mounted can be mounted on the same plane, and a top view of the exchangeable sample stage 16 for that purpose. 7 (a) and a cross-sectional view is shown in FIG. 7 (b).
- FIG. 8 shows another configuration example of the exchange-type atmosphere-blocking sample stage.
- FIG. 4A is a top view
- FIG. 4B is a cross-sectional view.
- the present embodiment is characterized in that the sample surface on which the original sample is mounted can be mounted on a surface inclined with respect to the sample surface on which the fine sample is mounted.
- FIG. 9 shows still another embodiment of the exchange-type atmosphere-blocking sample stage.
- 4A is a top view
- FIG. 2B is a cross-sectional view.
- the same parts as those described above are denoted by the same reference numerals, and description thereof is omitted.
- the present embodiment is characterized in that the sample surface on which the fine sample is mounted has a planar shape with a different height from the sample surface on which the original sample is mounted.
- sample processing is performed without exposing the atmosphere of the sample mounting portion to the outside air, for example, in a vacuum state or an inert gas state, without being exposed to the atmosphere. Since it is possible to perform a series of operations up to sample observation, processing, observation, analysis, etc. of highly active materials and materials that react with moisture and oxygen in the atmosphere can be easily performed, It can greatly contribute to the research and development of new materials expected in the future.
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Abstract
Description
このとき、雰囲気遮断試料ホルダーフタ9は図示するように試料交換器5に取り残される。
また、試料加工後、雰囲気遮断試料ホルダー7を取り出す場合は、交換棒11に雰囲気遮断試料ホルダー7を固定し、引き戻すことで、試料交換器5内で雰囲気遮断試料ホルダーフタ9が装着され、試料室4内の雰囲気を保持しながら取り出すことができる。
し、試料押さえ板用ネジ穴25により任意に位置決めができる構造である。
Claims (10)
- 集束イオンビーム加工観察装置(FIB)および走査電子顕微鏡(SEM)との間で試料を受け渡しする荷電粒子線用試料装置において、
前記FIB又は前記SEMの試料室に連通し、外気と隔離された雰囲気を形成可能な試料交換器を備え、当該試料交換器は、フタをした状態で試料を外気から隔離する雰囲気遮断試料ホルダーが搬入されたとき、外気と隔離された雰囲気下で前記フタを取り外す機構を備えたことを特徴とする荷電粒子線用試料装置。 - 請求項1において、前記試料交換器は、前記FIBの試料室及び前記SEMの試料室ごとに夫々設けたことを特徴とする荷電粒子線用試料装置。
- 請求項1又は2において、前記試料交換器は、前記雰囲気遮断試料ホルダーの取り出し動作に応じて当該試料ホルダーに前記フタを取り付ける機構を備えたことを特徴とする荷電粒子線用試料装置。
- 請求項3において、前記試料交換器は、前記雰囲気遮断試料ホルダーのスライド動作に応じて前記フタを着脱する雰囲気遮断ユニットを備えたことを特徴とする荷電粒子線用試料装置。
- 請求項4において、前記雰囲気遮断試料ホルダーは、前記試料交換器及び連通する前記試料室に亘って当該試料ホルダーをスライド移動させる試料交換棒を備えたことを特徴とする荷電粒子線用試料装置。
- 請求項1において、前記雰囲気遮断試料ホルダーは、FIB加工前の試料、及びFIB加工後の微細試料を同時に搭載可能な試料ステージを有することを特徴とする荷電粒子線用試料装置。
- 請求項6において、前記試料ステージは、前記雰囲気遮断試料ホルダーから着脱が可能としたことを特徴とする荷電粒子線用試料装置。
- 請求項6又は7において、前記試料ステージは、前記FIB加工前の試料、及び前記FIB加工後の微細試料を、夫々異なる高さ又は傾斜角度で搭載する機構を有することを特徴とする荷電粒子線用試料装置。
- 請求項8において、前記微細試料を搭載する部位の材質は、グラファイトカーボン等、元素分析時に障害とならない材質かつ導電性を有する材質とすることを特徴とする荷電粒子線用試料装置。
- 請求項1において、前記外気と隔離された雰囲気は不活性ガスを導入することで形成し、当該不活性ガス雰囲気中で試料の加工・観察が可能としたことを特徴とする荷電粒子線用試料装置。
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KR1020137008777A KR101399831B1 (ko) | 2010-10-07 | 2011-10-05 | 하전 입자선용 시료 장치 |
CN201180048085.5A CN103155089B (zh) | 2010-10-07 | 2011-10-05 | 带电粒子线用试样装置 |
DE112011103393.1T DE112011103393B4 (de) | 2010-10-07 | 2011-10-05 | Probenaufnahmevorrichtung für einen Strahl geladener Teilchen |
JP2012537740A JPWO2012046775A1 (ja) | 2010-10-07 | 2011-10-05 | 荷電粒子線用試料装置 |
US13/877,947 US8729497B2 (en) | 2010-10-07 | 2011-10-05 | Sample device for charged particle beam |
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US20230245850A1 (en) * | 2022-01-31 | 2023-08-03 | Fei Company | Inert gas sample transfer for beam systems |
KR20230155173A (ko) * | 2022-05-03 | 2023-11-10 | 주식회사 엘지에너지솔루션 | Fesem 및 ldi-tof-ms 통합 분석 시스템 |
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JP2001291483A (ja) | 2000-04-05 | 2001-10-19 | Jeol Ltd | 荷電粒子線装置用試料保持装置 |
US20040130693A1 (en) * | 2002-10-31 | 2004-07-08 | Asml Netherlands B.V. | Lithographic apparatus, optical element and device manufacturing method |
CN1871684B (zh) * | 2003-09-23 | 2011-08-24 | 塞威仪器公司 | 采用fib准备的样本的抓取元件的显微镜检查的方法、系统和设备 |
JP5246995B2 (ja) * | 2005-08-19 | 2013-07-24 | 株式会社日立ハイテクサイエンス | 集束荷電粒子ビーム装置 |
JP4991390B2 (ja) * | 2007-05-21 | 2012-08-01 | 株式会社日立ハイテクノロジーズ | マイクロサンプル加熱用試料台 |
JP5422416B2 (ja) * | 2010-01-28 | 2014-02-19 | 株式会社日立製作所 | 試料搬送装置 |
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- 2011-09-23 TW TW100134371A patent/TW201222617A/zh unknown
- 2011-10-05 DE DE112011103393.1T patent/DE112011103393B4/de not_active Expired - Fee Related
- 2011-10-05 WO PCT/JP2011/072994 patent/WO2012046775A1/ja active Application Filing
- 2011-10-05 KR KR1020137008777A patent/KR101399831B1/ko active IP Right Grant
- 2011-10-05 US US13/877,947 patent/US8729497B2/en active Active
- 2011-10-05 JP JP2012537740A patent/JPWO2012046775A1/ja active Pending
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JPH11213931A (ja) * | 1998-01-28 | 1999-08-06 | Kanagawa Prefecture | 試料導入装置 |
JP2001153760A (ja) * | 1999-11-30 | 2001-06-08 | Shimadzu Corp | 搬送用試料容器 |
JP2007108149A (ja) * | 2005-10-17 | 2007-04-26 | Central Res Inst Of Electric Power Ind | 試料搬送・分析キット |
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Cited By (9)
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WO2014034276A1 (ja) * | 2012-08-30 | 2014-03-06 | 株式会社 日立製作所 | 試料搬送装置 |
JP2014049213A (ja) * | 2012-08-30 | 2014-03-17 | Hitachi Ltd | 試料搬送装置 |
JP2016031928A (ja) * | 2014-07-29 | 2016-03-07 | ライカ ミクロジュステーメ ゲーエムベーハー | クライオ顕微鏡法のための操作容器 |
JP2021190694A (ja) * | 2020-05-26 | 2021-12-13 | 台灣電鏡儀器股▲ふん▼有限公司 | 密封搬送装置 |
JP7187747B2 (ja) | 2020-05-26 | 2022-12-13 | 台灣電鏡儀器股▲ふん▼有限公司 | 密封搬送装置 |
JPWO2021251026A1 (ja) * | 2020-06-09 | 2021-12-16 | ||
WO2021251026A1 (ja) * | 2020-06-09 | 2021-12-16 | 国立研究開発法人物質・材料研究機構 | 観測対象ガスの観測装置及び観測対象イオンの観測方法並びに試料ホルダ |
JP7505803B2 (ja) | 2020-06-09 | 2024-06-25 | 国立研究開発法人物質・材料研究機構 | 観測対象ガスの観測装置及び観測対象イオンの観測方法並びに試料ホルダ |
JP7514886B2 (ja) | 2022-07-15 | 2024-07-11 | 日本電子株式会社 | 試料加工用ホルダ及び試料加工方法 |
Also Published As
Publication number | Publication date |
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CN103155089B (zh) | 2016-03-02 |
US20130193343A1 (en) | 2013-08-01 |
US8729497B2 (en) | 2014-05-20 |
KR101399831B1 (ko) | 2014-05-27 |
CN103155089A (zh) | 2013-06-12 |
JPWO2012046775A1 (ja) | 2014-02-24 |
DE112011103393B4 (de) | 2016-02-11 |
DE112011103393T5 (de) | 2013-08-14 |
TW201222617A (en) | 2012-06-01 |
KR20130086041A (ko) | 2013-07-30 |
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