JP6094673B2 - 環境測定装置及び環境測定方法 - Google Patents
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
- G01N29/4409—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison
- G01N29/4427—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison with stored values, e.g. threshold values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
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- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/021—Gases
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- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0258—Structural degradation, e.g. fatigue of composites, ageing of oils
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
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- G—PHYSICS
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- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
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- Acoustics & Sound (AREA)
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- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
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Description
10 測定用QCMセンサ
11、21 水晶振動子
12 測定用電極(腐蝕性金属により形成された電極)
15 測定用発振回路
20 参照用QCMセンサ
22 参照用電極(耐腐蝕性金属により形成された電極)
25 参照用発振回路
31 周波数カウンタ
40、50 制御部
51 湿度センサ
Claims (6)
- 振動子と前記振動子の表面に腐蝕性金属により形成された電極とを有する測定用QCMセンサと、
振動子と前記振動子の表面に耐腐蝕性金属で形成された電極とを有する参照用QCMセンサと、
前記測定用QCMセンサを振動させると共に、前記測定用QCMセンサの振動数に応じた周波数を有する測定用周波数信号を送信する測定用発振回路と、
前記参照用QCMセンサを振動させると共に、前記参照用QCMセンサの振動数に応じた周波数を有する参照用周波数信号を送信する参照用発振回路と、
前記測定用発振回路及び前記参照用発振回路に接続され、前記測定用周波数信号及び前記参照用周波数信号それぞれの周波数を計数し、前記計数されたカウント数を示す測定用カウント信号及び参照用カウント信号を送信する周波数カウンタと、
大気中の湿度を検出し、検出した湿度を示す湿度信号を送信する湿度センサと、
前記測定用カウント信号、前記参照用カウント信号及び前記湿度信号を、測定時刻に関連付けて記憶する記憶部と、
所定の湿度以下で測定された周波数を示す測定用カウント信号、参照用カウント信号及び測定時刻から演算された近似式を使用して、前記測定用QCMセンサの電極の腐蝕による質量増加量を決定する制御部と、
を有することを特徴とする環境測定装置。 - 前記制御部は、前記測定用QCMセンサの電極の腐蝕による質量増加量を決定するときに、前記測定用QCMセンサ及び前記参照用QCMセンサにそれぞれ付着したパーティクルの量の差を補正するための補正係数を使用する、請求項1に記載の環境測定装置。
- 前記補正係数は、前記測定用QCMセンサ及び前記参照用QCMセンサそれぞれに付着したパーティクルの吸湿‐乾燥サイクルによる質量変動量の大きさの比から演算される、請求項2に記載の環境測定装置。
- 振動子と前記振動子の表面に腐蝕性金属により形成された電極とを有する測定用QCMセンサの周波数を測定し、
所定の湿度以下の前記測定用QCMセンサの周波数から測定用QCMセンサの質量増加量を演算し、
振動子と前記振動子の表面に耐腐蝕性金属で形成された電極とを有する参照用QCMセンサの周波数を測定し、
前記所定の湿度以下の前記参照用QCMセンサの周波数から前記参照用QCMセンサの質量増加量を演算し、
前記測定用QCMセンサの質量増加量と、前記参照用QCMセンサの質量増加量と、測定時刻とから演算された近似式を使用して、前記測定用QCMセンサの電極の腐蝕による質量増加量を決定する、
ことを特徴とする環境測定方法。 - 前記測定用QCMセンサの電極の腐蝕による質量増加量を決定するときに、前記測定用QCMセンサ及び前記参照用QCMセンサにそれぞれ付着したパーティクルの量の差を補正するための補正係数を使用する、請求項4に記載の環境測定方法。
- 前記補正係数は、前記測定用QCMセンサ及び前記参照用QCMセンサそれぞれに付着したパーティクルの吸湿‐乾燥サイクルによる質量変動量の大きさの比から演算される、請求項5に記載の環境測定方法。
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Cited By (3)
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KR20200024417A (ko) * | 2018-08-28 | 2020-03-09 | 전자부품연구원 | 마이크로 공진기를 이용한 미세먼지 측정장치 및 측정방법 |
CN114397361A (zh) * | 2021-02-23 | 2022-04-26 | 北京理工大学 | 一种用于湿度传感器的绿色高分子材料的制备方法 |
KR20220144021A (ko) * | 2021-04-16 | 2022-10-26 | 한국표준과학연구원 | 성층권의 수분측정장치, 이를 포함하는 라디오존데, 수분측정장치의 교정방법 및 이를 이용한 수분측정방법 |
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US10830738B2 (en) | 2016-11-14 | 2020-11-10 | University Of Alberta | Ultrasensitive high Q-factor AT-cut-quartz crystal microbalance femtogram mass sensor |
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JP7558914B2 (ja) | 2021-09-22 | 2024-10-01 | 株式会社東芝 | 汚損物質検出センサ、汚損物質量算出装置および汚損物質量算出方法 |
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- 2013-05-24 JP JP2015518028A patent/JP6094673B2/ja active Active
- 2013-05-24 WO PCT/JP2013/064513 patent/WO2014188594A1/ja active Application Filing
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Cited By (6)
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KR20200024417A (ko) * | 2018-08-28 | 2020-03-09 | 전자부품연구원 | 마이크로 공진기를 이용한 미세먼지 측정장치 및 측정방법 |
KR102101567B1 (ko) * | 2018-08-28 | 2020-05-18 | 전자부품연구원 | 마이크로 공진기를 이용한 미세먼지 측정장치 및 측정방법 |
CN114397361A (zh) * | 2021-02-23 | 2022-04-26 | 北京理工大学 | 一种用于湿度传感器的绿色高分子材料的制备方法 |
CN114397361B (zh) * | 2021-02-23 | 2024-05-24 | 北京理工大学 | 一种用于湿度传感器的绿色高分子材料的制备方法 |
KR20220144021A (ko) * | 2021-04-16 | 2022-10-26 | 한국표준과학연구원 | 성층권의 수분측정장치, 이를 포함하는 라디오존데, 수분측정장치의 교정방법 및 이를 이용한 수분측정방법 |
KR102531035B1 (ko) * | 2021-04-16 | 2023-05-16 | 한국표준과학연구원 | 성층권의 수분측정장치, 이를 포함하는 라디오존데, 수분측정장치의 교정방법 및 이를 이용한 수분측정방법 |
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JPWO2014188594A1 (ja) | 2017-02-23 |
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