JP6094083B2 - 振動片、振動子、発振器および電子機器 - Google Patents

振動片、振動子、発振器および電子機器 Download PDF

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Publication number
JP6094083B2
JP6094083B2 JP2012166116A JP2012166116A JP6094083B2 JP 6094083 B2 JP6094083 B2 JP 6094083B2 JP 2012166116 A JP2012166116 A JP 2012166116A JP 2012166116 A JP2012166116 A JP 2012166116A JP 6094083 B2 JP6094083 B2 JP 6094083B2
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Japan
Prior art keywords
reduced width
resonator element
base
width portion
pair
Prior art date
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JP2012166116A
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English (en)
Japanese (ja)
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JP2014027473A (ja
JP2014027473A5 (enExample
Inventor
明法 山田
明法 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2012166116A priority Critical patent/JP6094083B2/ja
Priority to CN201310301816.3A priority patent/CN103580641B/zh
Priority to TW102126355A priority patent/TW201409937A/zh
Priority to US13/948,403 priority patent/US9319022B2/en
Priority to EP13177768.2A priority patent/EP2690781A3/en
Priority to KR1020130087932A priority patent/KR20140013994A/ko
Publication of JP2014027473A publication Critical patent/JP2014027473A/ja
Publication of JP2014027473A5 publication Critical patent/JP2014027473A5/ja
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Publication of JP6094083B2 publication Critical patent/JP6094083B2/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2012166116A 2012-07-26 2012-07-26 振動片、振動子、発振器および電子機器 Active JP6094083B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2012166116A JP6094083B2 (ja) 2012-07-26 2012-07-26 振動片、振動子、発振器および電子機器
CN201310301816.3A CN103580641B (zh) 2012-07-26 2013-07-15 振动片、振子、振荡器以及电子设备
US13/948,403 US9319022B2 (en) 2012-07-26 2013-07-23 Resonator element, resonator, oscillator, and electronic apparatus
TW102126355A TW201409937A (zh) 2012-07-26 2013-07-23 振動片、振動元件、振盪器及電子機器
EP13177768.2A EP2690781A3 (en) 2012-07-26 2013-07-24 Vibrator element, vibrator, oscillator, and electronic apparatus
KR1020130087932A KR20140013994A (ko) 2012-07-26 2013-07-25 진동편, 진동자, 발진기 및 전자기기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012166116A JP6094083B2 (ja) 2012-07-26 2012-07-26 振動片、振動子、発振器および電子機器

Publications (3)

Publication Number Publication Date
JP2014027473A JP2014027473A (ja) 2014-02-06
JP2014027473A5 JP2014027473A5 (enExample) 2015-09-10
JP6094083B2 true JP6094083B2 (ja) 2017-03-15

Family

ID=48874851

Family Applications (1)

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JP2012166116A Active JP6094083B2 (ja) 2012-07-26 2012-07-26 振動片、振動子、発振器および電子機器

Country Status (6)

Country Link
US (1) US9319022B2 (enExample)
EP (1) EP2690781A3 (enExample)
JP (1) JP6094083B2 (enExample)
KR (1) KR20140013994A (enExample)
CN (1) CN103580641B (enExample)
TW (1) TW201409937A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014086933A (ja) * 2012-10-25 2014-05-12 Seiko Epson Corp 振動片、振動子、発振器、電子機器及び移動体
JP6013228B2 (ja) * 2013-02-25 2016-10-25 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器、電子機器及び電波時計
JP6145288B2 (ja) * 2013-03-15 2017-06-07 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
JP6519995B2 (ja) * 2014-06-30 2019-05-29 セイコーエプソン株式会社 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体
JP6627209B2 (ja) * 2014-09-09 2020-01-08 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6571339B2 (ja) * 2015-01-26 2019-09-04 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP6552225B2 (ja) * 2015-03-12 2019-07-31 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP7645104B2 (ja) 2021-03-15 2025-03-13 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3462939A (en) * 1965-02-12 1969-08-26 Tokei Kk Mechanical vibrator for timepiece
JPS547285A (en) * 1977-06-20 1979-01-19 Seiko Epson Corp Tuning-fork-shaped crystal vibrator
JPS5919419A (ja) 1982-07-23 1984-01-31 Seiko Instr & Electronics Ltd 音叉型振動子の支持構造
JPS59138114A (ja) 1983-01-28 1984-08-08 Seiko Instr & Electronics Ltd 音叉型水晶振動子
US4540909A (en) 1983-04-04 1985-09-10 Seiko Instruments & Electronics Ltd. Tuning fork type quartz crystal resonator with variable width base
JPS59183520A (ja) 1983-04-04 1984-10-18 Seiko Instr & Electronics Ltd 音叉型水晶振動子
JPS6021614A (ja) 1983-07-18 1985-02-04 Seiko Instr & Electronics Ltd 音叉型水晶振動子の支持構造
JPS61187411A (ja) 1985-02-14 1986-08-21 Seiko Instr & Electronics Ltd 音叉型水晶振動子
JPH0310511A (ja) 1989-06-08 1991-01-18 Seiko Electronic Components Ltd 音叉型屈曲水晶振動子
DE19951288B4 (de) * 1999-10-25 2013-05-29 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Präzisionsschwingungsantrieb
JP2002141770A (ja) 2000-11-01 2002-05-17 Citizen Watch Co Ltd 小型振動子
TW567664B (en) * 2001-10-09 2003-12-21 Ebauchesfabrik Eta Ag Piezoelectric resonator and assembly comprising the same enclosed in a case
JP2005236563A (ja) 2004-02-18 2005-09-02 Seiko Epson Corp 圧電振動片と圧電デバイスおよび圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
US7084556B1 (en) * 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
JP2007201936A (ja) 2006-01-27 2007-08-09 Epson Toyocom Corp 圧電振動片と圧電デバイス
US20080201959A1 (en) * 2007-02-28 2008-08-28 Barry Leonard Kent Eating utensil
EP2015449A1 (en) * 2007-07-13 2009-01-14 ETA SA Manufacture Horlogère Suisse Packaging for piezoelectric resonator
ATE453954T1 (de) * 2007-07-19 2010-01-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten
US7939995B2 (en) * 2007-12-13 2011-05-10 ETA SA Manufacture Horlogére Suisse Piezoelectric resonator in a small-sized package
JP2009164775A (ja) * 2007-12-28 2009-07-23 Nippon Dempa Kogyo Co Ltd 圧電フレーム及び圧電デバイス
JP5348133B2 (ja) * 2008-09-26 2013-11-20 株式会社大真空 音叉型圧電振動片、および音叉型圧電振動デバイス
JP2010157933A (ja) 2008-12-27 2010-07-15 Epson Toyocom Corp 屈曲振動片及び電子部品
US8067880B2 (en) 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
JP5454134B2 (ja) 2008-12-27 2014-03-26 セイコーエプソン株式会社 振動片、振動子、センサー及び電子部品
JP5350102B2 (ja) * 2009-06-30 2013-11-27 京セラクリスタルデバイス株式会社 音叉型屈曲水晶振動子
US20110001394A1 (en) * 2009-07-02 2011-01-06 Eta Sa Piezoelectric thin-film tuning fork resonator
JP5482250B2 (ja) * 2010-02-02 2014-05-07 セイコーエプソン株式会社 振動体および振動デバイス
US8304968B2 (en) * 2010-03-17 2012-11-06 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US8368476B2 (en) * 2010-03-19 2013-02-05 Seiko Epson Corporation Resonator element, resonator device and electronic device
CH703271B1 (fr) * 2010-06-10 2015-02-27 Swatch Group Res & Dev Ltd Résonateur thermocompensé aux premier et second ordres.
WO2012052267A1 (en) * 2010-10-21 2012-04-26 Micro Crystal Ag Method for mounting a piezoelectric resonator in a case and packaged piezoelectric resonator
US8573057B2 (en) * 2011-04-28 2013-11-05 Custom Sensors & Technologies, Inc. Sensor mount vibration reduction
JP2014135654A (ja) * 2013-01-10 2014-07-24 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計

Also Published As

Publication number Publication date
US9319022B2 (en) 2016-04-19
JP2014027473A (ja) 2014-02-06
KR20140013994A (ko) 2014-02-05
US20140029179A1 (en) 2014-01-30
EP2690781A3 (en) 2016-08-24
CN103580641A (zh) 2014-02-12
TW201409937A (zh) 2014-03-01
CN103580641B (zh) 2017-11-28
EP2690781A2 (en) 2014-01-29

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