JP6080354B2 - 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置 - Google Patents

圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置 Download PDF

Info

Publication number
JP6080354B2
JP6080354B2 JP2011277566A JP2011277566A JP6080354B2 JP 6080354 B2 JP6080354 B2 JP 6080354B2 JP 2011277566 A JP2011277566 A JP 2011277566A JP 2011277566 A JP2011277566 A JP 2011277566A JP 6080354 B2 JP6080354 B2 JP 6080354B2
Authority
JP
Japan
Prior art keywords
piezoelectric
piezoelectric material
piezoelectric element
electrode
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011277566A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013128073A5 (enExample
JP2013128073A (ja
Inventor
三浦　薫
薫 三浦
久保田　純
純 久保田
潤平 林
潤平 林
隆之 渡邉
隆之 渡邉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011277566A priority Critical patent/JP6080354B2/ja
Priority to US13/715,510 priority patent/US8981626B2/en
Publication of JP2013128073A publication Critical patent/JP2013128073A/ja
Publication of JP2013128073A5 publication Critical patent/JP2013128073A5/ja
Application granted granted Critical
Publication of JP6080354B2 publication Critical patent/JP6080354B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B08B7/026—Using sound waves
    • B08B7/028—Using ultrasounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Ceramic Products (AREA)
  • Physical Vapour Deposition (AREA)
JP2011277566A 2011-12-19 2011-12-19 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置 Active JP6080354B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011277566A JP6080354B2 (ja) 2011-12-19 2011-12-19 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
US13/715,510 US8981626B2 (en) 2011-12-19 2012-12-14 Piezoelectric material, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011277566A JP6080354B2 (ja) 2011-12-19 2011-12-19 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置

Publications (3)

Publication Number Publication Date
JP2013128073A JP2013128073A (ja) 2013-06-27
JP2013128073A5 JP2013128073A5 (enExample) 2015-02-19
JP6080354B2 true JP6080354B2 (ja) 2017-02-15

Family

ID=48609428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011277566A Active JP6080354B2 (ja) 2011-12-19 2011-12-19 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置

Country Status (2)

Country Link
US (1) US8981626B2 (enExample)
JP (1) JP6080354B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9776866B2 (en) 2014-03-13 2017-10-03 Japan Science And Technology Agency Method for producing perovskite metal oxynitride
US10522288B2 (en) * 2017-03-31 2019-12-31 Tdk Corporation Polycrystalline dielectric thin film and capacitance element
CN108138307A (zh) * 2015-10-02 2018-06-08 Tdk株式会社 电介质薄膜、电容元件及电子部件
JP6683476B2 (ja) * 2015-12-25 2020-04-22 日本特殊陶業株式会社 圧電素子およびその製造方法、異物除去ユニットならびに超音波センサ
WO2017135298A1 (ja) * 2016-02-01 2017-08-10 Tdk株式会社 誘電体磁器組成物および電子部品
WO2017135296A1 (ja) * 2016-02-01 2017-08-10 Tdk株式会社 多結晶誘電体薄膜および容量素子
US10479732B2 (en) * 2017-03-31 2019-11-19 Tdk Corporation Oxynitride thin film and capacitance element
JP7000882B2 (ja) * 2017-03-31 2022-01-19 Tdk株式会社 酸窒化物薄膜および容量素子
US10475586B2 (en) * 2017-03-31 2019-11-12 Tdk Corporation Oxynitride thin film and capacitance element
JP7000883B2 (ja) * 2017-03-31 2022-01-19 Tdk株式会社 酸窒化物薄膜および容量素子
CN108199619B (zh) * 2018-01-23 2019-06-21 南京邮电大学 互补型压电能量收集器及其制作方法
JP7569698B2 (ja) * 2020-01-31 2024-10-18 Tdk株式会社 金属酸窒化物薄膜および容量素子
CN112085939A (zh) * 2020-09-09 2020-12-15 广州伽年科技有限公司 一种便于互联网数据采集信息传输装置
CN113182157B (zh) * 2021-04-27 2023-04-18 之江实验室 一种柔性压电超声波换能器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2573060B1 (fr) * 1984-11-13 1987-02-20 Centre Nat Rech Scient Composes azotes ou oxyazotes a structure perovskite, leur preparation et leur application a la fabrication de composants dielectriques
FR2769612A1 (fr) * 1997-10-13 1999-04-16 Rhodia Chimie Sa Composition oxynitruree a base d'un alcalino-terreux et de tantale ou d'un alcalino-terreux et de niobium, procedes de preparation et utilisation comme pigment colorant
US20020036282A1 (en) * 1998-10-19 2002-03-28 Yet-Ming Chiang Electromechanical actuators
EP1037244A3 (en) * 1999-03-12 2003-01-08 TDK Corporation Electron-emitting material and preparing process
JP3137960B2 (ja) * 1999-03-12 2001-02-26 ティーディーケイ株式会社 電子放出材料
JP2004292180A (ja) * 2003-03-25 2004-10-21 Hiroshi Irie 強誘電体材料及びその製造方法
JP2010143789A (ja) * 2008-12-18 2010-07-01 Canon Inc 圧電体材料
JP2010143788A (ja) 2008-12-18 2010-07-01 Canon Inc 酸窒化物圧電材料及びその製造方法

Also Published As

Publication number Publication date
US8981626B2 (en) 2015-03-17
JP2013128073A (ja) 2013-06-27
US20130154443A1 (en) 2013-06-20

Similar Documents

Publication Publication Date Title
JP6080354B2 (ja) 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
JP6021351B2 (ja) 圧電材料、圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置およびデバイス
JP4524000B1 (ja) 圧電体薄膜とその製造方法、インクジェットヘッド、インクジェットヘッドを用いて画像を形成する方法、角速度センサ、角速度センサを用いて角速度を測定する方法、圧電発電素子ならびに圧電発電素子を用いた発電方法
JP6004640B2 (ja) 圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置、およびデバイス
JP5967988B2 (ja) 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
JP5864168B2 (ja) 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
JP5832091B2 (ja) 圧電材料、圧電素子、液体吐出ヘッドおよび超音波モータ
JP4455678B1 (ja) 圧電体薄膜とその製造方法、角速度センサ、角速度センサによる角速度の測定方法、圧電発電素子ならびに圧電発電素子を用いた発電方法
JP4588807B1 (ja) 圧電体薄膜とその製造方法、インクジェットヘッド、インクジェットヘッドを用いて画像を形成する方法、角速度センサ、角速度センサを用いて角速度を測定する方法、圧電発電素子ならびに圧電発電素子を用いた発電方法
JP5734688B2 (ja) 配向性酸化物セラミックスの製造方法、配向性酸化物セラミックス、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
JP5865608B2 (ja) 配向性圧電セラミックス、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置
JP5256804B2 (ja) 圧電磁器及びそれを用いた圧電素子
JP4691614B1 (ja) 圧電体薄膜、インクジェットヘッド、インクジェットヘッドを用いて画像を形成する方法、角速度センサ、角速度センサを用いて角速度を測定する方法、圧電発電素子ならびに圧電発電素子を用いた発電方法
JP5572998B2 (ja) 圧電磁器組成物及び圧電素子
WO2006095716A1 (ja) 圧電／電歪磁器組成物及びその製造方法
US20160294306A1 (en) Piezoelectric driving device, robot and pump
JP5021452B2 (ja) 圧電／電歪磁器組成物および圧電／電歪素子
JP5591050B2 (ja) 圧電材料、圧電素子、液体吐出ヘッドおよび超音波モータ
JP6323305B2 (ja) 圧電組成物および圧電素子
JP5774824B2 (ja) 圧電／電歪磁器組成物
JP2009102221A (ja) 圧電／電歪磁器組成物及び圧電／電歪素子
JP4755919B2 (ja) ジルコンチタン酸鉛系組成物とその製造方法、圧電体、及び圧電素子
JP5662197B2 (ja) 圧電／電歪焼結体、及び圧電／電歪素子
JP2010053022A (ja) 圧電／電歪セラミックス焼結体及びそれを用いた圧電／電歪素子

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141218

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20141218

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160129

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160209

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160411

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20160823

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161122

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20161201

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20161220

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170117

R151 Written notification of patent or utility model registration

Ref document number: 6080354

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151