JP6070056B2 - 物理量検出デバイス、物理量検出器、電子機器、及び移動体 - Google Patents

物理量検出デバイス、物理量検出器、電子機器、及び移動体 Download PDF

Info

Publication number
JP6070056B2
JP6070056B2 JP2012234484A JP2012234484A JP6070056B2 JP 6070056 B2 JP6070056 B2 JP 6070056B2 JP 2012234484 A JP2012234484 A JP 2012234484A JP 2012234484 A JP2012234484 A JP 2012234484A JP 6070056 B2 JP6070056 B2 JP 6070056B2
Authority
JP
Japan
Prior art keywords
physical quantity
quantity detection
base
detection device
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012234484A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014085233A (ja
JP2014085233A5 (fr
Inventor
渡辺　潤
潤 渡辺
高弘 亀田
高弘 亀田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2012234484A priority Critical patent/JP6070056B2/ja
Publication of JP2014085233A publication Critical patent/JP2014085233A/ja
Publication of JP2014085233A5 publication Critical patent/JP2014085233A5/ja
Application granted granted Critical
Publication of JP6070056B2 publication Critical patent/JP6070056B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
JP2012234484A 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体 Expired - Fee Related JP6070056B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012234484A JP6070056B2 (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012234484A JP6070056B2 (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

Publications (3)

Publication Number Publication Date
JP2014085233A JP2014085233A (ja) 2014-05-12
JP2014085233A5 JP2014085233A5 (fr) 2015-12-03
JP6070056B2 true JP6070056B2 (ja) 2017-02-01

Family

ID=50788417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012234484A Expired - Fee Related JP6070056B2 (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

Country Status (1)

Country Link
JP (1) JP6070056B2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019145683A (ja) 2018-02-21 2019-08-29 セイコーエプソン株式会社 電子回路基板、加速度センサー、傾斜計、慣性航法装置、構造物監視装置及び移動体
JP7087479B2 (ja) 2018-03-09 2022-06-21 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
JP2019158476A (ja) 2018-03-09 2019-09-19 セイコーエプソン株式会社 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
JP2019184453A (ja) 2018-04-12 2019-10-24 セイコーエプソン株式会社 センサーユニットおよび構造物監視装置
JP2020067330A (ja) 2018-10-23 2020-04-30 セイコーエプソン株式会社 慣性センサーユニットの取り付け方法、および慣性センサーユニット
JP7331468B2 (ja) * 2019-05-31 2023-08-23 セイコーエプソン株式会社 慣性センサーユニットの取り付け方法、および慣性センサーユニット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009085808A (ja) * 2007-10-01 2009-04-23 Epson Toyocom Corp 加速度センサ及び加速度測定装置
JP2010226420A (ja) * 2009-03-24 2010-10-07 Seiko Epson Corp 圧電デバイス
US8176617B2 (en) * 2010-03-31 2012-05-15 Honeywell International Inc. Methods for making a sensitive resonating beam accelerometer

Also Published As

Publication number Publication date
JP2014085233A (ja) 2014-05-12

Similar Documents

Publication Publication Date Title
JP6070056B2 (ja) 物理量検出デバイス、物理量検出器、電子機器、及び移動体
JP5807413B2 (ja) 電子デバイス用パッケージ、電子デバイスおよび電子機器
US10228385B2 (en) Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, and moving object
JP6435596B2 (ja) 振動素子、振動デバイス、電子機器、および移動体
JP6318550B2 (ja) 振動片、角速度センサー、電子機器および移動体
JP2014240762A (ja) 物理量検出センサー、加速度センサー、電子機器、および移動体
US20190257652A1 (en) Physical quantity detection device, inclinometer, inertial measurement unit, electronic apparatus, vehicle, and structure monitoring system
US9048418B2 (en) Sensor element, sensor device, and electronic apparatus
JP6255903B2 (ja) 角速度センサー、電子機器および移動体
JP6167474B2 (ja) センサーデバイスおよび電子機器
US9998093B2 (en) Resonator device, electronic apparatus, and moving object
JP2015090275A (ja) 振動素子の製造方法
JP2015118027A (ja) 振動素子、電子デバイス、電子機器および移動体
JP6264839B2 (ja) 振動素子、振動子、発振器、電子機器および移動体
JP6498379B2 (ja) 振動素子、振動子、発振器、電子機器および移動体
JP2014085232A (ja) 物理量検出デバイス、物理量検出器、電子機器、及び移動体
JP2016065860A (ja) 振動デバイス、電子機器および移動体
JP2015179933A (ja) 振動素子、ジャイロセンサー素子、電子デバイス、電子機器および移動体
JP2016017768A (ja) センサー素子、センサーデバイス、電子機器および移動体
JP6492536B2 (ja) センサー素子、物理量センサー、電子機器および移動体
JP2015099061A (ja) 物理検出装置の製造方法、振動素子、物理検出装置および電子機器
JP2014107316A (ja) 蓋体、パッケージ、電子デバイス、電子機器、移動体、および電子デバイスの製造方法
US20200298350A1 (en) Electronic device manufacturing method, electronic device, electronic apparatus, and vehicle
JP6465152B2 (ja) 振動片、振動子、電子デバイス、電子機器及び移動体
JP6264842B2 (ja) 振動素子、振動子、発振器、電子機器および移動体

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20150108

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20151019

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20151019

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20160610

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20160624

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160707

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160719

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160805

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20161206

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20161219

R150 Certificate of patent or registration of utility model

Ref document number: 6070056

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees