JP6070056B2 - 物理量検出デバイス、物理量検出器、電子機器、及び移動体 - Google Patents
物理量検出デバイス、物理量検出器、電子機器、及び移動体 Download PDFInfo
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- JP6070056B2 JP6070056B2 JP2012234484A JP2012234484A JP6070056B2 JP 6070056 B2 JP6070056 B2 JP 6070056B2 JP 2012234484 A JP2012234484 A JP 2012234484A JP 2012234484 A JP2012234484 A JP 2012234484A JP 6070056 B2 JP6070056 B2 JP 6070056B2
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012234484A JP6070056B2 (ja) | 2012-10-24 | 2012-10-24 | 物理量検出デバイス、物理量検出器、電子機器、及び移動体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012234484A JP6070056B2 (ja) | 2012-10-24 | 2012-10-24 | 物理量検出デバイス、物理量検出器、電子機器、及び移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014085233A JP2014085233A (ja) | 2014-05-12 |
| JP2014085233A5 JP2014085233A5 (enrdf_load_stackoverflow) | 2015-12-03 |
| JP6070056B2 true JP6070056B2 (ja) | 2017-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012234484A Expired - Fee Related JP6070056B2 (ja) | 2012-10-24 | 2012-10-24 | 物理量検出デバイス、物理量検出器、電子機器、及び移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6070056B2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019145683A (ja) | 2018-02-21 | 2019-08-29 | セイコーエプソン株式会社 | 電子回路基板、加速度センサー、傾斜計、慣性航法装置、構造物監視装置及び移動体 |
| JP7087479B2 (ja) | 2018-03-09 | 2022-06-21 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体 |
| JP2019158476A (ja) | 2018-03-09 | 2019-09-19 | セイコーエプソン株式会社 | 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体 |
| JP2019184453A (ja) | 2018-04-12 | 2019-10-24 | セイコーエプソン株式会社 | センサーユニットおよび構造物監視装置 |
| JP2020067330A (ja) | 2018-10-23 | 2020-04-30 | セイコーエプソン株式会社 | 慣性センサーユニットの取り付け方法、および慣性センサーユニット |
| JP7331468B2 (ja) * | 2019-05-31 | 2023-08-23 | セイコーエプソン株式会社 | 慣性センサーユニットの取り付け方法、および慣性センサーユニット |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009085808A (ja) * | 2007-10-01 | 2009-04-23 | Epson Toyocom Corp | 加速度センサ及び加速度測定装置 |
| JP2010226420A (ja) * | 2009-03-24 | 2010-10-07 | Seiko Epson Corp | 圧電デバイス |
| US8176617B2 (en) * | 2010-03-31 | 2012-05-15 | Honeywell International Inc. | Methods for making a sensitive resonating beam accelerometer |
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2012
- 2012-10-24 JP JP2012234484A patent/JP6070056B2/ja not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| JP2014085233A (ja) | 2014-05-12 |
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