JP6047580B2 - 薄膜の製造方法 - Google Patents
薄膜の製造方法 Download PDFInfo
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- JP6047580B2 JP6047580B2 JP2014539875A JP2014539875A JP6047580B2 JP 6047580 B2 JP6047580 B2 JP 6047580B2 JP 2014539875 A JP2014539875 A JP 2014539875A JP 2014539875 A JP2014539875 A JP 2014539875A JP 6047580 B2 JP6047580 B2 JP 6047580B2
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- 239000010409 thin film Substances 0.000 title claims description 160
- 238000004519 manufacturing process Methods 0.000 title claims description 31
- 239000010408 film Substances 0.000 claims description 203
- 238000000034 method Methods 0.000 claims description 80
- 239000000758 substrate Substances 0.000 claims description 71
- 238000000151 deposition Methods 0.000 claims description 68
- 150000004767 nitrides Chemical class 0.000 claims description 67
- 239000007789 gas Substances 0.000 claims description 51
- 230000008021 deposition Effects 0.000 claims description 43
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 37
- 208000028659 discharge Diseases 0.000 claims description 28
- 238000002230 thermal chemical vapour deposition Methods 0.000 claims description 23
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 16
- 238000011282 treatment Methods 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 7
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 238000009832 plasma treatment Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 46
- 239000002131 composite material Substances 0.000 description 36
- 238000004381 surface treatment Methods 0.000 description 23
- 238000002347 injection Methods 0.000 description 21
- 239000007924 injection Substances 0.000 description 21
- 230000015572 biosynthetic process Effects 0.000 description 16
- 238000005229 chemical vapour deposition Methods 0.000 description 9
- 239000010410 layer Substances 0.000 description 9
- 230000006641 stabilisation Effects 0.000 description 9
- 238000011105 stabilization Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000003746 surface roughness Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000002105 nanoparticle Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 230000008016 vaporization Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000005019 vapor deposition process Methods 0.000 description 5
- 238000009834 vaporization Methods 0.000 description 5
- 239000006200 vaporizer Substances 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000011946 reduction process Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Description
−工程ガスの合計の流量範囲:5、000〜25、000[sccm]
−各工程ガスの流量範囲:N2(3、000〜15、000[sccm])、SiH4(50〜350[sccm])、NH3(200〜1、000[sccm])、He(2、000〜5、000[sccm])
−工程圧力:1.5〜3.5[Torr]
−プラズマ高周波数電力:150〜750[W]
−工程ガスの合計の流量範囲:3、500〜30、000[sccm]
−各工程ガスの流量範囲:O2(3、000〜20、000[sccm])、TEOS(100〜500[sccm])、He(500〜7、000[sccm])
−プラズマ高周波数電力:150〜750[W]
−工程圧力:1.5〜3.5[Torr]
−プラズマ高周波数電力:150〜750[W]
Claims (11)
- 基板の上に異なる薄膜を製造する方法において、
第1薄膜を蒸着するステップと、
前記第1薄膜の表面に第1のバッファ膜を形成して表面状態を改善するステップと、
前記第1のバッファ膜の表面に第2薄膜を蒸着するステップと、
前記第1薄膜と第2薄膜を蒸着した後に、前記薄膜の表面に高周波数電力を印加して薄膜表面の不純物を除去するステップと、
前記第2薄膜の表面に第2のバッファ膜を形成するステップと
を含み、
前記第1薄膜及び第2薄膜を蒸着した後に前記第1薄膜及び第2薄膜の表面を放電処理し、
前記第1薄膜が窒化膜であり、第2薄膜が酸化膜であるとしたとき、前記第1薄膜の放電処理時には窒素含有ガスのみを流動させ、前記第2薄膜の放電処理時には酸素含有ガスのみを流動させる、薄膜の製造方法。 - 前記第1薄膜及び第2薄膜は、プラズマ化学気相蒸着(PECVD)により交互に積層される請求項1に記載の薄膜の製造方法。
- 前記第1のバッファ膜及び第2のバッファ膜は、熱化学気相蒸着(Thermal−CVD)により形成される請求項2に記載の薄膜の製造方法。
- 前記熱化学気相蒸着は、500℃〜600℃の温度条件下で薄膜を蒸着する請求項3に記載の薄膜の製造方法。
- 前記第1薄膜は、1.5〜3.5[Torr]の圧力条件下で、N2の流量を3、000〜15、000[sccm]とし、SiH4の流量を50〜350[sccm]とし、NH3の流量を200〜1、000[sccm]とし、Heの流量を2、000〜5、000[sccm]として蒸着する請求項1に記載の薄膜の製造方法。
- 前記第1薄膜の表面に蒸着される第1のバッファ膜は、前記第1薄膜工程条件と同じ工程条件下で、3秒〜5秒の時間条件下及び500〜600℃の温度条件下で薄膜を蒸着する熱化学気相蒸着により形成される請求項5に記載の薄膜の製造方法。
- 前記第2薄膜は、1.5〜3.5[Torr]の圧力条件下で、TEOSの流量を150〜350[sccm]とし、O2の流量を3、000〜20、000[sccm]とし、Heの流量を2、000〜5、000[sccm]として蒸着する請求項1に記載の薄膜の製造方法。
- 前記第2薄膜の表面に蒸着される第2のバッファ膜は、前記第2薄膜工程条件と同じ工程条件下で、3秒〜5秒の時間条件下及び500〜600℃の温度条件下で薄膜を蒸着する熱化学気相蒸着により形成される請求項7に記載の薄膜の製造方法。
- 前記第1のバッファ膜及び第2のバッファ膜は、5Å〜30Åの厚さのバッファ膜から形成する請求項1に記載の薄膜の製造方法。
- 前記放電処理は、プラズマ処理電力よりも低い電力で放電処理を行う請求項1に記載の薄膜の製造方法。
- 前記放電処理時には、10W〜55Wの周波数電力が印加される請求項10に記載の薄膜の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020110119797A KR101897214B1 (ko) | 2011-11-16 | 2011-11-16 | 박막 제조 방법 |
KR10-2011-0119797 | 2011-11-16 | ||
PCT/KR2012/009158 WO2013073786A1 (ko) | 2011-11-16 | 2012-11-02 | 박막 제조 방법 |
Publications (2)
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JP2015501551A JP2015501551A (ja) | 2015-01-15 |
JP6047580B2 true JP6047580B2 (ja) | 2016-12-21 |
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JP2014539875A Active JP6047580B2 (ja) | 2011-11-16 | 2012-11-02 | 薄膜の製造方法 |
Country Status (4)
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JP (1) | JP6047580B2 (ja) |
KR (1) | KR101897214B1 (ja) |
CN (1) | CN103946961B (ja) |
WO (1) | WO2013073786A1 (ja) |
Families Citing this family (3)
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KR101869949B1 (ko) * | 2013-09-03 | 2018-06-21 | 주식회사 원익아이피에스 | 복합막 증착방법 및 기판 처리 장치 |
KR101645139B1 (ko) | 2015-11-27 | 2016-08-03 | 정용호 | 작업현장 관리 시스템 및 그 구동방법 |
CN110098113A (zh) * | 2019-04-17 | 2019-08-06 | 武汉新芯集成电路制造有限公司 | 一种半导体器件的制造方法 |
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JPH05218015A (ja) * | 1992-01-30 | 1993-08-27 | Sumitomo Electric Ind Ltd | 半導体装置 |
JP2779996B2 (ja) * | 1993-02-25 | 1998-07-23 | 日本電信電話株式会社 | 半導体装置の製造方法 |
KR0118878B1 (ko) * | 1994-04-22 | 1998-08-17 | 김주용 | 캐패시터의 유전체막 형성방법 |
TW389963B (en) * | 1997-04-30 | 2000-05-11 | This Inv Is About The Method O | Method of depositing uniform dielectric layers |
KR100277884B1 (ko) * | 1998-12-02 | 2001-02-01 | 김영환 | 반도체 장치의 퓨즈부 및 그 제조방법 |
US6372664B1 (en) * | 1999-10-15 | 2002-04-16 | Taiwan Semiconductor Manufacturing Company | Crack resistant multi-layer dielectric layer and method for formation thereof |
JP2003060164A (ja) * | 2001-08-09 | 2003-02-28 | Sharp Corp | 半導体メモリ装置およびその製造方法 |
US6630384B1 (en) * | 2001-10-05 | 2003-10-07 | Advanced Micro Devices, Inc. | Method of fabricating double densed core gates in sonos flash memory |
JPWO2006028215A1 (ja) * | 2004-09-09 | 2008-05-08 | 東京エレクトロン株式会社 | 薄膜キャパシタ及びその形成方法、及びコンピュータ読み取り可能な記憶媒体 |
KR100766229B1 (ko) * | 2005-05-30 | 2007-10-10 | 주식회사 하이닉스반도체 | 플래시 메모리 소자의 제조 방법 |
JP4320652B2 (ja) * | 2005-09-08 | 2009-08-26 | エプソンイメージングデバイス株式会社 | 層間絶縁膜の形成方法及び基板 |
JP4678688B2 (ja) * | 2006-02-27 | 2011-04-27 | 次世代半導体材料技術研究組合 | プラズマ処理終了方法 |
KR100812933B1 (ko) * | 2006-06-29 | 2008-03-11 | 주식회사 하이닉스반도체 | Sonos 구조를 갖는 반도체 메모리 소자 및 그것의제조 방법 |
JP2009206368A (ja) * | 2008-02-28 | 2009-09-10 | Toshiba Corp | 半導体装置の製造方法、半導体装置 |
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- 2012-11-02 WO PCT/KR2012/009158 patent/WO2013073786A1/ko active Application Filing
- 2012-11-02 CN CN201280056387.1A patent/CN103946961B/zh active Active
- 2012-11-02 JP JP2014539875A patent/JP6047580B2/ja active Active
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Publication number | Publication date |
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CN103946961A (zh) | 2014-07-23 |
KR101897214B1 (ko) | 2018-10-23 |
CN103946961B (zh) | 2017-07-21 |
JP2015501551A (ja) | 2015-01-15 |
WO2013073786A1 (ko) | 2013-05-23 |
KR20130054024A (ko) | 2013-05-24 |
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