JP6022629B2 - コーティング方法 - Google Patents
コーティング方法 Download PDFInfo
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- JP6022629B2 JP6022629B2 JP2015075082A JP2015075082A JP6022629B2 JP 6022629 B2 JP6022629 B2 JP 6022629B2 JP 2015075082 A JP2015075082 A JP 2015075082A JP 2015075082 A JP2015075082 A JP 2015075082A JP 6022629 B2 JP6022629 B2 JP 6022629B2
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- 238000000576 coating method Methods 0.000 title claims description 60
- 239000007789 gas Substances 0.000 claims description 83
- 239000011248 coating agent Substances 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 41
- 239000002243 precursor Substances 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 31
- 239000001307 helium Substances 0.000 claims description 10
- 229910052734 helium Inorganic materials 0.000 claims description 10
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 10
- WZJUBBHODHNQPW-UHFFFAOYSA-N 2,4,6,8-tetramethyl-1,3,5,7,2$l^{3},4$l^{3},6$l^{3},8$l^{3}-tetraoxatetrasilocane Chemical compound C[Si]1O[Si](C)O[Si](C)O[Si](C)O1 WZJUBBHODHNQPW-UHFFFAOYSA-N 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000012159 carrier gas Substances 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 229920000307 polymer substrate Polymers 0.000 claims description 7
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 claims description 2
- 230000000704 physical effect Effects 0.000 claims 1
- 238000005299 abrasion Methods 0.000 description 19
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- -1 antifreezes Substances 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 239000004576 sand Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 239000002318 adhesion promoter Substances 0.000 description 2
- 150000004703 alkoxides Chemical class 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000000 metal hydroxide Inorganic materials 0.000 description 2
- 150000004692 metal hydroxides Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229920006397 acrylic thermoplastic Polymers 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000000809 air pollutant Substances 0.000 description 1
- 231100001243 air pollutant Toxicity 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000002528 anti-freeze Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 229920000592 inorganic polymer Polymers 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 125000005375 organosiloxane group Chemical group 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Description
Claims (12)
- 耐摩擦性シリコンオキシカーバイドコーティングを基板に施す方法であって、
大気圧プラズマを生成するステップであって、当該生成ステップは、シールドガス流及びプラズマ源ガス流を大気圧プラズマ装置に導入する工程を備え、前記大気圧プラズマは、大気圧酸素プラズマである、ステップと、
前駆体を前記大気圧プラズマに導入するステップであって、前記前駆体は、環状有機シロキサンを含み、前記前駆体は、前記耐摩擦性シリコンオキシカーバイドコーティングを形成するように選択される、ステップと、
前記大気圧プラズマが前記基板上に前記耐摩擦性シリコンオキシカーバイドコーティングを堆積するように、前記基板を前記大気圧プラズマに対して位置決めするステップと、を備える方法。 - 前記基板は、透明ポリマー基板である、請求項1に記載の方法。
- 前記前駆体に対する前記プラズマ源ガス流の容積比を変化させ、前記耐摩擦性シリコンオキシカーバイドコーティングの物理特性を操作するステップをさらに備える、請求項1または2に記載の方法。
- 前記シールドガス流が、ヘリウムガス及びアルゴンガスのうちの少なくとも1つを含み、前記プラズマ源ガス流が分子ガスを含む、請求項1から3のいずれか一項に記載の方法。
- 前記前駆体は、キャリアガスによって前記大気圧プラズマに導入される、請求項1から4のいずれか一項に記載の方法。
- 前記キャリアガスは、ヘリウムガス及びアルゴンガスのうちの少なくとも1つを含む、請求項5に記載の方法。
- 前記前駆体は、テトラメチルシクロテトラシロキサン、オクタメチルシクロテトラシロキサン、またはそれらの組み合わせを含む、請求項1から6のいずれか一項に記載の方法。
- 前記大気圧プラズマは、前記大気圧プラズマ装置で生成され、前記位置決めするステップは、前記基板と前記大気圧プラズマ装置との間に一定間隔を維持する工程を含む、請求項1から7のいずれか一項に記載の方法。
- 前記大気圧プラズマ装置は、ロボット装置に取り付けられ、前記一定間隔は、当該ロボット装置により維持される、請求項8に記載の方法。
- 前記位置決めするステップの前に、前記基板をクリーニングするステップをさらに備える、請求項1から9のいずれか一項に記載の方法。
- 前記位置決めするステップの前に、前記前駆体を含まない酸素プラズマにより前記基板を処理するステップをさらに備える、請求項1から10のいずれか一項に記載の方法。
- 前記基板に対して前記大気圧プラズマをラスタ走査させるステップを、さらに備える、請求項1から11のいずれか一項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/435,110 US8206794B2 (en) | 2009-05-04 | 2009-05-04 | System and method for applying abrasion-resistant coatings |
US12/435,110 | 2009-05-04 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012508520A Division JP5728469B2 (ja) | 2009-05-04 | 2010-04-14 | コーティング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015163738A JP2015163738A (ja) | 2015-09-10 |
JP6022629B2 true JP6022629B2 (ja) | 2016-11-09 |
Family
ID=42269774
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012508520A Active JP5728469B2 (ja) | 2009-05-04 | 2010-04-14 | コーティング方法 |
JP2015075082A Active JP6022629B2 (ja) | 2009-05-04 | 2015-04-01 | コーティング方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012508520A Active JP5728469B2 (ja) | 2009-05-04 | 2010-04-14 | コーティング方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8206794B2 (ja) |
EP (1) | EP2430211A1 (ja) |
JP (2) | JP5728469B2 (ja) |
KR (3) | KR20120014113A (ja) |
CN (1) | CN102414341A (ja) |
WO (1) | WO2010129149A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2013032421A1 (en) * | 2011-08-26 | 2013-03-07 | Exatec Llc | Organic resin laminate, methods of making and using the same, and articles comprising the same |
US20130115867A1 (en) * | 2011-11-08 | 2013-05-09 | General Electric Company | Enclosure system and method for applying coating |
US10787591B2 (en) * | 2012-04-30 | 2020-09-29 | The Boeing Company | Composites including silicon-oxy-carbide layers and methods of making the same |
EP2890414B1 (en) | 2012-08-29 | 2019-01-16 | Cardiac Pacemakers, Inc. | Enhanced low friction coating for medical leads and methods of making |
US9139908B2 (en) * | 2013-12-12 | 2015-09-22 | The Boeing Company | Gradient thin films |
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2009
- 2009-05-04 US US12/435,110 patent/US8206794B2/en active Active
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2010
- 2010-04-14 KR KR1020117019566A patent/KR20120014113A/ko active Application Filing
- 2010-04-14 WO PCT/US2010/031095 patent/WO2010129149A1/en active Application Filing
- 2010-04-14 KR KR1020177015020A patent/KR20170064567A/ko active Application Filing
- 2010-04-14 EP EP10715414A patent/EP2430211A1/en not_active Withdrawn
- 2010-04-14 KR KR1020197031078A patent/KR20190122273A/ko not_active IP Right Cessation
- 2010-04-14 CN CN2010800197857A patent/CN102414341A/zh active Pending
- 2010-04-14 JP JP2012508520A patent/JP5728469B2/ja active Active
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2015
- 2015-04-01 JP JP2015075082A patent/JP6022629B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US20100279027A1 (en) | 2010-11-04 |
CN102414341A (zh) | 2012-04-11 |
JP2012526190A (ja) | 2012-10-25 |
WO2010129149A1 (en) | 2010-11-11 |
EP2430211A1 (en) | 2012-03-21 |
US8206794B2 (en) | 2012-06-26 |
KR20190122273A (ko) | 2019-10-29 |
KR20170064567A (ko) | 2017-06-09 |
JP2015163738A (ja) | 2015-09-10 |
KR20120014113A (ko) | 2012-02-16 |
JP5728469B2 (ja) | 2015-06-03 |
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