JP6010020B2 - バルクシリコンの研磨組成物及び研磨方法 - Google Patents

バルクシリコンの研磨組成物及び研磨方法 Download PDF

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Publication number
JP6010020B2
JP6010020B2 JP2013504945A JP2013504945A JP6010020B2 JP 6010020 B2 JP6010020 B2 JP 6010020B2 JP 2013504945 A JP2013504945 A JP 2013504945A JP 2013504945 A JP2013504945 A JP 2013504945A JP 6010020 B2 JP6010020 B2 JP 6010020B2
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Prior art keywords
mass
acid
polishing composition
polishing
weight
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English (en)
Japanese (ja)
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JP2013527985A5 (enExample
JP2013527985A (ja
Inventor
レイス ブライアン
レイス ブライアン
ホワイト マイケル
ホワイト マイケル
ジョーンズ ラモン
ジョーンズ ラモン
クラーク ジョン
クラーク ジョン
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CMC Materials LLC
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Cabot Microelectronics Corp
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Publication of JP2013527985A publication Critical patent/JP2013527985A/ja
Publication of JP2013527985A5 publication Critical patent/JP2013527985A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/02—Lapping machines or devices; Accessories designed for working surfaces of revolution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02021—Edge treatment, chamfering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02024—Mirror polishing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP2013504945A 2010-04-16 2011-04-06 バルクシリコンの研磨組成物及び研磨方法 Active JP6010020B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/762,180 2010-04-16
US12/762,180 US8815110B2 (en) 2009-09-16 2010-04-16 Composition and method for polishing bulk silicon
PCT/US2011/031354 WO2011130072A2 (en) 2010-04-16 2011-04-06 Composition and method for polishing bulk silicon

Publications (3)

Publication Number Publication Date
JP2013527985A JP2013527985A (ja) 2013-07-04
JP2013527985A5 JP2013527985A5 (enExample) 2013-12-26
JP6010020B2 true JP6010020B2 (ja) 2016-10-19

Family

ID=44799248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013504945A Active JP6010020B2 (ja) 2010-04-16 2011-04-06 バルクシリコンの研磨組成物及び研磨方法

Country Status (9)

Country Link
US (1) US8815110B2 (enExample)
EP (1) EP2559060A4 (enExample)
JP (1) JP6010020B2 (enExample)
KR (1) KR101780844B1 (enExample)
CN (1) CN102939643B (enExample)
MY (1) MY162994A (enExample)
SG (1) SG184307A1 (enExample)
TW (1) TWI535802B (enExample)
WO (1) WO2011130072A2 (enExample)

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US8821215B2 (en) * 2012-09-07 2014-09-02 Cabot Microelectronics Corporation Polypyrrolidone polishing composition and method
US10106705B1 (en) 2017-03-29 2018-10-23 Fujifilm Planar Solutions, LLC Polishing compositions and methods of use thereof
KR20220057561A (ko) * 2019-09-04 2022-05-09 씨엠씨 머티리얼즈, 인코포레이티드 폴리실리콘 cmp용 조성물 및 방법
US12394628B2 (en) 2021-12-17 2025-08-19 Globalwafers Co., Ltd. Methods for polishing semiconductor substrates
CN115926629B (zh) * 2022-12-30 2023-12-05 昂士特科技(深圳)有限公司 具有改进再循环性能的化学机械抛光组合物

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Also Published As

Publication number Publication date
US8815110B2 (en) 2014-08-26
WO2011130072A2 (en) 2011-10-20
KR101780844B1 (ko) 2017-09-21
JP2013527985A (ja) 2013-07-04
TW201207057A (en) 2012-02-16
CN102939643B (zh) 2016-01-20
EP2559060A4 (en) 2017-11-22
WO2011130072A3 (en) 2012-02-09
SG184307A1 (en) 2012-11-29
CN102939643A (zh) 2013-02-20
MY162994A (en) 2017-07-31
TWI535802B (zh) 2016-06-01
EP2559060A2 (en) 2013-02-20
US20110062115A1 (en) 2011-03-17
KR20130054267A (ko) 2013-05-24

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