ATE120433T1 - Polierbreie aus silika mit geringem gehalt an natrium und an metallen. - Google Patents

Polierbreie aus silika mit geringem gehalt an natrium und an metallen.

Info

Publication number
ATE120433T1
ATE120433T1 AT91306014T AT91306014T ATE120433T1 AT E120433 T1 ATE120433 T1 AT E120433T1 AT 91306014 T AT91306014 T AT 91306014T AT 91306014 T AT91306014 T AT 91306014T AT E120433 T1 ATE120433 T1 AT E120433T1
Authority
AT
Austria
Prior art keywords
sio2
present
ppm
amount less
range
Prior art date
Application number
AT91306014T
Other languages
English (en)
Inventor
John A Romberger
Charles C Payne
Original Assignee
Nalco Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nalco Chemical Co filed Critical Nalco Chemical Co
Application granted granted Critical
Publication of ATE120433T1 publication Critical patent/ATE120433T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
    • C01B33/146—After-treatment of sols
    • C01B33/148—Concentration; Drying; Dehydration; Stabilisation; Purification
    • C01B33/1485—Stabilisation, e.g. prevention of gelling; Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
    • C01B33/141—Preparation of hydrosols or aqueous dispersions
    • C01B33/142—Preparation of hydrosols or aqueous dispersions by acidic treatment of silicates
    • C01B33/143—Preparation of hydrosols or aqueous dispersions by acidic treatment of silicates of aqueous solutions of silicates
    • C01B33/1435—Preparation of hydrosols or aqueous dispersions by acidic treatment of silicates of aqueous solutions of silicates using ion exchangers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Catalysts (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Silicon Compounds (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
AT91306014T 1991-05-28 1991-07-02 Polierbreie aus silika mit geringem gehalt an natrium und an metallen. ATE120433T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70632191A 1991-05-28 1991-05-28

Publications (1)

Publication Number Publication Date
ATE120433T1 true ATE120433T1 (de) 1995-04-15

Family

ID=24837077

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91306014T ATE120433T1 (de) 1991-05-28 1991-07-02 Polierbreie aus silika mit geringem gehalt an natrium und an metallen.

Country Status (6)

Country Link
EP (1) EP0520109B1 (de)
KR (1) KR0184010B1 (de)
AT (1) ATE120433T1 (de)
DE (1) DE69108546T2 (de)
FI (1) FI914594L (de)
MY (1) MY108609A (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2738291B2 (ja) * 1994-02-14 1998-04-08 日本電気株式会社 機械・化学研磨方法および研磨装置
JP2894208B2 (ja) * 1994-06-02 1999-05-24 信越半導体株式会社 シリコンウェーハ研磨用研磨剤及び研磨方法
SG54606A1 (en) * 1996-12-05 1998-11-16 Fujimi Inc Polishing composition
KR19990023544A (ko) * 1997-08-19 1999-03-25 마쯔모또 에이찌 무기 입자의 수성 분산체와 그의 제조 방법
WO1999032570A1 (en) * 1997-12-23 1999-07-01 Akzo Nobel N.V. A composition for chemical mechanical polishing
KR20000019872A (ko) * 1998-09-16 2000-04-15 유현식 웨이퍼 절연층 연마용 슬러리의 제조방법
JP2000160139A (ja) * 1998-12-01 2000-06-13 Fujimi Inc 研磨用組成物およびそれを用いた研磨方法
FR2789998B1 (fr) * 1999-02-18 2005-10-07 Clariant France Sa Nouvelle composition de polissage mecano-chimique d'une couche en un materiau conducteur d'aluminium ou d'alliage d'aluminium
KR20010004982A (ko) * 1999-06-30 2001-01-15 김영환 반도체 소자의 산화막 연마용 슬러리 제조 방법
CA2393797C (en) * 1999-12-20 2007-04-24 Akzo Nobel N.V. Silica-based sols
KR100396881B1 (ko) * 2000-10-16 2003-09-02 삼성전자주식회사 웨이퍼 연마에 이용되는 슬러리 및 이를 이용한 화학기계적 연마 방법
TWI228538B (en) * 2000-10-23 2005-03-01 Kao Corp Polishing composition
DE10063488A1 (de) * 2000-12-20 2002-06-27 Bayer Ag Polierslurry für das chemisch-mechanische Polieren von Siliciumdioxid-Filmen
KR100445499B1 (ko) * 2001-07-23 2004-08-21 제일모직주식회사 반도체 디바이스의 산화막 연마용 ｃｍｐ 슬러리
KR100474539B1 (ko) * 2002-07-15 2005-03-10 주식회사 하이닉스반도체 반도체 소자의 제조 방법
DE10247202A1 (de) * 2002-10-10 2003-10-30 Wacker Siltronic Halbleitermat Verfahren zur Herstellung einer polierten Siliciumscheibe mit niedrigem Kupfergehalt
US7192886B2 (en) * 2002-10-25 2007-03-20 Intersurface Dynamics, Inc. Method for using additives in the caustic etching of silicon for obtaining improved surface characteristics
US7005382B2 (en) * 2002-10-31 2006-02-28 Jsr Corporation Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing process, production process of semiconductor device and material for preparing an aqueous dispersion for chemical mechanical polishing
US20070082819A1 (en) * 2003-12-09 2007-04-12 Perry Richard B Agrochemical compositions
JP2005268667A (ja) * 2004-03-19 2005-09-29 Fujimi Inc 研磨用組成物
US8017524B2 (en) * 2008-05-23 2011-09-13 Cabot Microelectronics Corporation Stable, high rate silicon slurry
US8815110B2 (en) * 2009-09-16 2014-08-26 Cabot Microelectronics Corporation Composition and method for polishing bulk silicon
US8883034B2 (en) 2009-09-16 2014-11-11 Brian Reiss Composition and method for polishing bulk silicon
US8697576B2 (en) 2009-09-16 2014-04-15 Cabot Microelectronics Corporation Composition and method for polishing polysilicon
KR102226564B1 (ko) 2012-09-17 2021-03-10 더블유.알. 그레이스 앤드 캄파니-콘. 작용화된 미립자 지지체 물질 및 이의 제조 및 사용 방법
IN2015DN02055A (de) 2012-09-17 2015-08-14 Grace W R & Co
US11229896B2 (en) 2014-01-16 2022-01-25 W.R. Grace & Co.—Conn. Affinity chromatography media and chromatography devices
ES2929099T3 (es) 2014-05-02 2022-11-24 Grace W R & Co Material de soporte funcionalizado y métodos de fabricación y uso de material de soporte funcionalizado
TW201817835A (zh) * 2015-01-12 2018-05-16 美商慧盛材料美國責任有限公司 用於化學機械平坦化組合物之複合研磨粒及其使用方法
ES2896897T3 (es) 2015-06-05 2022-02-28 Grace W R & Co Agentes de clarificación para el bioprocesamiento de adsorbentes y métodos para producir y usar los mismos
KR102864048B1 (ko) * 2023-01-04 2025-09-23 에스케이엔펄스 주식회사 반도체 공정용 연마 조성물 및 연마 조성물을 적용한 기판의 연마방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3816330A (en) * 1970-10-05 1974-06-11 Du Pont Method of protecting colloidal silica aquasols from bacterial degradation
US4462188A (en) * 1982-06-21 1984-07-31 Nalco Chemical Company Silica sol compositions for polishing silicon wafers
JPS60127216A (ja) * 1983-12-10 1985-07-06 Nitto Chem Ind Co Ltd 低アルカリ低アルミナ含量の水性シリカゾルの製造法
US4588421A (en) * 1984-10-15 1986-05-13 Nalco Chemical Company Aqueous silica compositions for polishing silicon wafers
JP2714411B2 (ja) * 1988-12-12 1998-02-16 イー・アイ・デュポン・ドゥ・ヌムール・アンド・カンパニー ウェハーのファイン研摩用組成物

Also Published As

Publication number Publication date
DE69108546D1 (de) 1995-05-04
EP0520109B1 (de) 1995-03-29
FI914594A0 (fi) 1991-09-30
KR920021685A (ko) 1992-12-18
MY108609A (en) 1996-10-31
KR0184010B1 (ko) 1999-04-01
FI914594A7 (fi) 1992-11-29
FI914594L (fi) 1992-11-29
EP0520109A1 (de) 1992-12-30
DE69108546T2 (de) 1995-11-30

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