JP5975605B2 - 薄膜電池の製造方法および薄膜電池 - Google Patents

薄膜電池の製造方法および薄膜電池 Download PDF

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Publication number
JP5975605B2
JP5975605B2 JP2011111705A JP2011111705A JP5975605B2 JP 5975605 B2 JP5975605 B2 JP 5975605B2 JP 2011111705 A JP2011111705 A JP 2011111705A JP 2011111705 A JP2011111705 A JP 2011111705A JP 5975605 B2 JP5975605 B2 JP 5975605B2
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Japan
Prior art keywords
layer
thin film
regions
layers
film battery
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Expired - Fee Related
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JP2011111705A
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English (en)
Japanese (ja)
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JP2011243577A (ja
JP2011243577A5 (enExample
Inventor
ピアク ティアルフ
ピアク ティアルフ
クラウス アンドレアス
クラウス アンドレアス
メアシュ ギルバート
メアシュ ギルバート
ボーネ ラウラ
ボーネ ラウラ
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Robert Bosch GmbH
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Robert Bosch GmbH
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Publication date
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Publication of JP2011243577A5 publication Critical patent/JP2011243577A5/ja
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Publication of JP5975605B2 publication Critical patent/JP5975605B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/04—Construction or manufacture in general
    • H01M10/0436—Small-sized flat cells or batteries for portable equipment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/425—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Secondary Cells (AREA)
  • Primary Cells (AREA)
  • Connection Of Batteries Or Terminals (AREA)
JP2011111705A 2010-05-18 2011-05-18 薄膜電池の製造方法および薄膜電池 Expired - Fee Related JP5975605B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010029060A DE102010029060A1 (de) 2010-05-18 2010-05-18 Verfahren zur Herstellung einer Dünnschichtbatterie und entsprechende Dünnschichtbatterie
DE102010029060.2 2010-05-18

Publications (3)

Publication Number Publication Date
JP2011243577A JP2011243577A (ja) 2011-12-01
JP2011243577A5 JP2011243577A5 (enExample) 2014-07-24
JP5975605B2 true JP5975605B2 (ja) 2016-08-23

Family

ID=44898714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011111705A Expired - Fee Related JP5975605B2 (ja) 2010-05-18 2011-05-18 薄膜電池の製造方法および薄膜電池

Country Status (5)

Country Link
JP (1) JP5975605B2 (enExample)
CN (1) CN102255102B (enExample)
DE (1) DE102010029060A1 (enExample)
FR (1) FR2960346B1 (enExample)
IT (1) ITMI20110836A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014209263A1 (de) * 2014-05-15 2015-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrobatterie und Verfahren zum Herstellen einer Mikrobatterie
TW201622228A (zh) * 2014-08-27 2016-06-16 應用材料股份有限公司 三維薄膜電池
DE102015204844A1 (de) * 2015-03-18 2016-09-22 Robert Bosch Gmbh Verfahren und Vorrichtung zum Verbinden von Batteriezellen sowie Batteriepack, Batteriemodul, Batterie sowie Fahrzeug
JP6287946B2 (ja) * 2015-05-08 2018-03-07 トヨタ自動車株式会社 電池用積層体の製造方法
FR3039005A1 (fr) 2015-07-13 2017-01-20 St Microelectronics Tours Sas Batterie en couches minces autosupportee et procede de fabrication d'une telle batterie
DE102016118755B4 (de) 2015-10-05 2019-08-14 Lpkf Laser & Electronics Ag 3D-Dünnschichtbatterie und ein Verfahren und Substrat zu deren Herstellung
JP6683001B2 (ja) * 2016-05-10 2020-04-15 トヨタ自動車株式会社 固体電池の製造方法
US10833296B2 (en) 2017-09-26 2020-11-10 International Business Machines Corporation Thin film solid-state microbattery packaging
US10658702B2 (en) * 2017-10-02 2020-05-19 International Business Machines Corporation High-performance thin-film battery with an interfacial layer
GB2582177B (en) * 2019-03-14 2023-04-19 Ilika Tech Limited Method of processing layered structures

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3612018B2 (ja) * 1992-12-04 2005-01-19 株式会社半導体エネルギー研究所 半導体装置の作製方法
FR2862437B1 (fr) * 2003-11-14 2006-02-10 Commissariat Energie Atomique Procede de fabrication d'une micro-batterie au lithium
SE0402471D0 (sv) * 2004-10-12 2004-10-12 Anders Lundblad Electrochemical device
CN102290605A (zh) * 2006-07-18 2011-12-21 西姆贝特公司 用于固态微电池光刻制造、切单和钝化的方法和设备
JP2010505216A (ja) * 2006-07-25 2010-02-18 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 三次元基板上の薄層電池積重ねの製造方法
KR101587954B1 (ko) * 2007-10-25 2016-01-22 어플라이드 머티어리얼스, 인코포레이티드 박막 배터리들의 대량 생산을 위한 방법
FR2952477B1 (fr) * 2009-11-06 2011-12-09 St Microelectronics Tours Sas Procede de formation d'une batterie de type lithium-ion en couches minces

Also Published As

Publication number Publication date
CN102255102A (zh) 2011-11-23
FR2960346B1 (fr) 2019-08-23
CN102255102B (zh) 2016-03-23
DE102010029060A1 (de) 2011-11-24
JP2011243577A (ja) 2011-12-01
ITMI20110836A1 (it) 2011-11-19
FR2960346A1 (fr) 2011-11-25

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