JP2011243577A5 - - Google Patents

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Publication number
JP2011243577A5
JP2011243577A5 JP2011111705A JP2011111705A JP2011243577A5 JP 2011243577 A5 JP2011243577 A5 JP 2011243577A5 JP 2011111705 A JP2011111705 A JP 2011111705A JP 2011111705 A JP2011111705 A JP 2011111705A JP 2011243577 A5 JP2011243577 A5 JP 2011243577A5
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JP
Japan
Prior art keywords
layer
layers
regions
manufacturing
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011111705A
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English (en)
Japanese (ja)
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JP2011243577A (ja
JP5975605B2 (ja
Filing date
Publication date
Priority claimed from DE102010029060A external-priority patent/DE102010029060A1/de
Application filed filed Critical
Publication of JP2011243577A publication Critical patent/JP2011243577A/ja
Publication of JP2011243577A5 publication Critical patent/JP2011243577A5/ja
Application granted granted Critical
Publication of JP5975605B2 publication Critical patent/JP5975605B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011111705A 2010-05-18 2011-05-18 薄膜電池の製造方法および薄膜電池 Expired - Fee Related JP5975605B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010029060A DE102010029060A1 (de) 2010-05-18 2010-05-18 Verfahren zur Herstellung einer Dünnschichtbatterie und entsprechende Dünnschichtbatterie
DE102010029060.2 2010-05-18

Publications (3)

Publication Number Publication Date
JP2011243577A JP2011243577A (ja) 2011-12-01
JP2011243577A5 true JP2011243577A5 (enExample) 2014-07-24
JP5975605B2 JP5975605B2 (ja) 2016-08-23

Family

ID=44898714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011111705A Expired - Fee Related JP5975605B2 (ja) 2010-05-18 2011-05-18 薄膜電池の製造方法および薄膜電池

Country Status (5)

Country Link
JP (1) JP5975605B2 (enExample)
CN (1) CN102255102B (enExample)
DE (1) DE102010029060A1 (enExample)
FR (1) FR2960346B1 (enExample)
IT (1) ITMI20110836A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014209263A1 (de) * 2014-05-15 2015-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrobatterie und Verfahren zum Herstellen einer Mikrobatterie
TW201622228A (zh) * 2014-08-27 2016-06-16 應用材料股份有限公司 三維薄膜電池
DE102015204844A1 (de) * 2015-03-18 2016-09-22 Robert Bosch Gmbh Verfahren und Vorrichtung zum Verbinden von Batteriezellen sowie Batteriepack, Batteriemodul, Batterie sowie Fahrzeug
JP6287946B2 (ja) * 2015-05-08 2018-03-07 トヨタ自動車株式会社 電池用積層体の製造方法
FR3039005A1 (fr) 2015-07-13 2017-01-20 St Microelectronics Tours Sas Batterie en couches minces autosupportee et procede de fabrication d'une telle batterie
DE102016118755B4 (de) 2015-10-05 2019-08-14 Lpkf Laser & Electronics Ag 3D-Dünnschichtbatterie und ein Verfahren und Substrat zu deren Herstellung
JP6683001B2 (ja) * 2016-05-10 2020-04-15 トヨタ自動車株式会社 固体電池の製造方法
US10833296B2 (en) 2017-09-26 2020-11-10 International Business Machines Corporation Thin film solid-state microbattery packaging
US10658702B2 (en) * 2017-10-02 2020-05-19 International Business Machines Corporation High-performance thin-film battery with an interfacial layer
GB2582177B (en) * 2019-03-14 2023-04-19 Ilika Tech Limited Method of processing layered structures

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3612018B2 (ja) * 1992-12-04 2005-01-19 株式会社半導体エネルギー研究所 半導体装置の作製方法
FR2862437B1 (fr) * 2003-11-14 2006-02-10 Commissariat Energie Atomique Procede de fabrication d'une micro-batterie au lithium
SE0402471D0 (sv) * 2004-10-12 2004-10-12 Anders Lundblad Electrochemical device
CN102290605A (zh) * 2006-07-18 2011-12-21 西姆贝特公司 用于固态微电池光刻制造、切单和钝化的方法和设备
JP2010505216A (ja) * 2006-07-25 2010-02-18 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 三次元基板上の薄層電池積重ねの製造方法
KR101587954B1 (ko) * 2007-10-25 2016-01-22 어플라이드 머티어리얼스, 인코포레이티드 박막 배터리들의 대량 생산을 위한 방법
FR2952477B1 (fr) * 2009-11-06 2011-12-09 St Microelectronics Tours Sas Procede de formation d'une batterie de type lithium-ion en couches minces

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