FR2960346B1 - Procede de fabrication d'une batterie en couche mince et batterie ainsi realisee - Google Patents

Procede de fabrication d'une batterie en couche mince et batterie ainsi realisee Download PDF

Info

Publication number
FR2960346B1
FR2960346B1 FR1154261A FR1154261A FR2960346B1 FR 2960346 B1 FR2960346 B1 FR 2960346B1 FR 1154261 A FR1154261 A FR 1154261A FR 1154261 A FR1154261 A FR 1154261A FR 2960346 B1 FR2960346 B1 FR 2960346B1
Authority
FR
France
Prior art keywords
layer
layers
substrate
battery
zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1154261A
Other languages
English (en)
French (fr)
Other versions
FR2960346A1 (fr
Inventor
Tjalf Pirk
Andreas Krauss
Gilbert Moersch
Laura Bohne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2960346A1 publication Critical patent/FR2960346A1/fr
Application granted granted Critical
Publication of FR2960346B1 publication Critical patent/FR2960346B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/04—Construction or manufacture in general
    • H01M10/0436—Small-sized flat cells or batteries for portable equipment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/425—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Secondary Cells (AREA)
  • Primary Cells (AREA)
  • Connection Of Batteries Or Terminals (AREA)
FR1154261A 2010-05-18 2011-05-17 Procede de fabrication d'une batterie en couche mince et batterie ainsi realisee Expired - Fee Related FR2960346B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010029060A DE102010029060A1 (de) 2010-05-18 2010-05-18 Verfahren zur Herstellung einer Dünnschichtbatterie und entsprechende Dünnschichtbatterie
DE102010029060.2 2010-05-18

Publications (2)

Publication Number Publication Date
FR2960346A1 FR2960346A1 (fr) 2011-11-25
FR2960346B1 true FR2960346B1 (fr) 2019-08-23

Family

ID=44898714

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1154261A Expired - Fee Related FR2960346B1 (fr) 2010-05-18 2011-05-17 Procede de fabrication d'une batterie en couche mince et batterie ainsi realisee

Country Status (5)

Country Link
JP (1) JP5975605B2 (enExample)
CN (1) CN102255102B (enExample)
DE (1) DE102010029060A1 (enExample)
FR (1) FR2960346B1 (enExample)
IT (1) ITMI20110836A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014209263A1 (de) * 2014-05-15 2015-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrobatterie und Verfahren zum Herstellen einer Mikrobatterie
TW201622228A (zh) * 2014-08-27 2016-06-16 應用材料股份有限公司 三維薄膜電池
DE102015204844A1 (de) * 2015-03-18 2016-09-22 Robert Bosch Gmbh Verfahren und Vorrichtung zum Verbinden von Batteriezellen sowie Batteriepack, Batteriemodul, Batterie sowie Fahrzeug
JP6287946B2 (ja) * 2015-05-08 2018-03-07 トヨタ自動車株式会社 電池用積層体の製造方法
FR3039005A1 (fr) 2015-07-13 2017-01-20 St Microelectronics Tours Sas Batterie en couches minces autosupportee et procede de fabrication d'une telle batterie
DE102016118755B4 (de) 2015-10-05 2019-08-14 Lpkf Laser & Electronics Ag 3D-Dünnschichtbatterie und ein Verfahren und Substrat zu deren Herstellung
JP6683001B2 (ja) * 2016-05-10 2020-04-15 トヨタ自動車株式会社 固体電池の製造方法
US10833296B2 (en) 2017-09-26 2020-11-10 International Business Machines Corporation Thin film solid-state microbattery packaging
US10658702B2 (en) * 2017-10-02 2020-05-19 International Business Machines Corporation High-performance thin-film battery with an interfacial layer
GB2582177B (en) * 2019-03-14 2023-04-19 Ilika Tech Limited Method of processing layered structures

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3612018B2 (ja) * 1992-12-04 2005-01-19 株式会社半導体エネルギー研究所 半導体装置の作製方法
FR2862437B1 (fr) * 2003-11-14 2006-02-10 Commissariat Energie Atomique Procede de fabrication d'une micro-batterie au lithium
SE0402471D0 (sv) * 2004-10-12 2004-10-12 Anders Lundblad Electrochemical device
CN102290605A (zh) * 2006-07-18 2011-12-21 西姆贝特公司 用于固态微电池光刻制造、切单和钝化的方法和设备
JP2010505216A (ja) * 2006-07-25 2010-02-18 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 三次元基板上の薄層電池積重ねの製造方法
KR101587954B1 (ko) * 2007-10-25 2016-01-22 어플라이드 머티어리얼스, 인코포레이티드 박막 배터리들의 대량 생산을 위한 방법
FR2952477B1 (fr) * 2009-11-06 2011-12-09 St Microelectronics Tours Sas Procede de formation d'une batterie de type lithium-ion en couches minces

Also Published As

Publication number Publication date
CN102255102A (zh) 2011-11-23
CN102255102B (zh) 2016-03-23
DE102010029060A1 (de) 2011-11-24
JP2011243577A (ja) 2011-12-01
ITMI20110836A1 (it) 2011-11-19
FR2960346A1 (fr) 2011-11-25
JP5975605B2 (ja) 2016-08-23

Similar Documents

Publication Publication Date Title
FR2960346B1 (fr) Procede de fabrication d'une batterie en couche mince et batterie ainsi realisee
EP1839341B1 (fr) Dispositif semi-conducteur a heterojonctions et a structure inter-digitee
WO2006024721A2 (fr) Microbatterie comportant des connexions traversantes et procede de realisation d'une telle microbatterie
FR2503457A1 (fr) Systeme de cellules solaires connectees en serie sur un substrat unique
EP2306579A1 (fr) Procédé de formation d'une batterie lithium-ion en couches minces
FR2960706A1 (fr) Procede et dispositif pour fabriquer une batterie en couche mince
EP3118920B1 (fr) Batterie en couches minces autosupportée et procédé de fabrication d'une telle batterie
EP2309581A1 (fr) Procédé de formation d'une batterie lithium-ion verticale en couches minces
FR2994338A1 (fr) Procede de formation d'une batterie de type lithium-ion
WO2006045968A1 (fr) Structure multicouche monolithique pour la connexion de cellules a semi-conducteur
WO2017051004A1 (fr) Procédé de fabrication de structures pour cellule photovoltaïque
EP3260511A1 (fr) Procede de collage reversible entre deux elements
EP2681768B1 (fr) Procédé pour la mise en série électrique monolithique de cellules photovoltaïques d'un module solaire et module photovoltaïque obtenu par ce procédé
FR2983343A1 (fr) Procede de prevention d'une panne electrique dans un empilement de couches semi-conductrices, cellule cpv a substrat mince, et assemblage de cellule solaire
EP3227925B1 (fr) Fil textile photovoltaïque
WO2014029836A2 (fr) Procede de realisation de contacts electriques d'un dispositif semi-conducteur
FR3077681A1 (fr) Batterie en couches minces
FR2978296A1 (fr) Puce electronique comportant des piliers de connexion, et procede de fabrication
EP3776642B1 (fr) Procédé de fabrication d'un substrat donneur pour la réalisation d'une structure intégrée en trois dimensions et procédé de fabrication d'une telle structure intégrée
FR3076061B1 (fr) Realisation d'un collecteur de dispositif microelectronique
FR3051971A1 (enExample)
WO2024133682A1 (fr) Substrat comprenant des tranchées et procédés de fabrication associés
FR3074815A1 (fr) Procede d'extraction d'impuretes metalliques d'une plaquette de silicium cristallin
FR3076062A1 (fr) Realisation d'un collecteur de dispositif microelectronique
FR3050865A1 (fr) Procede de realisation d'interconnexions conductrices sur un substrat et interconnexions ainsi obtenues

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

PLSC Publication of the preliminary search report

Effective date: 20181116

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

ST Notification of lapse

Effective date: 20220105