JP5961260B2 - マルチベーン型スロットルバルブ - Google Patents
マルチベーン型スロットルバルブ Download PDFInfo
- Publication number
- JP5961260B2 JP5961260B2 JP2014521720A JP2014521720A JP5961260B2 JP 5961260 B2 JP5961260 B2 JP 5961260B2 JP 2014521720 A JP2014521720 A JP 2014521720A JP 2014521720 A JP2014521720 A JP 2014521720A JP 5961260 B2 JP5961260 B2 JP 5961260B2
- Authority
- JP
- Japan
- Prior art keywords
- vane
- rotary
- throttle valve
- chamber
- coolant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
- F16K1/222—Shaping of the valve member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/22—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
- F16K1/223—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves with a plurality of valve members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
- F16K49/005—Circulation means for a separate heat transfer fluid
- F16K49/007—Circulation means for a separate heat transfer fluid located within the obturating element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/6416—With heating or cooling of the system
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/6416—With heating or cooling of the system
- Y10T137/6579—Circulating fluid in heat exchange relationship
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86928—Sequentially progressive opening or closing of plural valves
- Y10T137/86936—Pressure equalizing or auxiliary shunt flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/8741—With common operator
- Y10T137/87442—Rotary valve
- Y10T137/87467—Axes of rotation parallel
- Y10T137/87475—Adjacent plate valves always parallel
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Details Of Valves (AREA)
- Lift Valve (AREA)
- Valve Housings (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161509765P | 2011-07-20 | 2011-07-20 | |
| US61/509,765 | 2011-07-20 | ||
| US13/549,771 US8833383B2 (en) | 2011-07-20 | 2012-07-16 | Multi-vane throttle valve |
| US13/549,771 | 2012-07-16 | ||
| PCT/US2012/047102 WO2013012880A1 (en) | 2011-07-20 | 2012-07-18 | Multi-vane throttle valve |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014525016A JP2014525016A (ja) | 2014-09-25 |
| JP2014525016A5 JP2014525016A5 (enExample) | 2016-02-12 |
| JP5961260B2 true JP5961260B2 (ja) | 2016-08-02 |
Family
ID=47554927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014521720A Active JP5961260B2 (ja) | 2011-07-20 | 2012-07-18 | マルチベーン型スロットルバルブ |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US8833383B2 (enExample) |
| EP (1) | EP2734758B1 (enExample) |
| JP (1) | JP5961260B2 (enExample) |
| KR (1) | KR101981037B1 (enExample) |
| ES (1) | ES2574264T3 (enExample) |
| IL (1) | IL230508B (enExample) |
| MX (1) | MX339089B (enExample) |
| MY (1) | MY165705A (enExample) |
| WO (1) | WO2013012880A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016024971A1 (en) * | 2014-08-14 | 2016-02-18 | Ferrotec (Usa) Corporation | Multi-vane throttle valve |
| US20160097351A1 (en) * | 2014-10-07 | 2016-04-07 | Borgwarner Inc. | Swirl type lp - egr throttle mechanism |
| TW201636525A (zh) | 2015-01-16 | 2016-10-16 | Mks儀器公司 | 徑向密封蝶形閥 |
| CN115234662B (zh) * | 2022-06-10 | 2025-06-06 | 浙江创享阀门科技有限公司 | 冶炼化工烟道防抱死多功能蝶阀 |
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| DE102008051349B3 (de) | 2008-10-15 | 2009-11-12 | Vat Holding Ag | Vakuumventil |
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| WO2010115917A1 (de) | 2009-04-07 | 2010-10-14 | Vat Holding Ag | Vakuumventil und vakuumkammersystem |
| TWI541465B (zh) | 2009-10-27 | 2016-07-11 | Vat控股股份有限公司 | 用於真空閥之封閉單元 |
| WO2011072315A1 (de) | 2009-12-14 | 2011-06-23 | Vat Holding Ag | Vakuumventil |
| DE102010053411B4 (de) | 2009-12-15 | 2023-07-06 | Vat Holding Ag | Vakuumventil |
| EP2336611A1 (en) | 2009-12-15 | 2011-06-22 | Applied Materials, Inc. | Water cooled valve |
| US8657256B2 (en) | 2010-01-25 | 2014-02-25 | Vat Holding Ag | Vacuum valve |
-
2012
- 2012-07-16 US US13/549,771 patent/US8833383B2/en active Active
- 2012-07-18 ES ES12814127.2T patent/ES2574264T3/es active Active
- 2012-07-18 EP EP12814127.2A patent/EP2734758B1/en active Active
- 2012-07-18 MY MYPI2014000066A patent/MY165705A/en unknown
- 2012-07-18 MX MX2014000269A patent/MX339089B/es active IP Right Grant
- 2012-07-18 KR KR1020147001334A patent/KR101981037B1/ko active Active
- 2012-07-18 JP JP2014521720A patent/JP5961260B2/ja active Active
- 2012-07-18 WO PCT/US2012/047102 patent/WO2013012880A1/en not_active Ceased
-
2014
- 2014-01-16 IL IL230508A patent/IL230508B/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| IL230508A0 (en) | 2014-03-31 |
| CN103688092A (zh) | 2014-03-26 |
| MX339089B (es) | 2016-05-11 |
| IL230508B (en) | 2018-06-28 |
| EP2734758A1 (en) | 2014-05-28 |
| JP2014525016A (ja) | 2014-09-25 |
| EP2734758A4 (en) | 2015-03-25 |
| MY165705A (en) | 2018-04-20 |
| WO2013012880A1 (en) | 2013-01-24 |
| ES2574264T3 (es) | 2016-06-16 |
| KR20140045501A (ko) | 2014-04-16 |
| US20130019951A1 (en) | 2013-01-24 |
| KR101981037B1 (ko) | 2019-08-28 |
| EP2734758B1 (en) | 2016-05-04 |
| MX2014000269A (es) | 2014-04-14 |
| US8833383B2 (en) | 2014-09-16 |
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