JP5948148B2 - 光電変換装置 - Google Patents
光電変換装置 Download PDFInfo
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- JP5948148B2 JP5948148B2 JP2012118188A JP2012118188A JP5948148B2 JP 5948148 B2 JP5948148 B2 JP 5948148B2 JP 2012118188 A JP2012118188 A JP 2012118188A JP 2012118188 A JP2012118188 A JP 2012118188A JP 5948148 B2 JP5948148 B2 JP 5948148B2
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- semiconductor layer
- silicon semiconductor
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- 238000006243 chemical reaction Methods 0.000 title claims description 64
- 239000004065 semiconductor Substances 0.000 claims description 262
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 236
- 229910052710 silicon Inorganic materials 0.000 claims description 236
- 239000010703 silicon Substances 0.000 claims description 236
- 239000000758 substrate Substances 0.000 claims description 106
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 93
- 239000010410 layer Substances 0.000 description 240
- 229910021419 crystalline silicon Inorganic materials 0.000 description 24
- 239000012535 impurity Substances 0.000 description 23
- 229910021417 amorphous silicon Inorganic materials 0.000 description 21
- 238000000034 method Methods 0.000 description 17
- 239000011241 protective layer Substances 0.000 description 14
- 238000005530 etching Methods 0.000 description 13
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 12
- 230000007547 defect Effects 0.000 description 12
- 239000000969 carrier Substances 0.000 description 11
- 230000006798 recombination Effects 0.000 description 11
- 238000005215 recombination Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 229960002050 hydrofluoric acid Drugs 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/035281—Shape of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022433—Particular geometry of the grid contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells; solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Description
110 第1のシリコン半導体層
120 第2のシリコン半導体層
130 第3のシリコン半導体層
140 第4のシリコン半導体層
150 第5のシリコン半導体層
160 第6のシリコン半導体層
170 第7のシリコン半導体層
180 第8のシリコン半導体層
210 第1の電極
210a 導電層
220 第2の電極
230 保護層
231 保護層
240 領域
241 領域
300 レジストマスク
301 レジストマスク
302 レジストマスク
Claims (7)
- 頂部が平坦な格子状の凸部、及び該凸部間の凹部からなる凹凸を一方の面に有する、一導電型の単結晶シリコン基板と、
前記凸部の頂部に形成されたi型の第1のシリコン半導体層と、
前記第1のシリコン半導体層上に形成された、前記単結晶シリコン基板とは逆の導電型を有する第2のシリコン半導体層と、
前記第2のシリコン半導体層上に形成された第1の電極と、
前記単結晶シリコン基板の一方の面において、前記単結晶シリコン基板、前記第1のシリコン半導体層、前記第2のシリコン半導体層、及び前記第1の電極の表面を覆うように形成された、i型の第3のシリコン半導体層と、
前記第3のシリコン半導体層上に形成された、前記単結晶シリコン基板とは逆の導電型を有する第4のシリコン半導体層と、
前記単結晶シリコン基板の他方の面に形成されたi型の第5のシリコン半導体層と、
前記第5のシリコン半導体層上に形成された、前記単結晶シリコン基板と同じ導電型を有する第6のシリコン半導体層と、
前記第6のシリコン半導体層上に形成された第2の電極と、を有することを特徴とする光電変換装置。 - 請求項1において、
前記第1の電極の幅は、前記第2のシリコン半導体層の幅よりも小さいことを特徴とする光電変換装置。 - 請求項1または請求項2において、
前記凹部は、逆四角錐状の形状であることを特徴とする光電変換装置。 - 請求項1または請求項2において、
前記凹部は、表面に鋸歯状の形状を有することを特徴とする光電変換装置。 - 請求項1乃至4のいずれか一項において、
前記第3のシリコン半導体層のうち、前記第2のシリコン半導体層及び前記第4のシリコン半導体層で挟まれる領域は、前記第2のシリコン半導体層及び前記第4のシリコン半導体と同じ導電型であり、その他の領域はi型であることを特徴とする光電変換装置。 - 請求項1乃至5のいずれか一項において、
前記第2のシリコン半導体層は、前記第4のシリコン半導体層よりもキャリア濃度が高いことを特徴とする光電変換装置。 - 請求項1乃至6のいずれか一項において、
前記第6のシリコン半導体層は、前記単結晶シリコン基板よりもキャリア濃度が高いことを特徴とする光電変換装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012118188A JP5948148B2 (ja) | 2011-05-25 | 2012-05-24 | 光電変換装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011116489 | 2011-05-25 | ||
JP2011116489 | 2011-05-25 | ||
JP2012118188A JP5948148B2 (ja) | 2011-05-25 | 2012-05-24 | 光電変換装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013008960A JP2013008960A (ja) | 2013-01-10 |
JP2013008960A5 JP2013008960A5 (ja) | 2015-05-28 |
JP5948148B2 true JP5948148B2 (ja) | 2016-07-06 |
Family
ID=47218409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012118188A Expired - Fee Related JP5948148B2 (ja) | 2011-05-25 | 2012-05-24 | 光電変換装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US9012769B2 (ja) |
JP (1) | JP5948148B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013077685A (ja) | 2011-09-30 | 2013-04-25 | Semiconductor Energy Lab Co Ltd | 光電変換装置 |
JP5927027B2 (ja) | 2011-10-05 | 2016-05-25 | 株式会社半導体エネルギー研究所 | 光電変換装置 |
JP5917082B2 (ja) | 2011-10-20 | 2016-05-11 | 株式会社半導体エネルギー研究所 | 光電変換装置の作製方法 |
KR101925929B1 (ko) * | 2013-01-16 | 2018-12-06 | 엘지전자 주식회사 | 태양 전지 및 그의 제조 방법 |
KR101925928B1 (ko) * | 2013-01-21 | 2018-12-06 | 엘지전자 주식회사 | 태양 전지 및 그의 제조 방법 |
JP7206660B2 (ja) * | 2018-07-17 | 2023-01-18 | セイコーエプソン株式会社 | 光電変換素子、光電変換モジュールおよび電子機器 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5213628A (en) | 1990-09-20 | 1993-05-25 | Sanyo Electric Co., Ltd. | Photovoltaic device |
JPH0795603B2 (ja) | 1990-09-20 | 1995-10-11 | 三洋電機株式会社 | 光起電力装置 |
JP3469729B2 (ja) | 1996-10-31 | 2003-11-25 | 三洋電機株式会社 | 太陽電池素子 |
US6222117B1 (en) * | 1998-01-05 | 2001-04-24 | Canon Kabushiki Kaisha | Photovoltaic device, manufacturing method of photovoltaic device, photovoltaic device integrated with building material and power-generating apparatus |
JP2003031831A (ja) * | 2001-07-13 | 2003-01-31 | Sanyo Electric Co Ltd | 光起電力素子及びその製造方法 |
JP2005175160A (ja) * | 2003-12-10 | 2005-06-30 | Sanyo Electric Co Ltd | 光起電力装置 |
US8816191B2 (en) * | 2005-11-29 | 2014-08-26 | Banpil Photonics, Inc. | High efficiency photovoltaic cells and manufacturing thereof |
WO2010113750A1 (ja) * | 2009-03-30 | 2010-10-07 | 三洋電機株式会社 | 太陽電池 |
US20110041910A1 (en) | 2009-08-18 | 2011-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method thereof |
-
2012
- 2012-05-10 US US13/468,367 patent/US9012769B2/en not_active Expired - Fee Related
- 2012-05-24 JP JP2012118188A patent/JP5948148B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US9012769B2 (en) | 2015-04-21 |
US20120298191A1 (en) | 2012-11-29 |
JP2013008960A (ja) | 2013-01-10 |
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