JP5911683B2 - 顕微鏡および顕微鏡検査法 - Google Patents
顕微鏡および顕微鏡検査法 Download PDFInfo
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- JP5911683B2 JP5911683B2 JP2011189560A JP2011189560A JP5911683B2 JP 5911683 B2 JP5911683 B2 JP 5911683B2 JP 2011189560 A JP2011189560 A JP 2011189560A JP 2011189560 A JP2011189560 A JP 2011189560A JP 5911683 B2 JP5911683 B2 JP 5911683B2
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- phase
- microscope
- polarization
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- light
- Prior art date
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Links
- 238000000386 microscopy Methods 0.000 title 1
- 230000010287 polarization Effects 0.000 claims description 60
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0068—Optical details of the image generation arrangements using polarisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0092—Polarisation microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/116—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010047352.9 | 2010-10-01 | ||
| DE102010047352 | 2010-10-01 | ||
| DE102011013613A DE102011013613A1 (de) | 2010-10-01 | 2011-03-08 | Mikroskop und Mikroskopierverfahren |
| DE102011013613.4 | 2011-03-08 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016067831A Division JP6453266B2 (ja) | 2010-10-01 | 2016-03-30 | 顕微鏡および顕微鏡検査法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012078802A JP2012078802A (ja) | 2012-04-19 |
| JP2012078802A5 JP2012078802A5 (https=) | 2015-04-23 |
| JP5911683B2 true JP5911683B2 (ja) | 2016-04-27 |
Family
ID=44992443
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011189560A Active JP5911683B2 (ja) | 2010-10-01 | 2011-08-31 | 顕微鏡および顕微鏡検査法 |
| JP2016067831A Active JP6453266B2 (ja) | 2010-10-01 | 2016-03-30 | 顕微鏡および顕微鏡検査法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016067831A Active JP6453266B2 (ja) | 2010-10-01 | 2016-03-30 | 顕微鏡および顕微鏡検査法 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US10156710B2 (https=) |
| EP (2) | EP3422088A1 (https=) |
| JP (2) | JP5911683B2 (https=) |
| DE (1) | DE102011013613A1 (https=) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010013830A1 (de) * | 2010-03-26 | 2011-09-29 | Carl Zeiss Microlmaging Gmbh | Mikroskop und Verfahren zur mikroskopischen Erfassung von Licht einer Probe |
| DE102012010207B4 (de) * | 2012-05-15 | 2024-02-29 | Carl Zeiss Microscopy Gmbh | Mikroskop und Mikroskopieverfahren |
| EP2888620A1 (en) * | 2012-08-24 | 2015-07-01 | Advanced Micro Devices, Inc. | Laser scanning module including an optical isolator |
| DE102012017922B4 (de) | 2012-09-11 | 2024-03-14 | Carl Zeiss Microscopy Gmbh | Optikanordnung und Lichtmikroskop |
| DE102012019464A1 (de) * | 2012-09-28 | 2014-04-03 | Carl Zeiss Microscopy Gmbh | Konfokales Auflicht-Rastermikroskop zur Multifleck-Abtastung |
| CN103197411B (zh) * | 2013-03-20 | 2017-05-10 | 中国科学院苏州生物医学工程技术研究所 | 一种位相板组件及可变景深的显微镜系统 |
| DE102013227103B4 (de) * | 2013-09-03 | 2018-05-30 | Leica Microsystems Cms Gmbh | Mikroskop mit einer akustooptischen Vorrichtung |
| DE102013218231A1 (de) * | 2013-09-11 | 2015-03-12 | Sirona Dental Systems Gmbh | Optisches System zur Erzeugung eines sich zeitlich ändernden Musters für ein Konfokalmikroskop |
| WO2015151461A1 (ja) * | 2014-04-01 | 2015-10-08 | 株式会社ニコン | 超解像観察装置及び超解像観察方法 |
| WO2015163261A1 (ja) | 2014-04-24 | 2015-10-29 | オリンパス株式会社 | 顕微鏡および顕微鏡観察方法 |
| JP2015210517A (ja) * | 2014-09-09 | 2015-11-24 | 株式会社ニコン | パターン描画装置、パターン描画方法、および、デバイス製造方法 |
| WO2016208322A1 (ja) * | 2015-06-23 | 2016-12-29 | オリンパス株式会社 | 画像取得装置および画像取得方法 |
| US10067072B2 (en) * | 2015-07-10 | 2018-09-04 | Kla-Tencor Corporation | Methods and apparatus for speckle suppression in laser dark-field systems |
| JP6594437B2 (ja) | 2015-09-15 | 2019-10-23 | オリンパス株式会社 | 顕微鏡および顕微鏡観察方法 |
| DE102016211374A1 (de) | 2016-06-24 | 2017-12-28 | Carl Zeiss Microscopy Gmbh | Mikroskopieverfahren unter Nutzung zeitlicher Fokusmodulation und Mikroskop |
| EP3371631B1 (en) | 2016-12-22 | 2021-08-18 | Advanced Optical Technologies, Inc. | Polarimeter with multiple independent tunable channels and method for material and object classification and recognition |
| US11867891B2 (en) | 2016-12-22 | 2024-01-09 | Advanced Optical Technologies, Inc. | Polarimeter with multiple independent tunable channels and method for material orientation imaging |
| CA3083287C (en) * | 2017-12-12 | 2024-02-20 | Allen Institute | Systems, apparatuses and methods for simultaneous multi-plane imaging |
| DE102018110083A1 (de) | 2018-04-26 | 2019-10-31 | Carl Zeiss Microscopy Gmbh | Optikanordnung zur flexiblen Mehrfarbbeleuchtung für ein Lichtmikroskop und Verfahren hierzu |
| KR102617346B1 (ko) * | 2018-06-28 | 2023-12-26 | 삼성전자주식회사 | 산란 억제를 위한 절단용 레이저 장치 |
| US11075496B2 (en) | 2018-06-28 | 2021-07-27 | Samsung Electronics Co., Ltd. | Laser dicing device, method of laser beam modulation, and method of dicing a substrate |
| KR102155329B1 (ko) * | 2018-11-09 | 2020-09-11 | 경북대학교 산학협력단 | 라이트 필드 이미징 시스템 |
| US10942135B2 (en) * | 2018-11-14 | 2021-03-09 | Kla Corporation | Radial polarizer for particle detection |
| CN109539976A (zh) * | 2018-11-23 | 2019-03-29 | 哈尔滨工业大学 | 基于螺旋相位板的零差干涉仪非线性误差修正方法与装置 |
| US11395714B2 (en) | 2019-11-11 | 2022-07-26 | Dermlite Llc | Medical illuminator with variable polarization |
| US11346769B2 (en) | 2020-02-20 | 2022-05-31 | Onto Innovation Inc. | Fast generalized multi-wavelength ellipsometer |
| US11346768B1 (en) * | 2020-12-02 | 2022-05-31 | Onto Innovation Inc. | Vortex polarimeter |
| CN112505914B (zh) * | 2020-12-10 | 2022-03-22 | 武汉先河激光技术有限公司 | 一种涡旋光束生成系统、方法及相位调制组合装置 |
| CN112987321B (zh) * | 2021-03-22 | 2022-08-02 | 中国科学院光电技术研究所 | 一种生成高功率涡旋激光的方法和装置 |
| CN113467073B (zh) * | 2021-04-29 | 2022-08-09 | 西安交通大学 | 一种基于柱矢量光场的激光微小频率偏移装置及方法 |
| CN113608359B (zh) * | 2021-08-19 | 2023-08-11 | 中国科学院光电技术研究所 | 一种模式可调的腔内涡旋光束生成装置 |
| WO2023148907A1 (ja) * | 2022-02-04 | 2023-08-10 | 三菱電機株式会社 | 動的光パターン生成装置 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3628848A (en) * | 1969-12-23 | 1971-12-21 | Anvar | Variable phase contrast microscopy |
| US5034613A (en) | 1989-11-14 | 1991-07-23 | Cornell Research Foundation, Inc. | Two-photon laser microscopy |
| JPH07167933A (ja) * | 1993-12-15 | 1995-07-04 | Nikon Corp | 磁気偏光顕微鏡 |
| JPH07187933A (ja) * | 1993-12-24 | 1995-07-25 | Sekisui Plastics Co Ltd | 土壌抗菌剤 |
| GB9603788D0 (en) * | 1996-02-22 | 1996-04-24 | Isis Innovation | Confocal microscope |
| US6134010A (en) * | 1997-11-07 | 2000-10-17 | Lucid, Inc. | Imaging system using polarization effects to enhance image quality |
| US6151127A (en) * | 1998-05-28 | 2000-11-21 | The General Hospital Corporation | Confocal microscopy |
| US20050134841A1 (en) * | 1998-09-18 | 2005-06-23 | Mehdi Vacz-Iravani | Sample inspection system |
| DE19904592C2 (de) | 1999-02-05 | 2001-03-08 | Lavision Gmbh | Strahlteilervorrichtung |
| DE60016761T2 (de) * | 1999-08-02 | 2005-12-15 | Zetetic Institute, Tucson | Interferometrische konfokale nahfeld-abtastmikroskopie |
| US7038848B2 (en) * | 2002-12-27 | 2006-05-02 | Olympus Corporation | Confocal microscope |
| JP2005345561A (ja) * | 2004-05-31 | 2005-12-15 | Olympus Corp | 走査型レーザ顕微鏡装置 |
| DE102004034987A1 (de) * | 2004-07-16 | 2006-02-02 | Carl Zeiss Jena Gmbh | Lichtrastermikroskop und Verwendung |
| JP2006058477A (ja) * | 2004-08-18 | 2006-03-02 | Olympus Corp | 超解像顕微鏡 |
| JP5189301B2 (ja) * | 2007-03-12 | 2013-04-24 | オリンパス株式会社 | レーザー走査型顕微鏡 |
| JP5551069B2 (ja) | 2007-07-06 | 2014-07-16 | ナショナル ユニヴァーシティー オブ シンガポール | 蛍光焦点変調顕微鏡システムおよびその方法 |
| JP5622571B2 (ja) * | 2007-07-20 | 2014-11-12 | メディツィーニシェ・ウニヴェルジテート・インスブルックMedizinische Universitaet Innsbruck | 一対の回折光学要素を備える光学デバイス |
| JP5484879B2 (ja) * | 2009-12-11 | 2014-05-07 | オリンパス株式会社 | 超解像顕微鏡 |
| HRP20201813T1 (hr) * | 2010-03-05 | 2021-03-19 | The General Hospital Corporation | Uređaj za pružanje elektromagnetnog zračenja na uzorak |
| JP5752360B2 (ja) * | 2010-03-12 | 2015-07-22 | 富士フイルム株式会社 | ポリエステルフィルムの溶融製膜方法及び太陽電池部材用ポリエステルフィルム |
| DE102010013829A1 (de) * | 2010-03-26 | 2011-09-29 | Carl Zeiss Microlmaging Gmbh | Mikroskop und Verfahren zur Erfassung von Probenlicht |
-
2011
- 2011-03-08 DE DE102011013613A patent/DE102011013613A1/de not_active Withdrawn
- 2011-08-31 JP JP2011189560A patent/JP5911683B2/ja active Active
- 2011-09-29 EP EP17202895.3A patent/EP3422088A1/de not_active Withdrawn
- 2011-09-29 EP EP11007920.9A patent/EP2437096B1/de active Active
- 2011-10-03 US US13/251,452 patent/US10156710B2/en active Active
-
2016
- 2016-03-30 JP JP2016067831A patent/JP6453266B2/ja active Active
- 2016-10-20 US US15/298,424 patent/US20170068082A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012078802A (ja) | 2012-04-19 |
| US10156710B2 (en) | 2018-12-18 |
| EP2437096B1 (de) | 2017-11-22 |
| EP2437096A2 (de) | 2012-04-04 |
| US20120268812A1 (en) | 2012-10-25 |
| JP2016118811A (ja) | 2016-06-30 |
| DE102011013613A1 (de) | 2012-04-05 |
| JP6453266B2 (ja) | 2019-01-16 |
| EP2437096A3 (de) | 2012-05-09 |
| US20170068082A1 (en) | 2017-03-09 |
| EP3422088A1 (de) | 2019-01-02 |
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