JP2012078802A5 - - Google Patents

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Publication number
JP2012078802A5
JP2012078802A5 JP2011189560A JP2011189560A JP2012078802A5 JP 2012078802 A5 JP2012078802 A5 JP 2012078802A5 JP 2011189560 A JP2011189560 A JP 2011189560A JP 2011189560 A JP2011189560 A JP 2011189560A JP 2012078802 A5 JP2012078802 A5 JP 2012078802A5
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Japan
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microscope
phase
phase plate
polarization
illumination
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JP2011189560A
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English (en)
Japanese (ja)
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JP2012078802A (ja
JP5911683B2 (ja
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Priority claimed from DE102011013613A external-priority patent/DE102011013613A1/de
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JP2011189560A 2010-10-01 2011-08-31 顕微鏡および顕微鏡検査法 Active JP5911683B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102010047352.9 2010-10-01
DE102010047352 2010-10-01
DE102011013613A DE102011013613A1 (de) 2010-10-01 2011-03-08 Mikroskop und Mikroskopierverfahren
DE102011013613.4 2011-03-08

Related Child Applications (1)

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JP2016067831A Division JP6453266B2 (ja) 2010-10-01 2016-03-30 顕微鏡および顕微鏡検査法

Publications (3)

Publication Number Publication Date
JP2012078802A JP2012078802A (ja) 2012-04-19
JP2012078802A5 true JP2012078802A5 (https=) 2015-04-23
JP5911683B2 JP5911683B2 (ja) 2016-04-27

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JP2011189560A Active JP5911683B2 (ja) 2010-10-01 2011-08-31 顕微鏡および顕微鏡検査法
JP2016067831A Active JP6453266B2 (ja) 2010-10-01 2016-03-30 顕微鏡および顕微鏡検査法

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US (2) US10156710B2 (https=)
EP (2) EP3422088A1 (https=)
JP (2) JP5911683B2 (https=)
DE (1) DE102011013613A1 (https=)

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US10942135B2 (en) * 2018-11-14 2021-03-09 Kla Corporation Radial polarizer for particle detection
CN109539976A (zh) * 2018-11-23 2019-03-29 哈尔滨工业大学 基于螺旋相位板的零差干涉仪非线性误差修正方法与装置
US11395714B2 (en) 2019-11-11 2022-07-26 Dermlite Llc Medical illuminator with variable polarization
US11346769B2 (en) 2020-02-20 2022-05-31 Onto Innovation Inc. Fast generalized multi-wavelength ellipsometer
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CN112505914B (zh) * 2020-12-10 2022-03-22 武汉先河激光技术有限公司 一种涡旋光束生成系统、方法及相位调制组合装置
CN112987321B (zh) * 2021-03-22 2022-08-02 中国科学院光电技术研究所 一种生成高功率涡旋激光的方法和装置
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