DE102011013613A1 - Mikroskop und Mikroskopierverfahren - Google Patents

Mikroskop und Mikroskopierverfahren Download PDF

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Publication number
DE102011013613A1
DE102011013613A1 DE102011013613A DE102011013613A DE102011013613A1 DE 102011013613 A1 DE102011013613 A1 DE 102011013613A1 DE 102011013613 A DE102011013613 A DE 102011013613A DE 102011013613 A DE102011013613 A DE 102011013613A DE 102011013613 A1 DE102011013613 A1 DE 102011013613A1
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DE
Germany
Prior art keywords
microscope
phase
polarization
optical
microscope according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102011013613A
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German (de)
English (en)
Inventor
Dr. Anhut Tiemo
Dr. Kalkbrenner Thomas
Dr. Schwedt Daniel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microscopy GmbH
Original Assignee
Carl Zeiss MicroImaging GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss MicroImaging GmbH filed Critical Carl Zeiss MicroImaging GmbH
Priority to DE102011013613A priority Critical patent/DE102011013613A1/de
Priority to JP2011189560A priority patent/JP5911683B2/ja
Priority to EP17202895.3A priority patent/EP3422088A1/de
Priority to EP11007920.9A priority patent/EP2437096B1/de
Priority to US13/251,452 priority patent/US10156710B2/en
Publication of DE102011013613A1 publication Critical patent/DE102011013613A1/de
Priority to JP2016067831A priority patent/JP6453266B2/ja
Priority to US15/298,424 priority patent/US20170068082A1/en
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0068—Optical details of the image generation arrangements using polarisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0092—Polarisation microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/116—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
DE102011013613A 2010-10-01 2011-03-08 Mikroskop und Mikroskopierverfahren Withdrawn DE102011013613A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE102011013613A DE102011013613A1 (de) 2010-10-01 2011-03-08 Mikroskop und Mikroskopierverfahren
JP2011189560A JP5911683B2 (ja) 2010-10-01 2011-08-31 顕微鏡および顕微鏡検査法
EP17202895.3A EP3422088A1 (de) 2010-10-01 2011-09-29 Mikroskop und mikroskopierverfahren
EP11007920.9A EP2437096B1 (de) 2010-10-01 2011-09-29 Mikroskop und Mikroskopierverfahren
US13/251,452 US10156710B2 (en) 2010-10-01 2011-10-03 Microscope and microscopy techniques
JP2016067831A JP6453266B2 (ja) 2010-10-01 2016-03-30 顕微鏡および顕微鏡検査法
US15/298,424 US20170068082A1 (en) 2010-10-01 2016-10-20 Microscope and microscopy techniques

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010047352.9 2010-10-01
DE102010047352 2010-10-01
DE102011013613A DE102011013613A1 (de) 2010-10-01 2011-03-08 Mikroskop und Mikroskopierverfahren

Publications (1)

Publication Number Publication Date
DE102011013613A1 true DE102011013613A1 (de) 2012-04-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE102011013613A Withdrawn DE102011013613A1 (de) 2010-10-01 2011-03-08 Mikroskop und Mikroskopierverfahren

Country Status (4)

Country Link
US (2) US10156710B2 (https=)
EP (2) EP3422088A1 (https=)
JP (2) JP5911683B2 (https=)
DE (1) DE102011013613A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012010207A1 (de) 2012-05-15 2013-11-21 Carl Zeiss Microscopy Gmbh Mikroskop und Mikroskopieverfahren
DE102012019464A1 (de) * 2012-09-28 2014-04-03 Carl Zeiss Microscopy Gmbh Konfokales Auflicht-Rastermikroskop zur Multifleck-Abtastung
DE102013218231A1 (de) * 2013-09-11 2015-03-12 Sirona Dental Systems Gmbh Optisches System zur Erzeugung eines sich zeitlich ändernden Musters für ein Konfokalmikroskop
WO2017220668A1 (de) 2016-06-24 2017-12-28 Carl Zeiss Microscopy Gmbh Mikroskopieverfahren unter nutzung zeitlicher fokusmodulation und mikroskop

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DE102010013830A1 (de) * 2010-03-26 2011-09-29 Carl Zeiss Microlmaging Gmbh Mikroskop und Verfahren zur mikroskopischen Erfassung von Licht einer Probe
EP2888620A1 (en) * 2012-08-24 2015-07-01 Advanced Micro Devices, Inc. Laser scanning module including an optical isolator
DE102012017922B4 (de) 2012-09-11 2024-03-14 Carl Zeiss Microscopy Gmbh Optikanordnung und Lichtmikroskop
CN103197411B (zh) * 2013-03-20 2017-05-10 中国科学院苏州生物医学工程技术研究所 一种位相板组件及可变景深的显微镜系统
DE102013227103B4 (de) * 2013-09-03 2018-05-30 Leica Microsystems Cms Gmbh Mikroskop mit einer akustooptischen Vorrichtung
WO2015151461A1 (ja) * 2014-04-01 2015-10-08 株式会社ニコン 超解像観察装置及び超解像観察方法
WO2015163261A1 (ja) 2014-04-24 2015-10-29 オリンパス株式会社 顕微鏡および顕微鏡観察方法
JP2015210517A (ja) * 2014-09-09 2015-11-24 株式会社ニコン パターン描画装置、パターン描画方法、および、デバイス製造方法
WO2016208322A1 (ja) * 2015-06-23 2016-12-29 オリンパス株式会社 画像取得装置および画像取得方法
US10067072B2 (en) * 2015-07-10 2018-09-04 Kla-Tencor Corporation Methods and apparatus for speckle suppression in laser dark-field systems
JP6594437B2 (ja) 2015-09-15 2019-10-23 オリンパス株式会社 顕微鏡および顕微鏡観察方法
EP3371631B1 (en) 2016-12-22 2021-08-18 Advanced Optical Technologies, Inc. Polarimeter with multiple independent tunable channels and method for material and object classification and recognition
US11867891B2 (en) 2016-12-22 2024-01-09 Advanced Optical Technologies, Inc. Polarimeter with multiple independent tunable channels and method for material orientation imaging
CA3083287C (en) * 2017-12-12 2024-02-20 Allen Institute Systems, apparatuses and methods for simultaneous multi-plane imaging
DE102018110083A1 (de) 2018-04-26 2019-10-31 Carl Zeiss Microscopy Gmbh Optikanordnung zur flexiblen Mehrfarbbeleuchtung für ein Lichtmikroskop und Verfahren hierzu
KR102617346B1 (ko) * 2018-06-28 2023-12-26 삼성전자주식회사 산란 억제를 위한 절단용 레이저 장치
US11075496B2 (en) 2018-06-28 2021-07-27 Samsung Electronics Co., Ltd. Laser dicing device, method of laser beam modulation, and method of dicing a substrate
KR102155329B1 (ko) * 2018-11-09 2020-09-11 경북대학교 산학협력단 라이트 필드 이미징 시스템
US10942135B2 (en) * 2018-11-14 2021-03-09 Kla Corporation Radial polarizer for particle detection
CN109539976A (zh) * 2018-11-23 2019-03-29 哈尔滨工业大学 基于螺旋相位板的零差干涉仪非线性误差修正方法与装置
US11395714B2 (en) 2019-11-11 2022-07-26 Dermlite Llc Medical illuminator with variable polarization
US11346769B2 (en) 2020-02-20 2022-05-31 Onto Innovation Inc. Fast generalized multi-wavelength ellipsometer
US11346768B1 (en) * 2020-12-02 2022-05-31 Onto Innovation Inc. Vortex polarimeter
CN112505914B (zh) * 2020-12-10 2022-03-22 武汉先河激光技术有限公司 一种涡旋光束生成系统、方法及相位调制组合装置
CN112987321B (zh) * 2021-03-22 2022-08-02 中国科学院光电技术研究所 一种生成高功率涡旋激光的方法和装置
CN113467073B (zh) * 2021-04-29 2022-08-09 西安交通大学 一种基于柱矢量光场的激光微小频率偏移装置及方法
CN113608359B (zh) * 2021-08-19 2023-08-11 中国科学院光电技术研究所 一种模式可调的腔内涡旋光束生成装置
WO2023148907A1 (ja) * 2022-02-04 2023-08-10 三菱電機株式会社 動的光パターン生成装置

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012010207A1 (de) 2012-05-15 2013-11-21 Carl Zeiss Microscopy Gmbh Mikroskop und Mikroskopieverfahren
WO2013170940A1 (de) 2012-05-15 2013-11-21 Carl Zeiss Microscopy Gmbh Mikroskop und mikroskopieverfahren
US10095017B2 (en) 2012-05-15 2018-10-09 Carl Zeiss Microscopy Gmbh Microscope and microscopy method
DE102012010207B4 (de) 2012-05-15 2024-02-29 Carl Zeiss Microscopy Gmbh Mikroskop und Mikroskopieverfahren
DE102012019464A1 (de) * 2012-09-28 2014-04-03 Carl Zeiss Microscopy Gmbh Konfokales Auflicht-Rastermikroskop zur Multifleck-Abtastung
DE102013218231A1 (de) * 2013-09-11 2015-03-12 Sirona Dental Systems Gmbh Optisches System zur Erzeugung eines sich zeitlich ändernden Musters für ein Konfokalmikroskop
US9910255B2 (en) 2013-09-11 2018-03-06 DENTSPLY SIRONA, Inc. Optical system for generating a pattern which changes over time for a confocal microscope
WO2017220668A1 (de) 2016-06-24 2017-12-28 Carl Zeiss Microscopy Gmbh Mikroskopieverfahren unter nutzung zeitlicher fokusmodulation und mikroskop
DE102016211374A1 (de) 2016-06-24 2017-12-28 Carl Zeiss Microscopy Gmbh Mikroskopieverfahren unter Nutzung zeitlicher Fokusmodulation und Mikroskop
US11194144B2 (en) 2016-06-24 2021-12-07 Carl Zeiss Microscopy Gmbh Microscopy method using temporal focus modulation, and microscope

Also Published As

Publication number Publication date
JP2012078802A (ja) 2012-04-19
US10156710B2 (en) 2018-12-18
EP2437096B1 (de) 2017-11-22
EP2437096A2 (de) 2012-04-04
JP5911683B2 (ja) 2016-04-27
US20120268812A1 (en) 2012-10-25
JP2016118811A (ja) 2016-06-30
JP6453266B2 (ja) 2019-01-16
EP2437096A3 (de) 2012-05-09
US20170068082A1 (en) 2017-03-09
EP3422088A1 (de) 2019-01-02

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