JP5868224B2 - クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット - Google Patents

クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット Download PDF

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Publication number
JP5868224B2
JP5868224B2 JP2012050725A JP2012050725A JP5868224B2 JP 5868224 B2 JP5868224 B2 JP 5868224B2 JP 2012050725 A JP2012050725 A JP 2012050725A JP 2012050725 A JP2012050725 A JP 2012050725A JP 5868224 B2 JP5868224 B2 JP 5868224B2
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Japan
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gas
cryopump
compressor
pressure
working gas
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JP2012050725A
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English (en)
Japanese (ja)
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JP2013185480A (ja
JP2013185480A5 (https=
Inventor
孝聡 松井
孝聡 松井
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Priority to JP2012050725A priority Critical patent/JP5868224B2/ja
Priority to TW101146857A priority patent/TWI534348B/zh
Priority to KR1020130024658A priority patent/KR101440721B1/ko
Priority to CN201310073415.7A priority patent/CN103306936B/zh
Priority to US13/788,858 priority patent/US9480934B2/en
Publication of JP2013185480A publication Critical patent/JP2013185480A/ja
Publication of JP2013185480A5 publication Critical patent/JP2013185480A5/ja
Application granted granted Critical
Publication of JP5868224B2 publication Critical patent/JP5868224B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B45/00—Arrangements for charging or discharging refrigerant
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
    • F25B2345/002—Collecting refrigerant from a cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
    • F25B2345/003—Control issues for charging or collecting refrigerant to or from a cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
    • F25B2345/004—Details for charging or discharging refrigerants; Service stations therefor with several tanks to collect or charge a cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/05—Refrigerant levels

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2012050725A 2012-03-07 2012-03-07 クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット Active JP5868224B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012050725A JP5868224B2 (ja) 2012-03-07 2012-03-07 クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット
TW101146857A TWI534348B (zh) 2012-03-07 2012-12-12 A cryopump system, a cryopump system operating method, and a compressor unit
KR1020130024658A KR101440721B1 (ko) 2012-03-07 2013-03-07 크라이오펌프시스템, 크라이오펌프시스템의 운전방법, 및 압축기유닛
CN201310073415.7A CN103306936B (zh) 2012-03-07 2013-03-07 低温泵系统、低温泵系统的运行方法以及压缩机单元
US13/788,858 US9480934B2 (en) 2012-03-07 2013-03-07 Cryopump system, and method of operating the same, and compressor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012050725A JP5868224B2 (ja) 2012-03-07 2012-03-07 クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット

Publications (3)

Publication Number Publication Date
JP2013185480A JP2013185480A (ja) 2013-09-19
JP2013185480A5 JP2013185480A5 (https=) 2013-11-28
JP5868224B2 true JP5868224B2 (ja) 2016-02-24

Family

ID=49112825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012050725A Active JP5868224B2 (ja) 2012-03-07 2012-03-07 クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット

Country Status (5)

Country Link
US (1) US9480934B2 (https=)
JP (1) JP5868224B2 (https=)
KR (1) KR101440721B1 (https=)
CN (1) CN103306936B (https=)
TW (1) TWI534348B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11713912B2 (en) 2020-11-09 2023-08-01 Sumitomo Heavy Industries, Ltd. Cryocooler and starting method of cryocooler

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US7127901B2 (en) * 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
JP2015098844A (ja) 2013-11-20 2015-05-28 住友重機械工業株式会社 クライオポンプシステム、及びクライオポンプシステムの運転方法
KR101525560B1 (ko) * 2014-03-11 2015-06-03 주식회사 조인솔루션 크라이오 펌프시스템의 전력절감장치
DE102014010102A1 (de) 2014-07-08 2016-01-14 Linde Aktiengesellschaft Verfahren zur Druck- und Temperaturreglung eines Fluids in einer Serie von kryogenen Verdichtern
JP6410589B2 (ja) * 2014-12-17 2018-10-24 住友重機械工業株式会社 クライオポンプ、クライオポンプの制御方法、及び冷凍機
EP3037746B1 (en) * 2014-12-22 2020-08-12 Sumitomo Heavy Industries, Ltd. Cryocooler and operation method of cryocooler
US10066612B2 (en) * 2015-07-01 2018-09-04 Caterpillar Inc. Method of operating cryogenic pump and cryogenic pump system
EP3325899B1 (en) * 2015-07-20 2022-07-06 Cresstec RAC IP Pty. Ltd. A subsystem for a vapour-compression system
JP7201447B2 (ja) * 2019-01-15 2023-01-10 住友重機械工業株式会社 極低温冷凍機の起動方法
FR3100319B1 (fr) * 2019-09-04 2021-08-20 Absolut System Machine cryogénique régénérative
CN111637654A (zh) * 2020-06-11 2020-09-08 安徽万瑞冷电科技有限公司 应用于低温泵的变容积制冷系统、变容积方法、系统
CN112413946A (zh) * 2020-11-23 2021-02-26 珠海格力电器股份有限公司 冷媒回收控制方法、装置、冷媒回收设备及空调设备
CN117222854A (zh) 2021-04-30 2023-12-12 住友重机械工业株式会社 超低温制冷机及超低温制冷机的运行方法
CN114087156A (zh) * 2021-11-11 2022-02-25 浙江博开机电科技有限公司 一种低能耗低温泵系统
CN118159789A (zh) 2021-11-25 2024-06-07 住友重机械工业株式会社 超低温制冷机诊断系统、超低温制冷机及其诊断方法
JP2024055145A (ja) * 2022-10-06 2024-04-18 住友重機械工業株式会社 極低温冷凍機の運転方法および極低温冷凍機
CN115479857A (zh) * 2022-10-19 2022-12-16 毕节高新技术产业开发区国家能源大规模物理储能技术研发中心 预应力式超低温循环测试实验装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11713912B2 (en) 2020-11-09 2023-08-01 Sumitomo Heavy Industries, Ltd. Cryocooler and starting method of cryocooler

Also Published As

Publication number Publication date
JP2013185480A (ja) 2013-09-19
KR20130102507A (ko) 2013-09-17
TWI534348B (zh) 2016-05-21
US20130232999A1 (en) 2013-09-12
CN103306936B (zh) 2016-02-03
US9480934B2 (en) 2016-11-01
TW201341662A (zh) 2013-10-16
KR101440721B1 (ko) 2014-09-17
CN103306936A (zh) 2013-09-18

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