TWI534348B - A cryopump system, a cryopump system operating method, and a compressor unit - Google Patents
A cryopump system, a cryopump system operating method, and a compressor unit Download PDFInfo
- Publication number
- TWI534348B TWI534348B TW101146857A TW101146857A TWI534348B TW I534348 B TWI534348 B TW I534348B TW 101146857 A TW101146857 A TW 101146857A TW 101146857 A TW101146857 A TW 101146857A TW I534348 B TWI534348 B TW I534348B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- cryopump
- compressor
- pressure
- operating
- Prior art date
Links
- 238000011017 operating method Methods 0.000 title description 3
- 238000001816 cooling Methods 0.000 claims description 36
- 230000008929 regeneration Effects 0.000 claims description 27
- 238000011069 regeneration method Methods 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 25
- 230000002829 reductive effect Effects 0.000 claims description 16
- 238000002360 preparation method Methods 0.000 claims description 7
- 230000001172 regenerating effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 330
- 238000011084 recovery Methods 0.000 description 22
- 230000007246 mechanism Effects 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 230000006835 compression Effects 0.000 description 8
- 238000007906 compression Methods 0.000 description 8
- 239000013256 coordination polymer Substances 0.000 description 8
- 230000002441 reversible effect Effects 0.000 description 8
- 238000007710 freezing Methods 0.000 description 7
- 230000008014 freezing Effects 0.000 description 7
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000005057 refrigeration Methods 0.000 description 5
- 238000007599 discharging Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 230000000153 supplemental effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 230000036413 temperature sense Effects 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B45/00—Arrangements for charging or discharging refrigerant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
- F25B2345/002—Collecting refrigerant from a cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
- F25B2345/003—Control issues for charging or collecting refrigerant to or from a cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
- F25B2345/004—Details for charging or discharging refrigerants; Service stations therefor with several tanks to collect or charge a cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/05—Refrigerant levels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012050725A JP5868224B2 (ja) | 2012-03-07 | 2012-03-07 | クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201341662A TW201341662A (zh) | 2013-10-16 |
| TWI534348B true TWI534348B (zh) | 2016-05-21 |
Family
ID=49112825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101146857A TWI534348B (zh) | 2012-03-07 | 2012-12-12 | A cryopump system, a cryopump system operating method, and a compressor unit |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9480934B2 (https=) |
| JP (1) | JP5868224B2 (https=) |
| KR (1) | KR101440721B1 (https=) |
| CN (1) | CN103306936B (https=) |
| TW (1) | TWI534348B (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
| JP2015098844A (ja) | 2013-11-20 | 2015-05-28 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| KR101525560B1 (ko) * | 2014-03-11 | 2015-06-03 | 주식회사 조인솔루션 | 크라이오 펌프시스템의 전력절감장치 |
| DE102014010102A1 (de) | 2014-07-08 | 2016-01-14 | Linde Aktiengesellschaft | Verfahren zur Druck- und Temperaturreglung eines Fluids in einer Serie von kryogenen Verdichtern |
| JP6410589B2 (ja) * | 2014-12-17 | 2018-10-24 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプの制御方法、及び冷凍機 |
| EP3037746B1 (en) * | 2014-12-22 | 2020-08-12 | Sumitomo Heavy Industries, Ltd. | Cryocooler and operation method of cryocooler |
| US10066612B2 (en) * | 2015-07-01 | 2018-09-04 | Caterpillar Inc. | Method of operating cryogenic pump and cryogenic pump system |
| EP3325899B1 (en) * | 2015-07-20 | 2022-07-06 | Cresstec RAC IP Pty. Ltd. | A subsystem for a vapour-compression system |
| JP7201447B2 (ja) * | 2019-01-15 | 2023-01-10 | 住友重機械工業株式会社 | 極低温冷凍機の起動方法 |
| FR3100319B1 (fr) * | 2019-09-04 | 2021-08-20 | Absolut System | Machine cryogénique régénérative |
| CN111637654A (zh) * | 2020-06-11 | 2020-09-08 | 安徽万瑞冷电科技有限公司 | 应用于低温泵的变容积制冷系统、变容积方法、系统 |
| JP7544568B2 (ja) | 2020-11-09 | 2024-09-03 | 住友重機械工業株式会社 | 極低温冷凍機および極低温冷凍機の起動方法 |
| CN112413946A (zh) * | 2020-11-23 | 2021-02-26 | 珠海格力电器股份有限公司 | 冷媒回收控制方法、装置、冷媒回收设备及空调设备 |
| CN117222854A (zh) | 2021-04-30 | 2023-12-12 | 住友重机械工业株式会社 | 超低温制冷机及超低温制冷机的运行方法 |
| CN114087156A (zh) * | 2021-11-11 | 2022-02-25 | 浙江博开机电科技有限公司 | 一种低能耗低温泵系统 |
| CN118159789A (zh) | 2021-11-25 | 2024-06-07 | 住友重机械工业株式会社 | 超低温制冷机诊断系统、超低温制冷机及其诊断方法 |
| JP2024055145A (ja) * | 2022-10-06 | 2024-04-18 | 住友重機械工業株式会社 | 極低温冷凍機の運転方法および極低温冷凍機 |
| CN115479857A (zh) * | 2022-10-19 | 2022-12-16 | 毕节高新技术产业开发区国家能源大规模物理储能技术研发中心 | 预应力式超低温循环测试实验装置 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1426986A1 (de) * | 1964-08-06 | 1969-05-29 | Max Planck Gesellschaft | Helium-Refrigerator |
| JPS58143179A (ja) * | 1982-02-19 | 1983-08-25 | Jeol Ltd | クライオポンプの制御装置 |
| JPH0315676A (ja) * | 1989-06-13 | 1991-01-24 | Daikin Ind Ltd | マルチ式極低温冷凍機 |
| JPH08135570A (ja) * | 1994-11-11 | 1996-05-28 | Ebara Corp | クライオポンプ及びコールドトラップ |
| JPH09317640A (ja) * | 1996-05-28 | 1997-12-09 | Daikin Ind Ltd | クライオポンプ |
| JPH1137579A (ja) * | 1997-07-11 | 1999-02-12 | Zexel Corp | 冷凍装置 |
| US6116032A (en) * | 1999-01-12 | 2000-09-12 | Applied Materials, Inc. | Method for reducing particulate generation from regeneration of cryogenic vacuum pumps |
| JP2000266416A (ja) * | 1999-03-15 | 2000-09-29 | Sanyo Electric Co Ltd | 極低温冷凍装置 |
| US6530237B2 (en) * | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
| US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
| JP3754992B2 (ja) * | 2001-08-03 | 2006-03-15 | 住友重機械工業株式会社 | マルチシステム冷凍機の運転方法、装置及び冷凍装置 |
| JP4445187B2 (ja) | 2002-04-18 | 2010-04-07 | 住友重機械工業株式会社 | 極低温冷凍機 |
| US7263839B2 (en) * | 2002-10-16 | 2007-09-04 | Koninklijke Philips Electronics N.V. | Cooling device for MR apparatus |
| GB2455737B (en) * | 2007-12-19 | 2010-08-11 | Siemens Magnet Technology Ltd | Variable charge compressor |
| JP2009156220A (ja) * | 2007-12-27 | 2009-07-16 | Canon Anelva Technix Corp | クライオポンプおよびその再生方法 |
| JP4686572B2 (ja) * | 2008-05-14 | 2011-05-25 | 住友重機械工業株式会社 | クライオポンプ、真空排気システム、及びその診断方法 |
| CN102171454B (zh) * | 2008-09-30 | 2014-03-12 | 佳能安内华股份有限公司 | 真空抽吸系统、衬底处理设备、电子装置的制造方法和真空抽吸系统的操作方法 |
| KR101279184B1 (ko) * | 2008-09-30 | 2013-06-26 | 캐논 아네르바 가부시키가이샤 | 진공 배기 시스템, 진공 배기 시스템의 운전 방법, 냉동기, 진공 배기 펌프, 냉동기의 운전 방법, 2단식 냉동기의 운전 제어 방법, 크라이오 펌프의 운전 제어 방법, 2단식 냉동기, 크라이오 펌프, 기판 처리 장치, 전자 디바이스의 제조 방법 |
-
2012
- 2012-03-07 JP JP2012050725A patent/JP5868224B2/ja active Active
- 2012-12-12 TW TW101146857A patent/TWI534348B/zh active
-
2013
- 2013-03-07 KR KR1020130024658A patent/KR101440721B1/ko active Active
- 2013-03-07 CN CN201310073415.7A patent/CN103306936B/zh active Active
- 2013-03-07 US US13/788,858 patent/US9480934B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013185480A (ja) | 2013-09-19 |
| KR20130102507A (ko) | 2013-09-17 |
| US20130232999A1 (en) | 2013-09-12 |
| CN103306936B (zh) | 2016-02-03 |
| US9480934B2 (en) | 2016-11-01 |
| TW201341662A (zh) | 2013-10-16 |
| KR101440721B1 (ko) | 2014-09-17 |
| CN103306936A (zh) | 2013-09-18 |
| JP5868224B2 (ja) | 2016-02-24 |
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