CN103306936B - 低温泵系统、低温泵系统的运行方法以及压缩机单元 - Google Patents
低温泵系统、低温泵系统的运行方法以及压缩机单元 Download PDFInfo
- Publication number
- CN103306936B CN103306936B CN201310073415.7A CN201310073415A CN103306936B CN 103306936 B CN103306936 B CN 103306936B CN 201310073415 A CN201310073415 A CN 201310073415A CN 103306936 B CN103306936 B CN 103306936B
- Authority
- CN
- China
- Prior art keywords
- gas
- compressor
- cryopump
- pressure
- pump system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000010276 construction Methods 0.000 claims abstract description 41
- 238000002360 preparation method Methods 0.000 claims abstract description 17
- 238000001816 cooling Methods 0.000 claims description 48
- 230000008929 regeneration Effects 0.000 claims description 21
- 238000011069 regeneration method Methods 0.000 claims description 21
- 239000013589 supplement Substances 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 315
- 238000010586 diagram Methods 0.000 description 10
- 230000007246 mechanism Effects 0.000 description 10
- 230000006835 compression Effects 0.000 description 9
- 238000007906 compression Methods 0.000 description 9
- 230000009471 action Effects 0.000 description 8
- 239000013256 coordination polymer Substances 0.000 description 8
- 238000011084 recovery Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 230000003139 buffering effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000005057 refrigeration Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000001172 regenerating effect Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000002309 gasification Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002594 sorbent Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B45/00—Arrangements for charging or discharging refrigerant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
- F25B2345/002—Collecting refrigerant from a cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
- F25B2345/003—Control issues for charging or collecting refrigerant to or from a cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2345/00—Details for charging or discharging refrigerants; Service stations therefor
- F25B2345/004—Details for charging or discharging refrigerants; Service stations therefor with several tanks to collect or charge a cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/05—Refrigerant levels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-050725 | 2012-03-07 | ||
| JP2012050725A JP5868224B2 (ja) | 2012-03-07 | 2012-03-07 | クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103306936A CN103306936A (zh) | 2013-09-18 |
| CN103306936B true CN103306936B (zh) | 2016-02-03 |
Family
ID=49112825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310073415.7A Active CN103306936B (zh) | 2012-03-07 | 2013-03-07 | 低温泵系统、低温泵系统的运行方法以及压缩机单元 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9480934B2 (https=) |
| JP (1) | JP5868224B2 (https=) |
| KR (1) | KR101440721B1 (https=) |
| CN (1) | CN103306936B (https=) |
| TW (1) | TWI534348B (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
| JP2015098844A (ja) | 2013-11-20 | 2015-05-28 | 住友重機械工業株式会社 | クライオポンプシステム、及びクライオポンプシステムの運転方法 |
| KR101525560B1 (ko) * | 2014-03-11 | 2015-06-03 | 주식회사 조인솔루션 | 크라이오 펌프시스템의 전력절감장치 |
| DE102014010102A1 (de) | 2014-07-08 | 2016-01-14 | Linde Aktiengesellschaft | Verfahren zur Druck- und Temperaturreglung eines Fluids in einer Serie von kryogenen Verdichtern |
| JP6410589B2 (ja) * | 2014-12-17 | 2018-10-24 | 住友重機械工業株式会社 | クライオポンプ、クライオポンプの制御方法、及び冷凍機 |
| EP3037746B1 (en) * | 2014-12-22 | 2020-08-12 | Sumitomo Heavy Industries, Ltd. | Cryocooler and operation method of cryocooler |
| US10066612B2 (en) * | 2015-07-01 | 2018-09-04 | Caterpillar Inc. | Method of operating cryogenic pump and cryogenic pump system |
| EP3325899B1 (en) * | 2015-07-20 | 2022-07-06 | Cresstec RAC IP Pty. Ltd. | A subsystem for a vapour-compression system |
| JP7201447B2 (ja) * | 2019-01-15 | 2023-01-10 | 住友重機械工業株式会社 | 極低温冷凍機の起動方法 |
| FR3100319B1 (fr) * | 2019-09-04 | 2021-08-20 | Absolut System | Machine cryogénique régénérative |
| CN111637654A (zh) * | 2020-06-11 | 2020-09-08 | 安徽万瑞冷电科技有限公司 | 应用于低温泵的变容积制冷系统、变容积方法、系统 |
| JP7544568B2 (ja) | 2020-11-09 | 2024-09-03 | 住友重機械工業株式会社 | 極低温冷凍機および極低温冷凍機の起動方法 |
| CN112413946A (zh) * | 2020-11-23 | 2021-02-26 | 珠海格力电器股份有限公司 | 冷媒回收控制方法、装置、冷媒回收设备及空调设备 |
| CN117222854A (zh) | 2021-04-30 | 2023-12-12 | 住友重机械工业株式会社 | 超低温制冷机及超低温制冷机的运行方法 |
| CN114087156A (zh) * | 2021-11-11 | 2022-02-25 | 浙江博开机电科技有限公司 | 一种低能耗低温泵系统 |
| CN118159789A (zh) | 2021-11-25 | 2024-06-07 | 住友重机械工业株式会社 | 超低温制冷机诊断系统、超低温制冷机及其诊断方法 |
| JP2024055145A (ja) * | 2022-10-06 | 2024-04-18 | 住友重機械工業株式会社 | 極低温冷凍機の運転方法および極低温冷凍機 |
| CN115479857A (zh) * | 2022-10-19 | 2022-12-16 | 毕节高新技术产业开发区国家能源大规模物理储能技术研发中心 | 预应力式超低温循环测试实验装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58143179A (ja) * | 1982-02-19 | 1983-08-25 | Jeol Ltd | クライオポンプの制御装置 |
| JPH0315676A (ja) * | 1989-06-13 | 1991-01-24 | Daikin Ind Ltd | マルチ式極低温冷凍機 |
| US6116032A (en) * | 1999-01-12 | 2000-09-12 | Applied Materials, Inc. | Method for reducing particulate generation from regeneration of cryogenic vacuum pumps |
| CN102165192A (zh) * | 2008-09-30 | 2011-08-24 | 佳能安内华股份有限公司 | 真空排气系统、真空排气系统的运转方法、冷冻机、真空排气泵、冷冻机的运转方法、两级型冷冻机的运转控制方法、低温泵的运转控制方法、两级型冷冻机、低温泵、基板处理装置和电子器件的制造方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1426986A1 (de) * | 1964-08-06 | 1969-05-29 | Max Planck Gesellschaft | Helium-Refrigerator |
| JPH08135570A (ja) * | 1994-11-11 | 1996-05-28 | Ebara Corp | クライオポンプ及びコールドトラップ |
| JPH09317640A (ja) * | 1996-05-28 | 1997-12-09 | Daikin Ind Ltd | クライオポンプ |
| JPH1137579A (ja) * | 1997-07-11 | 1999-02-12 | Zexel Corp | 冷凍装置 |
| JP2000266416A (ja) * | 1999-03-15 | 2000-09-29 | Sanyo Electric Co Ltd | 極低温冷凍装置 |
| US6530237B2 (en) * | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
| US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
| JP3754992B2 (ja) * | 2001-08-03 | 2006-03-15 | 住友重機械工業株式会社 | マルチシステム冷凍機の運転方法、装置及び冷凍装置 |
| JP4445187B2 (ja) | 2002-04-18 | 2010-04-07 | 住友重機械工業株式会社 | 極低温冷凍機 |
| US7263839B2 (en) * | 2002-10-16 | 2007-09-04 | Koninklijke Philips Electronics N.V. | Cooling device for MR apparatus |
| GB2455737B (en) * | 2007-12-19 | 2010-08-11 | Siemens Magnet Technology Ltd | Variable charge compressor |
| JP2009156220A (ja) * | 2007-12-27 | 2009-07-16 | Canon Anelva Technix Corp | クライオポンプおよびその再生方法 |
| JP4686572B2 (ja) * | 2008-05-14 | 2011-05-25 | 住友重機械工業株式会社 | クライオポンプ、真空排気システム、及びその診断方法 |
| CN102171454B (zh) * | 2008-09-30 | 2014-03-12 | 佳能安内华股份有限公司 | 真空抽吸系统、衬底处理设备、电子装置的制造方法和真空抽吸系统的操作方法 |
-
2012
- 2012-03-07 JP JP2012050725A patent/JP5868224B2/ja active Active
- 2012-12-12 TW TW101146857A patent/TWI534348B/zh active
-
2013
- 2013-03-07 KR KR1020130024658A patent/KR101440721B1/ko active Active
- 2013-03-07 CN CN201310073415.7A patent/CN103306936B/zh active Active
- 2013-03-07 US US13/788,858 patent/US9480934B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58143179A (ja) * | 1982-02-19 | 1983-08-25 | Jeol Ltd | クライオポンプの制御装置 |
| JPH0315676A (ja) * | 1989-06-13 | 1991-01-24 | Daikin Ind Ltd | マルチ式極低温冷凍機 |
| US6116032A (en) * | 1999-01-12 | 2000-09-12 | Applied Materials, Inc. | Method for reducing particulate generation from regeneration of cryogenic vacuum pumps |
| CN102165192A (zh) * | 2008-09-30 | 2011-08-24 | 佳能安内华股份有限公司 | 真空排气系统、真空排气系统的运转方法、冷冻机、真空排气泵、冷冻机的运转方法、两级型冷冻机的运转控制方法、低温泵的运转控制方法、两级型冷冻机、低温泵、基板处理装置和电子器件的制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013185480A (ja) | 2013-09-19 |
| KR20130102507A (ko) | 2013-09-17 |
| TWI534348B (zh) | 2016-05-21 |
| US20130232999A1 (en) | 2013-09-12 |
| US9480934B2 (en) | 2016-11-01 |
| TW201341662A (zh) | 2013-10-16 |
| KR101440721B1 (ko) | 2014-09-17 |
| CN103306936A (zh) | 2013-09-18 |
| JP5868224B2 (ja) | 2016-02-24 |
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| C14 | Grant of patent or utility model | ||
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