JP5850710B2 - エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ - Google Patents

エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ Download PDF

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Publication number
JP5850710B2
JP5850710B2 JP2011243971A JP2011243971A JP5850710B2 JP 5850710 B2 JP5850710 B2 JP 5850710B2 JP 2011243971 A JP2011243971 A JP 2011243971A JP 2011243971 A JP2011243971 A JP 2011243971A JP 5850710 B2 JP5850710 B2 JP 5850710B2
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JP
Japan
Prior art keywords
reflective optical
light
layer
encoder
optical scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011243971A
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English (en)
Japanese (ja)
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JP2013101007A5 (OSRAM
JP2013101007A (ja
Inventor
祐 水野
祐 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011243971A priority Critical patent/JP5850710B2/ja
Priority to US13/651,889 priority patent/US8816269B2/en
Publication of JP2013101007A publication Critical patent/JP2013101007A/ja
Publication of JP2013101007A5 publication Critical patent/JP2013101007A5/ja
Application granted granted Critical
Publication of JP5850710B2 publication Critical patent/JP5850710B2/ja
Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2011243971A 2011-11-07 2011-11-07 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ Expired - Fee Related JP5850710B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011243971A JP5850710B2 (ja) 2011-11-07 2011-11-07 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ
US13/651,889 US8816269B2 (en) 2011-11-07 2012-10-15 Reflective optical scale for encoder and reflective optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011243971A JP5850710B2 (ja) 2011-11-07 2011-11-07 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Publications (3)

Publication Number Publication Date
JP2013101007A JP2013101007A (ja) 2013-05-23
JP2013101007A5 JP2013101007A5 (OSRAM) 2014-11-13
JP5850710B2 true JP5850710B2 (ja) 2016-02-03

Family

ID=48223071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011243971A Expired - Fee Related JP5850710B2 (ja) 2011-11-07 2011-11-07 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Country Status (2)

Country Link
US (1) US8816269B2 (OSRAM)
JP (1) JP5850710B2 (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6425875B2 (ja) * 2013-06-14 2018-11-21 株式会社ミツトヨ 光電式測定器用スケール、エンコーダ及びスケールの形成方法
WO2015147756A1 (en) * 2014-03-27 2015-10-01 Heptagon Micro Optics Pte. Ltd. Optical encoder system
DE102015201230A1 (de) 2015-01-26 2016-07-28 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP6595266B2 (ja) * 2015-09-01 2019-10-23 パイオニア株式会社 光学素子及び光学素子の製造方法
US10648839B2 (en) * 2017-05-22 2020-05-12 Mitutoyo Corporation Photoelectric encoder
JP7167455B2 (ja) * 2018-03-15 2022-11-09 セイコーエプソン株式会社 エンコーダー用光学式スケールおよび光学式エンコーダー
US11355094B2 (en) * 2018-09-22 2022-06-07 BadVR, Inc. Wireless virtual display controller
JP2020024424A (ja) * 2019-09-26 2020-02-13 パイオニア株式会社 光学素子
JP2021192010A (ja) * 2020-06-05 2021-12-16 株式会社ミツトヨ スケールおよびその製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4303975A1 (de) 1993-02-11 1994-08-18 Heidenhain Gmbh Dr Johannes Teilungsträger
JPH07248207A (ja) 1994-03-10 1995-09-26 Mitsutoyo Corp 測長スケールおよびその製造方法
US6511703B2 (en) * 1997-09-29 2003-01-28 Cymer, Inc. Protective overcoat for replicated diffraction gratings
JP2004020283A (ja) 2002-06-13 2004-01-22 Mitsutoyo Corp 光電式エンコーダ及びスケールの製造方法
JP2004028862A (ja) 2002-06-27 2004-01-29 Harmonic Drive Syst Ind Co Ltd 投影型エンコーダ
TWI241932B (en) * 2003-02-21 2005-10-21 Mitsui Chemicals Inc Reflector and its applications
JP4963233B2 (ja) * 2007-01-12 2012-06-27 三菱電機株式会社 光学式エンコーダ用スケール
JP5240198B2 (ja) 2007-09-05 2013-07-17 株式会社ニコン 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ
JP2009281990A (ja) 2008-05-26 2009-12-03 Nikon Corp 光学式エンコーダのスケール及びその製造方法
JP2010181181A (ja) * 2009-02-03 2010-08-19 Canon Inc スケール、それを有する変位検出装置、及びそれを有する撮像装置

Also Published As

Publication number Publication date
US20130112860A1 (en) 2013-05-09
US8816269B2 (en) 2014-08-26
JP2013101007A (ja) 2013-05-23

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