JP2008292406A - 光電式エンコーダ - Google Patents
光電式エンコーダ Download PDFInfo
- Publication number
- JP2008292406A JP2008292406A JP2007140557A JP2007140557A JP2008292406A JP 2008292406 A JP2008292406 A JP 2008292406A JP 2007140557 A JP2007140557 A JP 2007140557A JP 2007140557 A JP2007140557 A JP 2007140557A JP 2008292406 A JP2008292406 A JP 2008292406A
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- JP
- Japan
- Prior art keywords
- scale
- protective material
- transparent protective
- photoelectric encoder
- transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000463 material Substances 0.000 claims abstract description 33
- 238000006073 displacement reaction Methods 0.000 claims abstract description 6
- 230000001681 protective effect Effects 0.000 claims description 31
- 238000003384 imaging method Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000011109 contamination Methods 0.000 abstract description 8
- 238000001514 detection method Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 230000000087 stabilizing effect Effects 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Abstract
【解決手段】相対移動するスケール(14、16、18)と結像光学系(22、24)を備え、スケールの相対変位を検出するようにされた光電式エンコーダにおいて、スケールの格子(15、17、19)側表面に、結像光学系の焦点深度(DOF)以上の厚みtを有する透明保護材(40、42)を配設する。透明保護材は、スケールの格子側表面に接着された透明テープ40又はスケールの格子側表面に塗布された透明保護材42とすることができる。透明保護材の表面が、親水性や親油性を持つことができる。
【選択図】図8
Description
14、16、18…スケール
15、17、19…格子
20…受光素子
22…レンズ
24…アパーチャ
40…透明テープ
42…透明保護材
S…汚れ
Claims (7)
- 相対移動するスケールと結像光学系を備え、スケールの相対変位を検出するようにされた光電式エンコーダにおいて、
スケールの格子側表面に、結像光学系の焦点深度以上の厚みを有する透明保護材を配設したことを特徴とする光電式エンコーダ。 - 前記透明保護材が、スケールの格子側表面に接着された透明テープであることを特徴とする請求項1に記載の光電式エンコーダ。
- 前記透明保護材が、スケールの格子側表面に塗布された透明保護材であることを特徴とする請求項1に記載の光電式エンコーダ。
- 前記透明保護材の表面が親水性を持つことを特徴とする請求項1乃至3のいずれかに記載の光電式エンコーダ。
- 前記透明保護材の表面が親油性を持つことを特徴とする請求項1乃至3のいずれかに記載の光電式エンコーダ。
- 前記透明保護材がフィルタの特性を持つことを特徴とする請求項1乃至5のいずれかに記載の光電式エンコーダ。
- 前記結像光学系が、アパーチャを含むことを特徴とする請求項1乃至7のいずれかに記載の光電式エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007140557A JP2008292406A (ja) | 2007-05-28 | 2007-05-28 | 光電式エンコーダ |
EP08156987.3A EP2000782B1 (en) | 2007-05-28 | 2008-05-27 | Photoelectric encoder |
CN2008101093510A CN101315290B (zh) | 2007-05-28 | 2008-05-28 | 光电式编码器 |
US12/128,201 US7642505B2 (en) | 2007-05-28 | 2008-05-28 | Photoelectric encoder with a transparent protective material having a thickness equal to or greater than a depth of focus of an image forming optical system disposed on the surface of a scale |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007140557A JP2008292406A (ja) | 2007-05-28 | 2007-05-28 | 光電式エンコーダ |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2008292406A true JP2008292406A (ja) | 2008-12-04 |
Family
ID=39876644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007140557A Pending JP2008292406A (ja) | 2007-05-28 | 2007-05-28 | 光電式エンコーダ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7642505B2 (ja) |
EP (1) | EP2000782B1 (ja) |
JP (1) | JP2008292406A (ja) |
CN (1) | CN101315290B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011021909A (ja) * | 2009-07-13 | 2011-02-03 | Nikon Corp | エンコーダ用スケール、及びエンコーダ装置 |
JP2012138602A (ja) * | 2008-12-03 | 2012-07-19 | Asml Netherlands Bv | リソグラフィ装置及びデバイス製造方法 |
JP2013007675A (ja) * | 2011-06-24 | 2013-01-10 | Mitsutoyo Corp | スケールの目盛保護構造 |
JP2015200677A (ja) * | 2011-10-31 | 2015-11-12 | 日本精工株式会社 | 光学スケール及び光学式エンコーダ |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6169392B2 (ja) * | 2013-03-29 | 2017-07-26 | 株式会社ミツトヨ | 光電式エンコーダ |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07198423A (ja) * | 1993-11-12 | 1995-08-01 | Dr Johannes Heidenhain Gmbh | 測長または測角装置 |
JPH11118677A (ja) * | 1997-10-14 | 1999-04-30 | Hitachi Ltd | 校正用被検査物およびその製造方法ならびに検査装置の校正方法および検査装置 |
JP2004198179A (ja) * | 2002-12-17 | 2004-07-15 | Yaskawa Electric Corp | 光学式エンコーダ |
JP2004264295A (ja) * | 2003-02-12 | 2004-09-24 | Mitsutoyo Corp | 光電式エンコーダ |
JP2005315610A (ja) * | 2004-04-27 | 2005-11-10 | Matsushita Electric Ind Co Ltd | エンコーダ装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2557967B2 (ja) | 1988-12-21 | 1996-11-27 | 株式会社 ミツトヨ | 格子干渉型変位計 |
JPH0615977B2 (ja) | 1988-12-21 | 1994-03-02 | 株式会社ミツトヨ | 格子干渉型変位計 |
JPH02176420A (ja) | 1988-12-27 | 1990-07-09 | Mitsutoyo Corp | 格子干渉型変位計及びそのスケール |
US5172250A (en) * | 1989-02-28 | 1992-12-15 | Sony Magnescale, Inc. | Hologram scale having moisture resistance |
DE19738751A1 (de) * | 1996-09-10 | 1998-03-12 | Harmonic Drive Systems | Optischer Codierer |
JP4869505B2 (ja) * | 2001-06-27 | 2012-02-08 | 株式会社ミツトヨ | エンコーダの摺動機構 |
CN100476365C (zh) * | 2003-02-12 | 2009-04-08 | 三丰株式会社 | 位移检测光电式编码器 |
-
2007
- 2007-05-28 JP JP2007140557A patent/JP2008292406A/ja active Pending
-
2008
- 2008-05-27 EP EP08156987.3A patent/EP2000782B1/en active Active
- 2008-05-28 US US12/128,201 patent/US7642505B2/en active Active
- 2008-05-28 CN CN2008101093510A patent/CN101315290B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07198423A (ja) * | 1993-11-12 | 1995-08-01 | Dr Johannes Heidenhain Gmbh | 測長または測角装置 |
JPH11118677A (ja) * | 1997-10-14 | 1999-04-30 | Hitachi Ltd | 校正用被検査物およびその製造方法ならびに検査装置の校正方法および検査装置 |
JP2004198179A (ja) * | 2002-12-17 | 2004-07-15 | Yaskawa Electric Corp | 光学式エンコーダ |
JP2004264295A (ja) * | 2003-02-12 | 2004-09-24 | Mitsutoyo Corp | 光電式エンコーダ |
JP2005315610A (ja) * | 2004-04-27 | 2005-11-10 | Matsushita Electric Ind Co Ltd | エンコーダ装置 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012138602A (ja) * | 2008-12-03 | 2012-07-19 | Asml Netherlands Bv | リソグラフィ装置及びデバイス製造方法 |
US10197927B2 (en) | 2008-12-03 | 2019-02-05 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or grating |
US10866530B2 (en) | 2008-12-03 | 2020-12-15 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US11609504B2 (en) | 2008-12-03 | 2023-03-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2011021909A (ja) * | 2009-07-13 | 2011-02-03 | Nikon Corp | エンコーダ用スケール、及びエンコーダ装置 |
JP2013007675A (ja) * | 2011-06-24 | 2013-01-10 | Mitsutoyo Corp | スケールの目盛保護構造 |
JP2015200677A (ja) * | 2011-10-31 | 2015-11-12 | 日本精工株式会社 | 光学スケール及び光学式エンコーダ |
US9410858B2 (en) | 2011-10-31 | 2016-08-09 | Nsk Ltd. | Optical scale having wires, method for manufacturing optical scale having wires,and optical encode |
Also Published As
Publication number | Publication date |
---|---|
CN101315290A (zh) | 2008-12-03 |
EP2000782A2 (en) | 2008-12-10 |
US20080302953A1 (en) | 2008-12-11 |
CN101315290B (zh) | 2011-12-21 |
EP2000782A3 (en) | 2011-10-05 |
EP2000782B1 (en) | 2016-02-17 |
US7642505B2 (en) | 2010-01-05 |
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