JP5562202B2 - 光電式エンコーダ - Google Patents
光電式エンコーダ Download PDFInfo
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- JP5562202B2 JP5562202B2 JP2010237941A JP2010237941A JP5562202B2 JP 5562202 B2 JP5562202 B2 JP 5562202B2 JP 2010237941 A JP2010237941 A JP 2010237941A JP 2010237941 A JP2010237941 A JP 2010237941A JP 5562202 B2 JP5562202 B2 JP 5562202B2
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- light
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- imaging
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- 230000003287 optical effect Effects 0.000 claims description 147
- 238000003384 imaging method Methods 0.000 claims description 66
- 238000001514 detection method Methods 0.000 claims description 6
- 230000004907 flux Effects 0.000 claims description 6
- 238000005286 illumination Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000000052 comparative effect Effects 0.000 description 57
- 238000005259 measurement Methods 0.000 description 19
- 238000010586 diagram Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 230000008859 change Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Description
NAlight=0、NAlight<NAopt (2)
MTF=Aout/Ain (3)
fc1=NAopt/λ (3)
Sf1<fc1<Sf2 (5)
2*λ*fb*Sf1<d1<2*λ*fb*Sf2 (6)
1.32mm<d1<2.64mm (7)
1.32mm<d2<2.64mm (8)
NAlight>NAopt (10)
θ3>φ3 (11)
fc3=2*NAopt/λ (12)
Sf1<fc3<Sf2 (13)
λ*fb*Sf1<d3<λ*fb*Sf2 (14)
0.66mm<d3<1.32mm (15)
0.033<NAopt<0.066 (16)
θ4>φ4 (17)
λ*fb*Sf1<d4<λ*fb*Sf2 (18)
θ4UP=θ4−2*δθ>φ4
θ4>φ4+2*δθ (19)
D4>2*fa*sin(φ4+2*δθ) (20)
D4>2fa*0.065 (21)
D4>2fa*0.061 (22)
NAopt=d5/(2*(a5−fcc)) (23)
NAopt=d6/(2*a6) (24)
が可能なことはいうまでもない。
102〜802…光源
104〜804…コリメータレンズ
106〜806…スケール
108〜408、808…スケール基材
110〜810…光学格子
114〜514…片側テレセントリック光学系
116〜416、520、616、620、816…結像レンズ
118〜718…開口板
118A〜718A…開口
122〜822…受光素子
212、412…ハーフミラー
614…両側テレセントリック光学系
Claims (8)
- 光源から出射された光を、スケールに設けられた一定間隔の光学格子で変調させて、該変調された光を受光素子で検出する光電式エンコーダにおいて、
前記光源から出射した光を前記スケールに照射する照射光学系と、前記光学格子で変調された光を結像する結像光学系と、を備え、
該照射光学系では、前記結像光学系の光軸に対して前記スケールの配置誤差がないと仮定した状態における前記光源から該照射光学系までの距離と、該光源の大きさと、に基づく仮想光源側開口数が規定され、
前記結像光学系では、前記光学格子から該結像光学系までの距離と、該光学格子の基本空間周波数と該基本空間周波数の2倍高調波との間の値を取る遮断空間周波数を透過させる開口の大きさと、に基づく検出側開口数が規定され、
前記仮想光源側開口数に対応して求められる該スケールに入射する光の広がり角度である仮想光源側光束角度から、該スケールの配置誤差で生じる誤差角度を減算し、求められる光源側光束角度に対応する光源側開口数が、前記検出側開口数よりも大きくされていることを特徴とする光電式エンコーダ。 - 前記遮断空間周波数は前記検出側開口数を2倍して前記光の波長で除した値であることを特徴とする請求項1に記載の光電式エンコーダ。
- 前記照射光学系は、前記光源から出射された光の一部を透過させる前段開口が設けられた前段開口板、又は該光を屈折させる照明レンズを備えることを特徴とする請求項1または2に記載の光電式エンコーダ。
- 前記光源は前記スケールに対して前記結像光学系と同じ側に配置され、該結像光学系は該スケールで反射された光を結像することを特徴とする請求項1乃至3のいずれかに記載の光電式エンコーダ。
- 前記結像光学系は、前記開口が設けられた開口板を備えることを特徴とする請求項1乃至4のいずれかに記載の光電式エンコーダ。
- 前記結像光学系は、前記光学格子で変調された光を屈折させる結像レンズを備えることを特徴とする請求項1乃至5のいずれかに記載の光電式エンコーダ。
- 前記結像光学系は、光軸上の1つの前記結像レンズの焦点位置に1つの前記開口板の開口を配置させる片側テレセントリック光学系とされていることを特徴とする請求項6に記載の光電式エンコーダ。
- 前記結像光学系は、光軸上の2つの前記結像レンズの間の焦点位置に1つの前記開口板の開口を配置させる両側テレセントリック光学系とされていることを特徴とする請求項6に記載の光電式エンコーダ。
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JP2010237941A JP5562202B2 (ja) | 2009-10-23 | 2010-10-22 | 光電式エンコーダ |
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JP2009244121 | 2009-10-23 | ||
JP2009244121 | 2009-10-23 | ||
JP2010237941A JP5562202B2 (ja) | 2009-10-23 | 2010-10-22 | 光電式エンコーダ |
Publications (2)
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JP2011107131A JP2011107131A (ja) | 2011-06-02 |
JP5562202B2 true JP5562202B2 (ja) | 2014-07-30 |
Family
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JP2010237941A Active JP5562202B2 (ja) | 2009-10-23 | 2010-10-22 | 光電式エンコーダ |
Country Status (4)
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US (1) | US8658964B2 (ja) |
EP (1) | EP2314990B1 (ja) |
JP (1) | JP5562202B2 (ja) |
CN (1) | CN102168995B (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9080899B2 (en) | 2011-12-23 | 2015-07-14 | Mitutoyo Corporation | Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch |
US9018578B2 (en) | 2011-12-23 | 2015-04-28 | Mitutoyo Corporation | Adaptable resolution optical encoder having structured illumination and spatial filtering |
US8941052B2 (en) * | 2011-12-23 | 2015-01-27 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
US9029757B2 (en) | 2011-12-23 | 2015-05-12 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
JP5420049B1 (ja) * | 2012-10-31 | 2014-02-19 | Eizo株式会社 | 拡大率推定装置またはその方法 |
JP6386337B2 (ja) * | 2014-10-23 | 2018-09-05 | 株式会社ミツトヨ | 光学式エンコーダ |
CN104656173B (zh) * | 2015-02-09 | 2017-05-03 | 浙江大学 | 一种基于光通量约束的随机编码混合光栅 |
JP6883939B2 (ja) * | 2015-09-14 | 2021-06-09 | 株式会社ミツトヨ | 光電式エンコーダ |
JP6634249B2 (ja) * | 2015-09-14 | 2020-01-22 | 株式会社ミツトヨ | 絶対位置検出型光電式エンコーダ |
US10302466B2 (en) * | 2017-06-29 | 2019-05-28 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration including first and second illumination source diffraction gratings arranged in first and second parallel planes for providing displacement signals |
TWI675187B (zh) * | 2017-12-19 | 2019-10-21 | 財團法人工業技術研究院 | 光學編碼器 |
DE102018251727A1 (de) * | 2017-12-29 | 2019-07-04 | Mitutoyo Corporation | Verschmutzungs- und defektbeständige optische Drehpositionsgeberkonfiguration zum Bereitstellen von Verschiebungssignalen |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2210525B (en) * | 1987-09-30 | 1991-11-20 | Okuma Machinery Works Ltd | Optical encoder |
JP3301249B2 (ja) * | 1995-01-26 | 2002-07-15 | 株式会社ニコン | 反射用光学素子及びその製造方法 |
JP3743426B2 (ja) * | 2002-02-13 | 2006-02-08 | オムロン株式会社 | 光学式エンコーダ |
US6906315B2 (en) | 2002-07-16 | 2005-06-14 | Mitutoyo Corporation | High accuracy miniature grating encoder readhead using fiber optic receiver channels |
US7186969B2 (en) * | 2003-02-12 | 2007-03-06 | Mitutoyo Corporation | Optical configuration for imaging-type optical encoders |
JP4398744B2 (ja) | 2003-02-12 | 2010-01-13 | 株式会社ミツトヨ | 光電式エンコーダ |
US7075097B2 (en) * | 2004-03-25 | 2006-07-11 | Mitutoyo Corporation | Optical path array and angular filter for translation and orientation sensing |
JP2007248302A (ja) * | 2006-03-16 | 2007-09-27 | Mitsutoyo Corp | 光電式インクリメンタル型エンコーダ |
JP5112797B2 (ja) * | 2007-09-14 | 2013-01-09 | 株式会社ミツトヨ | 光電式インクリメンタル型エンコーダ |
-
2010
- 2010-10-21 US US12/909,079 patent/US8658964B2/en active Active
- 2010-10-21 EP EP10013859.3A patent/EP2314990B1/en active Active
- 2010-10-22 JP JP2010237941A patent/JP5562202B2/ja active Active
- 2010-10-25 CN CN201010609395.7A patent/CN102168995B/zh active Active
Also Published As
Publication number | Publication date |
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EP2314990A1 (en) | 2011-04-27 |
JP2011107131A (ja) | 2011-06-02 |
US20110095171A1 (en) | 2011-04-28 |
CN102168995B (zh) | 2015-03-25 |
EP2314990B1 (en) | 2014-05-14 |
US8658964B2 (en) | 2014-02-25 |
CN102168995A (zh) | 2011-08-31 |
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