JP5839935B2 - 荷電粒子ビーム・システム用の環境セル - Google Patents

荷電粒子ビーム・システム用の環境セル Download PDF

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Publication number
JP5839935B2
JP5839935B2 JP2011237151A JP2011237151A JP5839935B2 JP 5839935 B2 JP5839935 B2 JP 5839935B2 JP 2011237151 A JP2011237151 A JP 2011237151A JP 2011237151 A JP2011237151 A JP 2011237151A JP 5839935 B2 JP5839935 B2 JP 5839935B2
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Prior art keywords
cell
sample
charged particle
gas
particle beam
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Expired - Fee Related
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JP2011237151A
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Japanese (ja)
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JP2012104478A5 (enExample
JP2012104478A (ja
Inventor
リボ・ノヴァク
マレク・ウンチョフスキー
ミロス・トス
マルティン・チャフォウレク
ウィリアム・パーカー
マーカス・ストロー
マーク・エマーソン
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エフ・イ−・アイ・カンパニー
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/024—Moving components not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001—Maintaining constant desired temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2011237151A 2010-11-09 2011-10-28 荷電粒子ビーム・システム用の環境セル Expired - Fee Related JP5839935B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/942,201 2010-11-09
US12/942,201 US9679741B2 (en) 2010-11-09 2010-11-09 Environmental cell for charged particle beam system

Related Child Applications (1)

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JP2015220540A Division JP6329523B2 (ja) 2010-11-09 2015-11-10 荷電粒子ビーム・システム用の環境セル

Publications (3)

Publication Number Publication Date
JP2012104478A JP2012104478A (ja) 2012-05-31
JP2012104478A5 JP2012104478A5 (enExample) 2014-12-11
JP5839935B2 true JP5839935B2 (ja) 2016-01-06

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JP2011237151A Expired - Fee Related JP5839935B2 (ja) 2010-11-09 2011-10-28 荷電粒子ビーム・システム用の環境セル
JP2015220540A Active JP6329523B2 (ja) 2010-11-09 2015-11-10 荷電粒子ビーム・システム用の環境セル

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US (1) US9679741B2 (enExample)
EP (2) EP2450935B1 (enExample)
JP (2) JP5839935B2 (enExample)
CN (1) CN102543639B (enExample)

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Also Published As

Publication number Publication date
EP2450934A3 (en) 2013-01-23
CN102543639A (zh) 2012-07-04
JP6329523B2 (ja) 2018-05-23
EP2450934B1 (en) 2016-04-20
US9679741B2 (en) 2017-06-13
EP2450934A2 (en) 2012-05-09
JP2012104478A (ja) 2012-05-31
EP2450935A2 (en) 2012-05-09
CN102543639B (zh) 2017-03-01
JP2016054155A (ja) 2016-04-14
US20120112062A1 (en) 2012-05-10
EP2450935B1 (en) 2014-01-08
EP2450935A3 (en) 2013-01-23

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