JP2012104478A5 - - Google Patents

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JP2012104478A5
JP2012104478A5 JP2011237151A JP2011237151A JP2012104478A5 JP 2012104478 A5 JP2012104478 A5 JP 2012104478A5 JP 2011237151 A JP2011237151 A JP 2011237151A JP 2011237151 A JP2011237151 A JP 2011237151A JP 2012104478 A5 JP2012104478 A5 JP 2012104478A5
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sample
charged particle
cell
particle beam
beam system
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JP2011237151A
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JP5839935B2 (ja
JP2012104478A (ja
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Priority claimed from US12/942,201 external-priority patent/US9679741B2/en
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JP2011237151A 2010-11-09 2011-10-28 荷電粒子ビーム・システム用の環境セル Expired - Fee Related JP5839935B2 (ja)

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Application Number Priority Date Filing Date Title
US12/942,201 2010-11-09
US12/942,201 US9679741B2 (en) 2010-11-09 2010-11-09 Environmental cell for charged particle beam system

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JP2015220540A Division JP6329523B2 (ja) 2010-11-09 2015-11-10 荷電粒子ビーム・システム用の環境セル

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JP2012104478A JP2012104478A (ja) 2012-05-31
JP2012104478A5 true JP2012104478A5 (enExample) 2014-12-11
JP5839935B2 JP5839935B2 (ja) 2016-01-06

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JP2011237151A Expired - Fee Related JP5839935B2 (ja) 2010-11-09 2011-10-28 荷電粒子ビーム・システム用の環境セル
JP2015220540A Active JP6329523B2 (ja) 2010-11-09 2015-11-10 荷電粒子ビーム・システム用の環境セル

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US (1) US9679741B2 (enExample)
EP (2) EP2450935B1 (enExample)
JP (2) JP5839935B2 (enExample)
CN (1) CN102543639B (enExample)

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