JP5814934B2 - ポンプ - Google Patents

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Publication number
JP5814934B2
JP5814934B2 JP2012545437A JP2012545437A JP5814934B2 JP 5814934 B2 JP5814934 B2 JP 5814934B2 JP 2012545437 A JP2012545437 A JP 2012545437A JP 2012545437 A JP2012545437 A JP 2012545437A JP 5814934 B2 JP5814934 B2 JP 5814934B2
Authority
JP
Japan
Prior art keywords
lubrication chamber
pressure
gas
purge
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012545437A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013515899A (ja
JP2013515899A5 (https=
Inventor
フィリップ ジョン スティーブンス
フィリップ ジョン スティーブンス
イアン ディヴィッド ストーンズ
イアン ディヴィッド ストーンズ
マルコム ウィリアム グレイ
マルコム ウィリアム グレイ
ポール ディヴィッド ネラー
ポール ディヴィッド ネラー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of JP2013515899A publication Critical patent/JP2013515899A/ja
Publication of JP2013515899A5 publication Critical patent/JP2013515899A5/ja
Application granted granted Critical
Publication of JP5814934B2 publication Critical patent/JP5814934B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2012545437A 2009-12-24 2010-11-23 ポンプ Active JP5814934B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0922564.0A GB0922564D0 (en) 2009-12-24 2009-12-24 Pump
GB0922564.0 2009-12-24
PCT/GB2010/051946 WO2011077105A2 (en) 2009-12-24 2010-11-23 Pump

Publications (3)

Publication Number Publication Date
JP2013515899A JP2013515899A (ja) 2013-05-09
JP2013515899A5 JP2013515899A5 (https=) 2014-01-16
JP5814934B2 true JP5814934B2 (ja) 2015-11-17

Family

ID=41716909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012545437A Active JP5814934B2 (ja) 2009-12-24 2010-11-23 ポンプ

Country Status (8)

Country Link
US (1) US9334863B2 (https=)
EP (1) EP2516863B1 (https=)
JP (1) JP5814934B2 (https=)
KR (1) KR101810703B1 (https=)
CN (1) CN102762867B (https=)
GB (1) GB0922564D0 (https=)
TW (1) TWI564484B (https=)
WO (1) WO2011077105A2 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007446B (zh) * 2014-06-12 2016-07-06 北京华航无线电测量研究所 一种共形结构气路防回流吹扫装置
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe
JP2018096337A (ja) * 2016-12-16 2018-06-21 株式会社アンレット ルーツブロワ
GB2561190A (en) * 2017-04-04 2018-10-10 Edwards Ltd Purge gas feeding means, abatement systems and methods of modifying abatement systems
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
FR3079886B1 (fr) * 2018-04-05 2020-04-24 Pfeiffer Vacuum Pompe a vide de type seche
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
FR3097599B1 (fr) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
FR3105313B1 (fr) * 2019-12-18 2021-12-31 Pfeiffer Vacuum Pompe à vide et procédé d’injection d’un gaz de purge
CN112077813B (zh) * 2020-09-10 2024-10-29 北京通嘉宏瑞科技有限公司 一种便于维修真空泵的分类置物架及其使用方法
FR3119209B1 (fr) * 2021-01-25 2023-03-31 Pfeiffer Vacuum Pompe à vide de type sèche et groupe de pompage
US12376665B2 (en) 2021-10-14 2025-08-05 Kozhya LLC Sp. z o.o. Dermal spray apparatus with disposable cartrdige and method
KR102612899B1 (ko) 2023-06-29 2023-12-13 프로인주식회사 용적 이송식 건식 펌프

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8809621D0 (en) 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
DE59200391D1 (de) * 1991-03-04 1994-09-22 Leybold Ag Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.
DE19709206A1 (de) 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe
US6612820B1 (en) 1999-01-11 2003-09-02 David Garrett Staat Screw compressor having sealed low and high pressure bearing chambers
JP2001304115A (ja) 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
US7134668B2 (en) * 2001-10-24 2006-11-14 Ebara Corporation Differential pumping seal apparatus
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ
EP1681469A1 (en) 2003-10-21 2006-07-19 Nabtesco Corporation Rotary dry vacuum pump
US8679287B2 (en) 2005-05-23 2014-03-25 Mks Instruments, Inc. Method and apparatus for preventing ALD reactants from damaging vacuum pumps
GB0519742D0 (en) 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas

Also Published As

Publication number Publication date
KR101810703B1 (ko) 2018-01-25
GB0922564D0 (en) 2010-02-10
US9334863B2 (en) 2016-05-10
EP2516863A2 (en) 2012-10-31
TW201139854A (en) 2011-11-16
US20120251368A1 (en) 2012-10-04
JP2013515899A (ja) 2013-05-09
TWI564484B (zh) 2017-01-01
KR20120127576A (ko) 2012-11-22
EP2516863B1 (en) 2018-10-10
CN102762867B (zh) 2015-12-09
WO2011077105A3 (en) 2012-07-12
WO2011077105A2 (en) 2011-06-30
CN102762867A (zh) 2012-10-31

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