CN102762867B - 具有吹扫气体系统的干式真空泵和吹扫方法 - Google Patents

具有吹扫气体系统的干式真空泵和吹扫方法 Download PDF

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Publication number
CN102762867B
CN102762867B CN201080058543.9A CN201080058543A CN102762867B CN 102762867 B CN102762867 B CN 102762867B CN 201080058543 A CN201080058543 A CN 201080058543A CN 102762867 B CN102762867 B CN 102762867B
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CN
China
Prior art keywords
pressure
lubricating chamber
port
high vacuum
gas
Prior art date
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Active
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CN201080058543.9A
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English (en)
Chinese (zh)
Other versions
CN102762867A (zh
Inventor
P.J.斯蒂芬斯
I.D.斯通斯
M.W.格雷
P.D.内勒
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BOC Group Ltd
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BOC Group Ltd
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Publication date
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Publication of CN102762867A publication Critical patent/CN102762867A/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CN201080058543.9A 2009-12-24 2010-11-23 具有吹扫气体系统的干式真空泵和吹扫方法 Active CN102762867B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0922564.0A GB0922564D0 (en) 2009-12-24 2009-12-24 Pump
GB0922564.0 2009-12-24
PCT/GB2010/051946 WO2011077105A2 (en) 2009-12-24 2010-11-23 Pump

Publications (2)

Publication Number Publication Date
CN102762867A CN102762867A (zh) 2012-10-31
CN102762867B true CN102762867B (zh) 2015-12-09

Family

ID=41716909

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080058543.9A Active CN102762867B (zh) 2009-12-24 2010-11-23 具有吹扫气体系统的干式真空泵和吹扫方法

Country Status (8)

Country Link
US (1) US9334863B2 (https=)
EP (1) EP2516863B1 (https=)
JP (1) JP5814934B2 (https=)
KR (1) KR101810703B1 (https=)
CN (1) CN102762867B (https=)
GB (1) GB0922564D0 (https=)
TW (1) TWI564484B (https=)
WO (1) WO2011077105A2 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007446B (zh) * 2014-06-12 2016-07-06 北京华航无线电测量研究所 一种共形结构气路防回流吹扫装置
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe
JP2018096337A (ja) * 2016-12-16 2018-06-21 株式会社アンレット ルーツブロワ
GB2561190A (en) * 2017-04-04 2018-10-10 Edwards Ltd Purge gas feeding means, abatement systems and methods of modifying abatement systems
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
FR3079886B1 (fr) * 2018-04-05 2020-04-24 Pfeiffer Vacuum Pompe a vide de type seche
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
FR3097599B1 (fr) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
FR3105313B1 (fr) * 2019-12-18 2021-12-31 Pfeiffer Vacuum Pompe à vide et procédé d’injection d’un gaz de purge
CN112077813B (zh) * 2020-09-10 2024-10-29 北京通嘉宏瑞科技有限公司 一种便于维修真空泵的分类置物架及其使用方法
FR3119209B1 (fr) * 2021-01-25 2023-03-31 Pfeiffer Vacuum Pompe à vide de type sèche et groupe de pompage
US12376665B2 (en) 2021-10-14 2025-08-05 Kozhya LLC Sp. z o.o. Dermal spray apparatus with disposable cartrdige and method
KR102612899B1 (ko) 2023-06-29 2023-12-13 프로인주식회사 용적 이송식 건식 펌프

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01315682A (ja) * 1988-04-22 1989-12-20 Boc Group Plc:The 真空ポンプ
EP0365695A1 (de) * 1988-10-24 1990-05-02 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas
CN1243563A (zh) * 1997-03-06 2000-02-02 莱博尔德真空技术有限责任公司 真空泵
EP1150015A2 (en) * 2000-04-26 2001-10-31 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Vacuum pump
CN1871436A (zh) * 2003-10-21 2006-11-29 纳博特斯克株式会社 旋转式干式真空泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6612820B1 (en) 1999-01-11 2003-09-02 David Garrett Staat Screw compressor having sealed low and high pressure bearing chambers
US7134668B2 (en) * 2001-10-24 2006-11-14 Ebara Corporation Differential pumping seal apparatus
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ
US8679287B2 (en) 2005-05-23 2014-03-25 Mks Instruments, Inc. Method and apparatus for preventing ALD reactants from damaging vacuum pumps
GB0519742D0 (en) 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01315682A (ja) * 1988-04-22 1989-12-20 Boc Group Plc:The 真空ポンプ
EP0365695A1 (de) * 1988-10-24 1990-05-02 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas
CN1243563A (zh) * 1997-03-06 2000-02-02 莱博尔德真空技术有限责任公司 真空泵
EP1150015A2 (en) * 2000-04-26 2001-10-31 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Vacuum pump
CN1871436A (zh) * 2003-10-21 2006-11-29 纳博特斯克株式会社 旋转式干式真空泵

Also Published As

Publication number Publication date
KR101810703B1 (ko) 2018-01-25
GB0922564D0 (en) 2010-02-10
US9334863B2 (en) 2016-05-10
EP2516863A2 (en) 2012-10-31
TW201139854A (en) 2011-11-16
US20120251368A1 (en) 2012-10-04
JP2013515899A (ja) 2013-05-09
TWI564484B (zh) 2017-01-01
KR20120127576A (ko) 2012-11-22
EP2516863B1 (en) 2018-10-10
JP5814934B2 (ja) 2015-11-17
WO2011077105A3 (en) 2012-07-12
WO2011077105A2 (en) 2011-06-30
CN102762867A (zh) 2012-10-31

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