WO2011077105A3 - Dry vacuum pump with purge gas system and method of purging - Google Patents

Dry vacuum pump with purge gas system and method of purging Download PDF

Info

Publication number
WO2011077105A3
WO2011077105A3 PCT/GB2010/051946 GB2010051946W WO2011077105A3 WO 2011077105 A3 WO2011077105 A3 WO 2011077105A3 GB 2010051946 W GB2010051946 W GB 2010051946W WO 2011077105 A3 WO2011077105 A3 WO 2011077105A3
Authority
WO
WIPO (PCT)
Prior art keywords
stage
lubrication chamber
inter
purge gas
pumping
Prior art date
Application number
PCT/GB2010/051946
Other languages
French (fr)
Other versions
WO2011077105A2 (en
Inventor
Philip John Stephens
Ian David Stones
Malcolm William Gray
Paul David Neller
Original Assignee
Edwards Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Limited filed Critical Edwards Limited
Priority to EP10785500.9A priority Critical patent/EP2516863B1/en
Priority to KR1020127016175A priority patent/KR101810703B1/en
Priority to CN201080058543.9A priority patent/CN102762867B/en
Priority to JP2012545437A priority patent/JP5814934B2/en
Priority to US13/514,203 priority patent/US9334863B2/en
Publication of WO2011077105A2 publication Critical patent/WO2011077105A2/en
Publication of WO2011077105A3 publication Critical patent/WO2011077105A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The present invention provides a positive displacement dry pump comprising: a plurality of vacuum pumping stages comprising a respective plurality of pumping mechanisms driven by one or more drive shafts for pumping fluid in series through the pumping stages from a pump inlet at the high vacuum stage to a pump outlet at the low vacuum stage; a lubrication chamber housing a bearing assembly for supporting the drive shaft for rotational movement, the drive shaft extending from the high vacuum stage to the lubrication chamber through an opening of a head plate of the lubrication chamber; an inter-stage purge port through which gas can enter the pump at an inter-stage location downstream of the high vacuum stage and pass only through the or each vacuum pumping stage downstream of the inter-stage port; a lubrication chamber purge port located in the lubrication chamber through which purge gas can flow from a source of purge gas; wherein the inter-stage port is connected to the lubrication chamber for controlling the pressure of purge gas in the lubrication chamber thereby resisting the passage of pumped gases from the high vacuum chamber to the lubrication chamber through the opening of the head plate during use.
PCT/GB2010/051946 2009-12-24 2010-11-23 Pump WO2011077105A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP10785500.9A EP2516863B1 (en) 2009-12-24 2010-11-23 Dry vacuum pump with purge gas system and method of purging
KR1020127016175A KR101810703B1 (en) 2009-12-24 2010-11-23 Dry vacuum pump with purge gas system and method of purging
CN201080058543.9A CN102762867B (en) 2009-12-24 2010-11-23 There is dry vacuum pump and the blowing method of purge gas system
JP2012545437A JP5814934B2 (en) 2009-12-24 2010-11-23 pump
US13/514,203 US9334863B2 (en) 2009-12-24 2010-11-23 Pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0922564.0 2009-12-24
GBGB0922564.0A GB0922564D0 (en) 2009-12-24 2009-12-24 Pump

Publications (2)

Publication Number Publication Date
WO2011077105A2 WO2011077105A2 (en) 2011-06-30
WO2011077105A3 true WO2011077105A3 (en) 2012-07-12

Family

ID=41716909

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2010/051946 WO2011077105A2 (en) 2009-12-24 2010-11-23 Pump

Country Status (8)

Country Link
US (1) US9334863B2 (en)
EP (1) EP2516863B1 (en)
JP (1) JP5814934B2 (en)
KR (1) KR101810703B1 (en)
CN (1) CN102762867B (en)
GB (1) GB0922564D0 (en)
TW (1) TWI564484B (en)
WO (1) WO2011077105A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007446B (en) * 2014-06-12 2016-07-06 北京华航无线电测量研究所 A kind of conformal structure gas circuit anti-return blow device
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202015007606U1 (en) * 2015-11-03 2017-02-06 Leybold Gmbh Dry vacuum pump
JP2018096337A (en) * 2016-12-16 2018-06-21 株式会社アンレット Root blower
GB2561190A (en) * 2017-04-04 2018-10-10 Edwards Ltd Purge gas feeding means, abatement systems and methods of modifying abatement systems
FR3065040B1 (en) * 2017-04-07 2019-06-21 Pfeiffer Vacuum PUMPING GROUP AND USE
FR3079886B1 (en) * 2018-04-05 2020-04-24 Pfeiffer Vacuum DRY TYPE VACUUM PUMP
FR3086705B1 (en) * 2018-09-27 2020-10-23 Pfeiffer Vacuum DRY TYPE PRIMARY VACUUM PUMP AND PROCESS FOR CONTROL OF THE INJECTION OF A PURGE GAS
FR3092879B1 (en) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Dry type primary vacuum pump
FR3097599B1 (en) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Dry-type primary vacuum pump and method of controlling the injection of a purge gas
FR3098869B1 (en) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Pumping group
FR3105313B1 (en) * 2019-12-18 2021-12-31 Pfeiffer Vacuum Vacuum pump and method for injecting purge gas
CN112077813B (en) * 2020-09-10 2024-10-29 北京通嘉宏瑞科技有限公司 Classified storage rack convenient for maintaining vacuum pump and use method thereof
KR102612899B1 (en) 2023-06-29 2023-12-13 프로인주식회사 positive displacement dry pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0338764A2 (en) * 1988-04-22 1989-10-25 The BOC Group plc Vacuum pumps
US5046934A (en) * 1988-10-24 1991-09-10 Leybold Aktiengesellschaft Twin shaft vacuum pump with purge gas inlet
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas
EP1150015A2 (en) * 2000-04-26 2001-10-31 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Vacuum pump
US20090269231A1 (en) * 2005-09-28 2009-10-29 Edwards Limited Method of Pumping Gas

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19709206A1 (en) 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vacuum pump
BR0008357A (en) 1999-01-11 2001-11-27 Du Pont Lubrication and sealing method and apparatus for windings and gears
US7134668B2 (en) * 2001-10-24 2006-11-14 Ebara Corporation Differential pumping seal apparatus
JP4232505B2 (en) 2003-03-27 2009-03-04 アイシン精機株式会社 Vacuum pump
EP1681469A1 (en) 2003-10-21 2006-07-19 Nabtesco Corporation Rotary dry vacuum pump
US8679287B2 (en) 2005-05-23 2014-03-25 Mks Instruments, Inc. Method and apparatus for preventing ALD reactants from damaging vacuum pumps

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0338764A2 (en) * 1988-04-22 1989-10-25 The BOC Group plc Vacuum pumps
US5046934A (en) * 1988-10-24 1991-09-10 Leybold Aktiengesellschaft Twin shaft vacuum pump with purge gas inlet
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas
EP1150015A2 (en) * 2000-04-26 2001-10-31 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Vacuum pump
US20090269231A1 (en) * 2005-09-28 2009-10-29 Edwards Limited Method of Pumping Gas

Also Published As

Publication number Publication date
GB0922564D0 (en) 2010-02-10
CN102762867A (en) 2012-10-31
US9334863B2 (en) 2016-05-10
TWI564484B (en) 2017-01-01
EP2516863B1 (en) 2018-10-10
KR101810703B1 (en) 2018-01-25
US20120251368A1 (en) 2012-10-04
WO2011077105A2 (en) 2011-06-30
TW201139854A (en) 2011-11-16
KR20120127576A (en) 2012-11-22
CN102762867B (en) 2015-12-09
JP2013515899A (en) 2013-05-09
EP2516863A2 (en) 2012-10-31
JP5814934B2 (en) 2015-11-17

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