CN104612968A - A two-stage vortex dry vacuum pump - Google Patents
A two-stage vortex dry vacuum pump Download PDFInfo
- Publication number
- CN104612968A CN104612968A CN201410804998.0A CN201410804998A CN104612968A CN 104612968 A CN104612968 A CN 104612968A CN 201410804998 A CN201410804998 A CN 201410804998A CN 104612968 A CN104612968 A CN 104612968A
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- CN
- China
- Prior art keywords
- vortex
- outer circumferential
- active chamber
- price fixing
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000002146 bilateral effect Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 3
- 230000006835 compression Effects 0.000 abstract description 15
- 238000007906 compression Methods 0.000 abstract description 15
- 238000007599 discharging Methods 0.000 abstract 2
- 238000003466 welding Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 9
- 238000005086 pumping Methods 0.000 description 5
- 210000000078 claw Anatomy 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000003889 chemical engineering Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
A two-stage vortex dry vacuum pump is disclosed. The outer circumferential side of a first vortex working cavity is communicated with an air inlet in a left vortex fixed disc. At least one airflow channel is disposed along the radial direction in a vortex moving disc. One end of each airflow channel is communicated with the center side of the first vortex working cavity, and the other end is communicated with the outer circumferential side of a second vortex working cavity. The center side of the second vortex working cavity is communicated with an air discharging channel and an air discharging port in a right vortex fixed disc. The outer circumferential side of the vortex moving disc and the outer circumferential side of the right vortex fixed disc are hermetically connected through a corrugated pipe. The outer circumferential side of the first vortex working cavity and the outer circumferential side of the second vortex working cavity are sealed and separated by the corrugated pipe. The corrugated pipe, the vortex moving disc and the right vortex fixed disc are connected through flanges or welding. The two-stage vortex dry vacuum pump breaks the limitation on the compression ratio and the final vacuum of two-side vortex dry vacuum pumps at present, and increases the compression ratio and the final vacuum of the vacuum pump by two-stage continuous compression of the two vortex working cavities connected in series.
Description
Technical field
The invention belongs to dry vacuum pump technical field, particularly relate to a kind of twin-stage vortex dry vacuum pump.
Background technique
Dry vacuum pump refers generally to be pressed onto 10 at air
-2pa and following operate in pressure ranges, not use any oils and liquid in runner and can continuously directly to the vacuum pump of atmospheric exhaust bleeding.Under the drive of the industry such as semiconductor industry, chemical engineering, dry vacuum pump development is swift and violent, and at present, dry vacuum pump has developed numerous species, comprises multistage claw, multi-stage roots formula, Roots+claw type combined type, screw type and eddy type etc.
Wherein, eddy type and vortex dry vacuum pump develop from scroll compressor, belong to vacuum displacement pump, due to vortex dry vacuum pump there is clean, reliable performance wide without oil, range of working pressure, torque change is little and adapt to the features such as severe operating conditions ability is strong, is therefore able to extensive use.Up to now, the research and production of vortex dry vacuum pump mainly concentrates on the minority producer of the states such as Germany, the U.S. and Japan, but in recent years, domestic vortex dry vacuum pump technology also achieves larger progress and development.
No matter be domestic or external, current the most widely used vortex dry vacuum pump is bilateral vortex dry vacuum pump, it can be divided into two kinds substantially, a kind of is that the vortex active chamber of vacuum pump bilateral all communicates with suction port in outer circumferential sides, the vortex active chamber of vacuum pump bilateral all communicates with relief opening at central side, and therefore two vortex active chambers of bilateral are equivalent to parallel operation, although effectively can improve the pumping speed of vacuum pump, but, compression ratio and ultimate vacuum cannot be improved; Another kind is that the vortex active chamber of vacuum pump side communicates with suction port at central side, airspace is left in outer circumferential sides between vortex price fixing and eddy spinner disk, the vortex active chamber communicated with suction port is communicated with opposite side vortex active chamber by airspace, opposite side vortex active chamber communicates with relief opening at central side, therefore two vortex active chambers of bilateral are equivalent to series operation, although serve certain effect in increase pumping speed and raising compression ratio, practical application effect is still very limited.
Therefore, present stage need badly a kind of can better meet increase pumping speed, improve the vortex dry vacuum pump compressing when ultimate vacuum and require.
Summary of the invention
For prior art Problems existing, the invention provides a kind of twin-stage vortex dry vacuum pump, better can meet increase pumping speed, improve the requirement compressing when ultimate vacuum.
To achieve these goals, the present invention adopts following technological scheme: a kind of twin-stage vortex dry vacuum pump, comprise motor, bent axle, eddy spinner disk, left vortex price fixing and right vortex price fixing, the motor shaft of described motor is connected by coupling with the spindle end of bent axle, described eddy spinner disk is sleeved on the eccentric part of bent axle, eddy spinner disk adopts bilateral Scroll plate structure, described left vortex price fixing matches with the left hand plate of eddy spinner disk, right vortex price fixing coils with the right side of eddy spinner disk and matches, left vortex price fixing and right vortex price fixing are tightly connected in outer circumferential sides, compressed fit chamber between left vortex price fixing and eddy spinner disk left hand plate is the first vortex active chamber, compressed fit chamber between coiling on the right side of right vortex price fixing and eddy spinner disk is the second vortex active chamber, be characterized in: the outer circumferential sides of described first vortex active chamber communicates with the suction port on left vortex price fixing, radially air-flow path is provided with in described eddy spinner disk, air-flow path one end communicates with the central side of the first vortex active chamber, the air-flow path the other end communicates with the outer circumferential sides of the second vortex active chamber, the central side of the second vortex active chamber communicates with the exhaust passage in right vortex price fixing, exhaust passage communicates with relief opening.
Be connected by sylphon seal between described eddy spinner disk outer circumferential sides with right vortex price fixing outer circumferential sides, by bellows by the first vortex active chamber outer circumferential sides and the second vortex active chamber outer circumferential sides seal isolation.
By Flange joint between described bellows and eddy spinner disk, right vortex price fixing, or by being welded to connect.
The quantity of described air-flow path is at least 1.
In pump, gas flow is: suction port → the first vortex active chamber outer circumferential sides → the first vortex active chamber central side → air-flow path → the second vortex active chamber outer circumferential sides → the second vortex active chamber central side → exhaust passage → relief opening.
Beneficial effect of the present invention:
The present invention compared with prior art, breach the restriction of existing bilateral vortex dry vacuum pump in compression ratio and ultimate vacuum, compressed continuously by the first vortex active chamber of series connection and the twin-stage of the second vortex active chamber, improve compression ratio and the ultimate vacuum of vacuum pump, meet the actual operation requirements of vacuum pump.
Accompanying drawing explanation
Fig. 1 is a kind of twin-stage vortex dry vacuum pump structural representation of the present invention;
Fig. 2 be twin-stage vortex dry vacuum pump of the present invention pump in gas flow schematic diagram;
In figure, 1-motor, 2-bent axle, 3-eddy spinner disk, 4-left vortex price fixing, 5-right vortex price fixing, 6-suction port, 7-relief opening, 8-air-flow path, the 9-the first vortex active chamber, 10-the second vortex active chamber, 11-bellows, 12-coupling, 13-exhaust passage.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
As shown in Figure 1, a kind of twin-stage vortex dry vacuum pump, comprise motor 1, bent axle 2, eddy spinner disk 3, left vortex price fixing 4 and right vortex price fixing 5, the motor shaft of described motor 1 is connected by coupling 12 with the spindle end of bent axle 2, described eddy spinner disk 3 is sleeved on the eccentric part of bent axle 2, eddy spinner disk 3 adopts bilateral Scroll plate structure, described left vortex price fixing 4 matches with the left hand plate of eddy spinner disk 3, right vortex price fixing 5 coils with the right side of eddy spinner disk 3 and matches, left vortex price fixing 4 is tightly connected in outer circumferential sides with right vortex price fixing 5, compressed fit chamber between left vortex price fixing 4 and eddy spinner disk 3 left hand plate is the first vortex active chamber 9, compressed fit chamber between coiling on the right side of right vortex price fixing 5 and eddy spinner disk 3 is the second vortex active chamber 10, the outer circumferential sides of described first vortex active chamber 9 communicates with the suction port 6 on left vortex price fixing 4, air-flow path 8 is radially provided with in described eddy spinner disk 3, air-flow path 8 one end communicates with the central side of the first vortex active chamber 9, air-flow path 8 the other end communicates with the outer circumferential sides of the second vortex active chamber 10, the central side of the second vortex active chamber 10 communicates with the exhaust passage 13 in right vortex price fixing 5, exhaust passage 13 communicates with relief opening 7.
Be tightly connected by bellows 11 between described eddy spinner disk 3 outer circumferential sides and right vortex price fixing 5 outer circumferential sides, by bellows 11 by the first vortex active chamber 9 outer circumferential sides and the second vortex active chamber 10 outer circumferential sides seal isolation.
By Flange joint between described bellows 11 and eddy spinner disk 3, right vortex price fixing 5, or by being welded to connect.
The quantity of described air-flow path 8 is at least 1.
As shown in Figure 2, in pump, gas flow is: suction port 6 → the first vortex active chamber 9 outer circumferential sides → the first vortex active chamber 9 central sides → air-flow path 8 → the second vortex active chamber 10 outer circumferential sides → the second vortex active chamber 10 central sides → exhaust passage 13 → relief opening 7.
Below in conjunction with accompanying drawing, a using process of the present invention is described:
Start twin-stage vortex dry vacuum pump of the present invention, dynamic crankshaft 2 is with to rotate by motor 1, and then drive eddy spinner disk 3 to move, gas enters in pump by suction port 6, first the first vortex active chamber 9 outer circumferential sides is entered, then the continuous compression through the first vortex active chamber 9 also runs to the first vortex active chamber 9 central side gradually, gas now achieves one stage of compression, gas after one stage of compression can enter in air-flow path 8 immediately, guiding again through air-flow path 8 enters the second vortex active chamber 10 outer circumferential sides, then the continuous compression through the second vortex active chamber 10 also runs to the second vortex active chamber 10 central side gradually, gas now achieves two-stage compression, gas after two-stage compression can enter exhaust passage 13 immediately, and finally discharged by relief opening 7.
So, the Two-stage Compression that the present invention is undertaken by the first vortex active chamber 9 and the second vortex active chamber 10 pairs of gases, compared with existing bilateral vortex dry vacuum pump, requires more effective at raising compression ratio and ultimate vacuum.In order to meet different performance index, different scroll molded lines and parameter collocation can be adopted to eddy spinner disk and vortex price fixing, such as adopt three head dummy lines at the eddy spinner disk of inlet end and vortex price fixing, or increase the height of scroll, in order to improve the pumping speed of vacuum pump.
Scheme in embodiment is also not used to limit scope of patent protection of the present invention, and the equivalence that all the present invention of disengaging do is implemented or changed, and is all contained in the scope of the claims of this case.
Claims (5)
1. a twin-stage vortex dry vacuum pump, comprise motor, bent axle, eddy spinner disk, left vortex price fixing and right vortex price fixing, the motor shaft of described motor is connected by coupling with the spindle end of bent axle, described eddy spinner disk is sleeved on the eccentric part of bent axle, eddy spinner disk adopts bilateral Scroll plate structure, described left vortex price fixing matches with the left hand plate of eddy spinner disk, right vortex price fixing coils with the right side of eddy spinner disk and matches, left vortex price fixing and right vortex price fixing are tightly connected in outer circumferential sides, compressed fit chamber between left vortex price fixing and eddy spinner disk left hand plate is the first vortex active chamber, compressed fit chamber between coiling on the right side of right vortex price fixing and eddy spinner disk is the second vortex active chamber, it is characterized in that: the outer circumferential sides of described first vortex active chamber communicates with the suction port on left vortex price fixing, radially air-flow path is provided with in described eddy spinner disk, air-flow path one end communicates with the central side of the first vortex active chamber, the air-flow path the other end communicates with the outer circumferential sides of the second vortex active chamber, the central side of the second vortex active chamber communicates with the exhaust passage in right vortex price fixing, exhaust passage communicates with relief opening.
2. a kind of twin-stage vortex dry vacuum pump according to claim 1, it is characterized in that: be connected by sylphon seal between described eddy spinner disk outer circumferential sides with right vortex price fixing outer circumferential sides, by bellows by the first vortex active chamber outer circumferential sides and the second vortex active chamber outer circumferential sides seal isolation.
3. a kind of twin-stage vortex dry vacuum pump according to claim 2, is characterized in that: by Flange joint between described bellows and eddy spinner disk, right vortex price fixing, or by being welded to connect.
4. a kind of twin-stage vortex dry vacuum pump according to claim 1, is characterized in that: the quantity of described air-flow path is at least 1.
5. a kind of twin-stage vortex dry vacuum pump according to claim 1, is characterized in that: in pump, gas flow is: suction port → the first vortex active chamber outer circumferential sides → the first vortex active chamber central side → air-flow path → the second vortex active chamber outer circumferential sides → the second vortex active chamber central side → exhaust passage → relief opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410804998.0A CN104612968B (en) | 2014-12-19 | 2014-12-19 | A kind of twin-stage vortex dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410804998.0A CN104612968B (en) | 2014-12-19 | 2014-12-19 | A kind of twin-stage vortex dry vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104612968A true CN104612968A (en) | 2015-05-13 |
| CN104612968B CN104612968B (en) | 2016-09-28 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410804998.0A Active CN104612968B (en) | 2014-12-19 | 2014-12-19 | A kind of twin-stage vortex dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104612968B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105201825A (en) * | 2015-09-11 | 2015-12-30 | 东北大学 | Multicavity vortex-type vacuum pump |
| CN108443142A (en) * | 2018-05-18 | 2018-08-24 | 东北大学 | A kind of bilateral twin-stage vortex dry vacuum pump |
| CN109555684A (en) * | 2018-11-27 | 2019-04-02 | 上海卫星装备研究所 | A kind of miniature evolvent type swirl vacuum dry pump |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107084134A (en) * | 2017-06-26 | 2017-08-22 | 湖北维斯曼新能源科技有限公司 | New two stages of compression scroll type air compressor |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5616015A (en) * | 1995-06-07 | 1997-04-01 | Varian Associates, Inc. | High displacement rate, scroll-type, fluid handling apparatus |
| US20010001639A1 (en) * | 1998-09-28 | 2001-05-24 | Shaffer Robert W | Scroll vacuum pump with improved performance |
| JP2003206880A (en) * | 2002-01-16 | 2003-07-25 | Toyota Industries Corp | Scroll compressor and method of compressing refrigerant of scroll compressor |
| CN1816696A (en) * | 2003-07-28 | 2006-08-09 | 大金工业株式会社 | Scroll-type fluid machine |
| CN102257276A (en) * | 2008-12-18 | 2011-11-23 | 株式会社富石 | Scroll fluid machine |
| US20140294640A1 (en) * | 2013-03-29 | 2014-10-02 | Agilent Technologies, Inc. | Scroll Pump Having Separable Orbiting Plate Scroll and Method of Replacing Tip Seal |
-
2014
- 2014-12-19 CN CN201410804998.0A patent/CN104612968B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5616015A (en) * | 1995-06-07 | 1997-04-01 | Varian Associates, Inc. | High displacement rate, scroll-type, fluid handling apparatus |
| US20010001639A1 (en) * | 1998-09-28 | 2001-05-24 | Shaffer Robert W | Scroll vacuum pump with improved performance |
| JP2003206880A (en) * | 2002-01-16 | 2003-07-25 | Toyota Industries Corp | Scroll compressor and method of compressing refrigerant of scroll compressor |
| CN1816696A (en) * | 2003-07-28 | 2006-08-09 | 大金工业株式会社 | Scroll-type fluid machine |
| CN102257276A (en) * | 2008-12-18 | 2011-11-23 | 株式会社富石 | Scroll fluid machine |
| US20140294640A1 (en) * | 2013-03-29 | 2014-10-02 | Agilent Technologies, Inc. | Scroll Pump Having Separable Orbiting Plate Scroll and Method of Replacing Tip Seal |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105201825A (en) * | 2015-09-11 | 2015-12-30 | 东北大学 | Multicavity vortex-type vacuum pump |
| CN105201825B (en) * | 2015-09-11 | 2018-05-04 | 东北大学 | A kind of multi-cavity DRY SCROLL VACUUM PUMP |
| CN108443142A (en) * | 2018-05-18 | 2018-08-24 | 东北大学 | A kind of bilateral twin-stage vortex dry vacuum pump |
| CN108443142B (en) * | 2018-05-18 | 2019-09-03 | 东北大学 | A kind of bilateral twin-stage vortex dry vacuum pump |
| CN109555684A (en) * | 2018-11-27 | 2019-04-02 | 上海卫星装备研究所 | A kind of miniature evolvent type swirl vacuum dry pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104612968B (en) | 2016-09-28 |
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