CN108443142B - A kind of bilateral twin-stage vortex dry vacuum pump - Google Patents

A kind of bilateral twin-stage vortex dry vacuum pump Download PDF

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Publication number
CN108443142B
CN108443142B CN201810479034.1A CN201810479034A CN108443142B CN 108443142 B CN108443142 B CN 108443142B CN 201810479034 A CN201810479034 A CN 201810479034A CN 108443142 B CN108443142 B CN 108443142B
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China
Prior art keywords
vortex
working chamber
price fixing
vacuum pump
spinner disk
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CN201810479034.1A
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CN108443142A (en
Inventor
张英莉
岳向吉
巴德纯
何超
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Northeastern University China
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Northeastern University China
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Priority to CN201810479034.1A priority Critical patent/CN108443142B/en
Priority to PCT/CN2018/088348 priority patent/WO2019218391A1/en
Publication of CN108443142A publication Critical patent/CN108443142A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

A kind of bilateral twin-stage vortex dry vacuum pump, belongs to positive-displacement vacuum pump technical field.The bilateral twin-stage vortex dry vacuum pump includes motor, crank shaft, eddy spinner disk, left vortex price fixing and right vortex price fixing, the mating cavity being respectively formed between left vortex price fixing and right vortex price fixing and eddy spinner disk is vortex working chamber, scroll wrap is equipped with from outer ring to inner ring on the left of eddy spinner disk, the tooth for being higher than the scroll wrap positioned at outer ring positioned at the tooth height of the scroll wrap of inner ring is high, only have outer ring to be equipped with scroll wrap on the right side of the eddy spinner disk, the vortex working chamber includes first order vortex working chamber and second level vortex working chamber, setting airflow channel communicates the first order vortex working chamber and the second level vortex working chamber in the eddy spinner disk.The bilateral twin-stage vortex dry vacuum pump can complete cleaning, it is oil-free on the basis of have the characteristics that pumping speed greatly, compression ratio and final vacuum it is high, and pump housing quantity of heat production is few, good heat dissipation, is conducive to run steadily in the long term.

Description

A kind of bilateral twin-stage vortex dry vacuum pump
Technical field
The present invention relates to positive-displacement vacuum pump technical field, in particular to a kind of bilateral twin-stage vortex dry vacuum pump.
Background technique
Dry vacuum pump refers generally to that 10 can be pressed onto atmosphere-2Work within the scope of Pa and following pressures, in pumping runner not Using any oils and liquid and integrated circuit, the sun can be widely used in continuously directly to the vacuum pump of atmospheric exhaust Industries and the fields such as energy, vacuum surface technology, pharmacy, scientific instrument.Since the 1980s, dry vacuum pump development is fast Suddenly, currently, dry vacuum pump has developed, there are many types, including multistage claw, multi-stage roots formula, Roots+claw type combined type, spiral shell Rod-type and vortex etc..
Wherein, vortex, that is, vortex dry vacuum pump is developed from scroll compressor, belongs to positive-displacement vacuum pump, Since vortex dry vacuum pump has, cleaning is oil-free, working pressure range is wide, reliable performance, torque variation is small and adapts to severe fortune The features such as row condition ability is strong, therefore be widely applied.Up to now, the main collection of development and production of vortex dry vacuum pump In the states such as Germany, the U.S. and Japan a small number of producers, but in recent years, domestic vortex dry vacuum pump technology also achieve compared with Big progress and development.
The important technological parameters of vortex dry vacuum pump performance are pumping speed and final vacuum.As positive-displacement vacuum pump One kind, the pumping performance of vortex dry vacuum pump are mainly determined by the geometric dimension of working chamber and the speed of mainshaft, in selected motor In the case where, pumping speed is only influenced by the outermost crescent working chamber volume size that stator and rotor are formed.In order to improve certain Pumping performance under circumscribed circle size, bilateral vortex dry vacuum pump come into being, but the structure cloth of bilateral vortex dry pump at present Office, which will lead to scroll molded line, to be unfolded from basic circle, and then influence the compression ratio and limiting pressure of pump.Although there is bilateral Two vortex working chamber tandem workings twin-stage vortex dry pump, play certain effect on improving compression ratio, but practical Application effect is still extremely limited.
The structure of existing bilateral vortex dry vacuum pump results in close between the rolling bearing and pump chamber installed on rotor Envelope is the contact dynamic sealing formed by materials such as rubber rings.Although having selected the axis of rolling of grease lubrication form in bearing apolegamy The possibility held, but still there is a small amount of greasing substance to carry out pump chamber at work, it is difficult to accomplish absolutely oil-free.
In addition, gas is needed by the amount of heat that compression generates by the transmitting heat dissipation of the structural members such as rotor, when pump chamber is cold When bad, scroll wrap temperature distortion influences pumping performance, and there are stuck phenomena when serious.Common bilateral single-stage vortex pump Phenomena such as there is also serious overcompression and lead to the raised problems of excessive heat of pump chamber temperature.
Therefore, one kind is needed at this stage and can take into account increase pumping speed, improves compression ratio and final vacuum, and enhancing pump The absolute oil-free cleaning vortex dry vacuum pump of chamber cooling effect.
Summary of the invention
Of the existing technology in order to solve the problems, such as, the present invention provides a kind of bilateral twin-stage vortex dry vacuum pump, packets Include motor, crank shaft, eddy spinner disk, left vortex price fixing and right vortex price fixing, the motor shaft of the motor and crank shaft Spindle end is connected by shaft coupling, and the eddy spinner disk is sleeved on the eccentric part of crank shaft, the eddy spinner disk simultaneously with it is described Left vortex price fixing and the right vortex price fixing match, and the left vortex price fixing and the right vortex price fixing are sealed in outer circumferential sides Connection, the mating cavity being respectively formed between the left vortex price fixing and the right vortex price fixing and the eddy spinner disk are vortex work Make chamber, the outer circumferential sides of the vortex working chamber are communicated with air inlet, central side and the exhaust passage phase of the vortex working chamber Logical, the exhaust passage is communicated with exhaust outlet, is equipped with scroll wrap from outer ring to inner ring on the left of the eddy spinner disk, is located at inner ring Scroll wrap tooth height be higher than the scroll wrap positioned at outer ring tooth it is high, only have outer ring to be equipped with scroll wrap on the right side of the eddy spinner disk, The vortex working chamber includes first order vortex working chamber and second level vortex working chamber, and the first order vortex working chamber is by institute State the scroll wrap of the outer ring on the left of eddy spinner disk and on the right side of the eddy spinner disk respectively with the left vortex price fixing and the right whirlpool The scroll wrap of rotation price fixing cooperatively forms, and the first order vortex working chamber includes left first order working chamber and right first level work Chamber, the second level vortex working chamber is by the scroll wrap of inner ring on the left of the eddy spinner disk and the scroll wrap of the left vortex price fixing It cooperatively forms, setting airflow channel makes the first order vortex working chamber and the second level vortex work in the eddy spinner disk Chamber communicates.
The left vortex price fixing or the right vortex price fixing open up auxiliary exhaust ports, the setting position of the auxiliary exhaust ports It sets corresponding with the position of the airflow channel of the eddy spinner disk, auxiliary exhaust valve, institute is set in the auxiliary exhaust ports Auxiliary exhaust ports are stated by communicating outside the auxiliary exhaust valve and vacuum pump.
The intermediate soft body defonnation sealing structure inflated of setting outside the right first order working chamber and vacuum pump.
The software of the soft body defonnation sealing structure is rubber or polyethersulfone resin, polyether-ether-ketone, in polytetrafluoroethylene (PTFE) The composite material that one or more addition rubber are formed.
Semiconductor chilling plate is arranged in the outer central sections of the left vortex price fixing and the outer central sections of the eddy spinner disk.
Beneficial effects of the present invention:
Compared with prior art, the present invention breaching existing vortex dry vacuum pump vacuum pump on whole pumping performance Limitation, by changing the distributed architecture of vortex working chamber, enabling vortex dry vacuum pump in bilateral while being evacuated raising pumping In the case where speed, increases the expansion circle number that is vortexed, improve the compression ratio and final vacuum of vortex dry vacuum pump;In first order whirlpool Auxiliary exhaust valve is set between rotation working chamber and second level vortex working chamber, when inlet pressure is higher, auxiliary exhaust can be passed through Valve excludes the high pressure gas in vortex working chamber, avoids overcompression phenomenon, reduces the generation of heat;Devise the soft of intermediate inflation Body deformable seal structure realizes and rolling bearing is completely sealed in outside pump chamber while sealing under the inside and outside variation pressure difference of pump, Guarantee that cleaning is oil-free in pump chamber;While second level vortex working chamber is set as unilateral side, partly led by the setting in pump housing high-temperature region Body cooling piece largely improves the heat-sinking capability of the pump housing, reduces pump body temperature, reduces the temperature distortion of scroll wrap. In summary, bilateral twin-stage vortex dry vacuum pump of the invention can complete cleaning, it is oil-free on the basis of have pumping speed it is big, Compression ratio and the high feature of final vacuum, and pump housing quantity of heat production is few, good heat dissipation, is conducive to run steadily in the long term.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of bilateral twin-stage vortex dry vacuum pump provided by the invention;
Fig. 2 is the A-A cross-sectional view for Fig. 1.
Wherein,
1- motor, 2- crank shaft, the right vortex price fixing of 3-, 4- eddy spinner disk, the left vortex price fixing of 5-, 6- shell, 7- shaft coupling Device, 8- counterweight, the left first order working chamber of 9-, the right first order working chamber of 10-, the second level 11- vortex working chamber, 12- airflow channel, 13- auxiliary exhaust ports, 14- auxiliary exhaust valve, 15- exhaust passage, 16- air inlet, 17- exhaust outlet, 18- rubber seal cushion rubber, 19- flabellum, 20- electric fan, 21- semiconductor chilling plate.
Specific embodiment
Of the existing technology in order to solve the problems, such as, as shown in Figure 1 to Figure 2, the present invention provides a kind of bilateral twin-stage whirlpools Revolve dry vacuum pump, including motor 1, crank shaft 2, eddy spinner disk 4, left vortex price fixing 5, right vortex price fixing 3 and shell 6.
Shell 6 is arranged on right vortex price fixing 3 by bolt.
The motor shaft of motor 1 is connect with the spindle end of crank shaft 2 by shaft coupling 7, and eddy spinner disk 4 is sleeved on crank shaft 2 eccentric part, eddy spinner disk 4 are matched with left vortex price fixing 5 and right vortex price fixing 3 simultaneously, and left vortex price fixing 5 is determined with right be vortexed Disk 3 is tightly connected in outer circumferential sides, the mating cavity being respectively formed between left vortex price fixing 5 and right vortex price fixing 3 and eddy spinner disk 4 Outer circumferential sides for vortex working chamber, vortex working chamber are communicated with air inlet 16, the central side and exhaust passage of vortex working chamber 15 communicate, and exhaust passage 15 is communicated with exhaust outlet 17, and 4 left side of eddy spinner disk is equipped with scroll wrap from outer ring to inner ring, are located at interior The tooth that the tooth height of the scroll wrap of circle is higher than the scroll wrap positioned at outer ring is high, and only outer ring is equipped with scroll wrap, whirlpool on the right side of eddy spinner disk 4 Rotation working chamber includes first order vortex working chamber and second level vortex working chamber, and first order vortex working chamber is left by eddy spinner disk 4 The scroll wrap of the outer ring on 4 right side of side and eddy spinner disk cooperates shape with the scroll wrap of left vortex price fixing 5 and right vortex price fixing 3 respectively At, second level vortex working chamber is cooperatively formed by the scroll wrap of 4 left side inner ring of eddy spinner disk and the scroll wrap of left vortex price fixing 5, Setting airflow channel 12 communicates first order vortex working chamber and second level vortex working chamber in eddy spinner disk 4.The first order is vortexed Working chamber is that eddy spinner disk matches the first order compression work chamber to be formed with two sides vortex price fixing, which is bilateral air-breathing, is mentioned The high pumping speed of scroll vacuum pump;Second level vortex working chamber is that eddy spinner disk and side vortex price fixing complement each other to form Two-stage compression working chamber, the chamber are unilateral suction chamber, and scroll molded line can extend into pump housing geometric center, improve scroll vacuum pump Compression ratio and final vacuum;First order compression work chamber is compressed via the airflow channel and the second level being arranged on eddy spinner disk Working chamber is connected, and reaches the course of work of two-stage continuous compression.
Left vortex price fixing 5 or right vortex price fixing 3 open up auxiliary exhaust ports, the setting position of auxiliary exhaust ports 13 and vortex The position of the airflow channel 12 of Moving plate 4 is corresponding, and auxiliary exhaust valve 14 is arranged in auxiliary exhaust ports 13, and auxiliary exhaust ports 13 pass through It is communicated outside auxiliary exhaust valve 14 and vacuum pump.When the scroll vacuum pump initial stage, inlet pressure was higher, it is vortexed through the first order The gas of working chamber compression just can reach pressure at expulsion, that is, reach a little higher than atmospheric pressure, and be discharged from auxiliary exhaust mouth, can be with one Determine to improve overcompression phenomenon in degree, improves the speed of exhaust.The compression of first order vortex working chamber is smaller, auxiliary exhaust valve The overcompression phenomenon improved in the pump chamber course of work is set to a certain extent, therefore, the heat that vortex dry vacuum pump generates Measure less and focus primarily upon the central part of the pump housing.
First order vortex working chamber includes left first order working chamber 9 and right first order working chamber 10.Eddy spinner disk and left whirlpool Rotation price fixing cooperatively forms left first order working chamber, and the height of left first order working chamber is set as h1;Eddy spinner disk and right vortex price fixing Right first order working chamber is cooperatively formed, the height of right first order working chamber is set as h2;The height of second level vortex working chamber is set as h3;Relationship between working chamber height meets: h1+h2 >=h3 > (h1+h2)/2.After the reduction of scroll vacuum pump inlet pressure, two Grade pump chamber series connection pumping, the height of second level vortex working chamber, i.e. h3 are designed according to the specification of vacuum pump and specific scroll molded line It is adjusted, guarantees the continuous-stable pumping between two-stage.
Right first order working chamber 10 and the intermediate soft body defonnation sealing structure inflated of setting outside vacuum pump, soft body defonnation are close The software of seal structure is that one of rubber or polyethersulfone resin, polyether-ether-ketone, polytetrafluoroethylene (PTFE) or a variety of addition rubber are formed Composite material, wherein polyethersulfone resin, i.e. PES (Polyethersulfone resin), polyether-ether-ketone, i.e. PEEK (Polyetherether ketone), polytetrafluoroethylene (PTFE), i.e. PTFE (Poly tetra fluoroethylene).The right first order Working chamber and vacuum pump outside need seal, and using the soft body defonnation sealing structure of centre inflation, i.e., the double-deck software deformation is moved close Envelope, wherein the software of soft body defonnation sealing structure, i.e. software can be rubber or polyethersulfone resin, polyether-ether-ketone, polytetrafluoro The composite material that one of ethylene or a variety of addition rubber are formed;The software benefit of soft body defonnation sealing structure is bolted to On eddy spinner disk and right vortex price fixing, the dynamic sealing between eddy spinner disk and right vortex price fixing is turned using soft body defonnation sealing structure Static seal is turned to, inflation can resist the variation of pump inside and outside differential pressure among double-layer structure;Soft body defonnation sealing structure will be vortexed work Make chamber with the rolling bearing that is mounted on eddy spinner disk and shell it is completely isolated achieve the purpose that clean completely in pump chamber it is oil-free.
Semiconductor chilling plate 21 is arranged in the outer central sections of left vortex price fixing 5 and the outer central sections of eddy spinner disk 4.Due to The heat that vortex dry vacuum pump generates is few and focuses primarily upon the central part of the pump housing, in left static vortex disk outer central sections and moves Whirlpool disk outer central sections carry out pressure cooling using semiconductor chilling plate, further improve the cooling effect of scroll vacuum pump, with Guarantee the stability and long-term maintainability of properties of product.
Embodiment
As depicted in figs. 1 and 2, a kind of bilateral twin-stage vortex dry vacuum pump, including motor 1, crank shaft 2, right vortex Price fixing 3, eddy spinner disk 4, left vortex price fixing 5 and shell 6, the motor shaft of motor 1 and the spindle end of crank shaft 2 pass through shaft coupling 7 are connected with counterweight 8, and eddy spinner disk 4 is sleeved on the eccentric part of crank shaft 2, the whirlpool of left vortex price fixing 5 and 4 left side of eddy spinner disk Rotation tooth matches, and right vortex price fixing 3 is matched with the scroll wrap on 4 right side of eddy spinner disk, left vortex price fixing 5 and right vortex price fixing 3 Be tightly connected in outer circumferential sides, eddy spinner disk 4 and left vortex price fixing 5 cooperatively form left first order working chamber 9, eddy spinner disk 4 with Right vortex price fixing 6 cooperatively forms right first order working chamber 10, and eddy spinner disk 4 and left 5 inner ring of vortex price fixing cooperatively form the second level Vortex working chamber 11, left first order working chamber 9 and right first order working chamber 10 pass through airflow channel 12 and the work of second level vortex Chamber 11 communicates, the air inlet 16 in the outer circumferential sides of left first order working chamber 9 and right first order working chamber 10 and left vortex price fixing 5 It communicates, the inside of left first order working chamber 9 and right first order working chamber 10 and 13 phase of auxiliary exhaust ports on right vortex price fixing 3 It is logical, auxiliary exhaust valve 14, the center and left whirlpool of second level vortex working chamber 11 are installed in the auxiliary exhaust ports 13 of right vortex price fixing 3 The exhaust passage 15 being arranged in rotating disk communicates, and exhaust passage 15 is communicated with exhaust outlet 17.
The sum of height h2 of the height h1 of left first order working chamber 9 and right first order working chamber 10 is more than or equal to second level whirlpool Revolve the height h3 of working chamber.
Right first order working chamber 10 is sealed with outside vacuum pump by rubber seal cushion rubber 18, and rubber seal cushion rubber 18 utilizes Bolt is fixedly arranged on eddy spinner disk 4 and right vortex price fixing 3, and rubber seal cushion rubber 18 is the double-layer rubber structure of intermediate gassiness, rubber The variation of sealing area caused by eddy spinner disk 4 is translatable can be absorbed in glue sealing rubber ring 18.
Flabellum 19 is arranged in the side of the close motor 1 of crank shaft 2 in bilateral twin-stage vortex dry vacuum pump, in left vortex Electric fan 20 is arranged far from the side of eddy spinner disk 4 in price fixing 5, and semiconductor chilling plate 21 is fixedly arranged on left vortex price fixing 5 and whirlpool 4 right side inner ring pump body temperature higher position of rotating disk is to increase pump housing heat-sinking capability.
Illustrate first use process of the invention below with reference to Fig. 1 and Fig. 2:
Start bilateral twin-stage vortex dry vacuum pump of the invention, drives crank shaft 2 to rotate by motor 1, and then band Dynamic vortex Moving plate 4 moves, and gas is entered in pump by air inlet 16, and gas initially enters left first order working chamber 9 and the right first order The outer circumferential sides of working chamber 10 by continuous compression and gradually run to left first order working chamber 9 and right first order working chamber 10 Central side, second level vortex working chamber 11 is entered by airflow channel 12, then gas continuation, which is compressed, gradually runs to the The central side of second level vortex working chamber 11, compressed high pressure gas enter exhaust passage 15, and by finally by 17 row of exhaust outlet Pump is outer out.
When vortex dry vacuum pump inlet pressure is larger, reaches the pumped gas pressure at airflow channel 12 and reach exhaust Pressure, if continuing to compress to it, when it reaches exhaust passage 15, pressure has been more than normal exhaust pressure, causes overcompression existing As.
Using bilateral twin-stage vortex dry vacuum pump of the invention, reached when pumped gas reaches at airflow channel 12 Auxiliary exhaust valve 14 to pressure at expulsion, setting will be opened, make high pressure gas via 13 discharge pump of auxiliary exhaust ports outside, avoid The generation of overcompression phenomenon.
When gas is compressed into right 10 inside of first order working chamber, gas can flow to the second level via airflow channel 12 Vortex working chamber, while needing sealing element for right 10 inner circumferential of first order working chamber and pumping outer isolated from atmosphere, conventional seals Mode can take the sealing elements such as metal bellows or rubber gasket, but metal bellows sealing means are limited to installation ruler Very little, the deformation under the translation of eddy spinner disk 4 of single layer rubber gasket is complicated, two sides pressure difference variation range is big, it cannot be guaranteed that permanent worker The reliability sealed in work.
Bilateral twin-stage vortex dry vacuum pump of the invention is taken, the rubber of the double-layer rubber structure of intermediate gassiness is utilized Sealing rubber ring 18 carries out dynamic sealing between eddy spinner disk 4 and right vortex price fixing 3, can guarantee in full working pressure range first Vacuum insulation sealing, simultaneously because the air for being about 1atm containing pressure among sealing rubber ring, can preferably resist work Chamber and pump external differential variation, increase the service life of sealing rubber ring, improve the reliability of dynamic sealing.
It is influenced by vortex dry vacuum pump working principle, the highest temperature zone of pumped gas and the pump housing, which is focused on, closes on row Vortex working chamber at gas, no matter the series connection of traditional bilateral vortex dry vacuum pump bilateral or bilateral parallel-connection structure, at exhaust Vortex work cavity radiating influenced by the vortex working chamber of its back side, especially as one kind of dry vacuum pump, vortex dry type Without the presence of the lubricant mediums such as oil in the pump chamber of vacuum pump, conventional vortex dry vacuum pump generally can not pump body temperature compared with It works long hours in high situation.
Bilateral twin-stage vortex dry vacuum pump of the invention is taken, in addition to determining using in left vortex price fixing 5 and right be vortexed Radiating fin is set on disk 3, flabellum 19 is set in the side of the close motor 1 of crank shaft 2, in left vortex price fixing 5 far from whirlpool Electric fan 20 is arranged in the side of rotating disk 4, outside the means of these common enhancing pump housing heat-sinking capabilities, first by the whirlpool at exhaust Rotation working chamber is set as one-sided configuration, and the heat dissipation of high-temperature gas herein and the pump housing is improved from pump body structure, secondly will partly lead Body cooling piece 21 is fixed on the pump body temperatures higher positions such as 4 right side inner ring of left vortex price fixing 5 and eddy spinner disk, for enhancing pump housing height Temperature place local heat-sinking capability, simultaneously because 4 inner ring of eddy spinner disk be one-sided configuration, 2 eccentric segment of crank shaft be mounted on vortex The friction such as rolling bearing on Moving plate 4 heat production key area is both exposed to outside pump chamber, can be directly by leaning on for crank shaft 2 is arranged in The flabellum 19 of nearly 1 side of motor carries out air-cooled, so that whole enhance the pump housing cooling capacity of vortex dry pump, improves vortex Tooth temperature distortion situation, expands the condition range of vortex dry pump, improves the job stability of vortex dry pump.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.

Claims (4)

1. a kind of bilateral twin-stage vortex dry vacuum pump, including motor, crank shaft, eddy spinner disk, left vortex price fixing and right whirlpool Price fixing is revolved, the motor shaft of the motor and the spindle end of crank shaft are connected by shaft coupling, and the eddy spinner disk is sleeved on song The eccentric part of axis is turned, the eddy spinner disk is matched with the left vortex price fixing and the right vortex price fixing simultaneously, the left whirlpool Price fixing and the right vortex price fixing is revolved to be tightly connected in outer circumferential sides, the left vortex price fixing and the right vortex price fixing with it is described The mating cavity being respectively formed between eddy spinner disk is vortex working chamber, outer circumferential sides and the air inlet phase of the vortex working chamber Logical, the central side of the vortex working chamber is communicated with exhaust passage, and the exhaust passage is communicated with exhaust outlet, which is characterized in that It is equipped with scroll wrap from outer ring to inner ring on the left of the eddy spinner disk, the tooth height positioned at the scroll wrap of inner ring is higher than positioned at outer ring The tooth of scroll wrap is high, only has outer ring to be equipped with scroll wrap on the right side of the eddy spinner disk, and the vortex working chamber includes that the first order is vortexed Working chamber and second level vortex working chamber, the first order vortex working chamber is by the eddy spinner disk left side and the eddy spinner disk Scroll wrap of the scroll wrap of the outer ring on right side respectively with the left vortex price fixing and the right vortex price fixing cooperatively forms, and described Level-one vortex working chamber includes left first order working chamber and right first order working chamber, and the second level vortex working chamber is by the whirlpool The scroll wrap of inner ring and the scroll wrap of the left vortex price fixing cooperatively form on the left of rotating disk, and air-flow is arranged in the eddy spinner disk Channel communicates the first order vortex working chamber and the second level vortex working chamber, the right first order working chamber and vacuum The intermediate soft body defonnation sealing structure inflated of the external setting of pump.
2. bilateral twin-stage vortex dry vacuum pump according to claim 1, which is characterized in that the left vortex price fixing or The right vortex price fixing opens up auxiliary exhaust ports, the airflow channel of the position of the auxiliary exhaust ports and the eddy spinner disk Position it is corresponding, auxiliary exhaust valve is set in the auxiliary exhaust ports, and the auxiliary exhaust ports pass through the auxiliary exhaust valve It is communicated with outside vacuum pump.
3. bilateral twin-stage vortex dry vacuum pump according to claim 1, which is characterized in that the soft body defonnation sealing knot The software of structure be one of rubber or polyethersulfone resin, polyether-ether-ketone, polytetrafluoroethylene (PTFE) or it is a variety of addition rubber formed answer Condensation material.
4. bilateral twin-stage vortex dry vacuum pump according to claim 1, which is characterized in that outside the left vortex price fixing Semiconductor chilling plate is arranged in the outer central sections of side central part and the eddy spinner disk.
CN201810479034.1A 2018-05-18 2018-05-18 A kind of bilateral twin-stage vortex dry vacuum pump Active CN108443142B (en)

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Application Number Priority Date Filing Date Title
CN201810479034.1A CN108443142B (en) 2018-05-18 2018-05-18 A kind of bilateral twin-stage vortex dry vacuum pump
PCT/CN2018/088348 WO2019218391A1 (en) 2018-05-18 2018-05-25 Double-sided two-level dry-type vortex vacuum pump

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Application Number Priority Date Filing Date Title
CN201810479034.1A CN108443142B (en) 2018-05-18 2018-05-18 A kind of bilateral twin-stage vortex dry vacuum pump

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CN108443142A CN108443142A (en) 2018-08-24
CN108443142B true CN108443142B (en) 2019-09-03

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