CN109555684A - A kind of miniature evolvent type swirl vacuum dry pump - Google Patents
A kind of miniature evolvent type swirl vacuum dry pump Download PDFInfo
- Publication number
- CN109555684A CN109555684A CN201811420735.4A CN201811420735A CN109555684A CN 109555684 A CN109555684 A CN 109555684A CN 201811420735 A CN201811420735 A CN 201811420735A CN 109555684 A CN109555684 A CN 109555684A
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- China
- Prior art keywords
- vortex
- stator
- pump
- main shaft
- scroll plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0246—Details concerning the involute wraps or their base, e.g. geometry
- F04C18/0269—Details concerning the involute wraps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/001—Radial sealings for working fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Abstract
A kind of miniature evolvent type swirl vacuum dry pump, including motor, main shaft, scroll plate left stator, the right stator of scroll plate, vortex disc rotor, intermediate pump chamber etc., the main shaft uses and motor shaft unitary form, the vortex disc rotor is sleeved on the eccentric segment of the main shaft, vortex is machined on the left stator, right stator and rotor, vortex intermeshing forms several pumping conduits, to realize air extracting function.Into compared with prior art, second level extraction sector proposed by the present invention breaches the pumping speed range of traditional scroll vacuum pump, significantly reduces the volume of pump by compact design；Complete machine reliability of operation is improved by components such as sealing element, limiting device, exhaust valves, increases the compression ratio of pump.
Description
Technical field
The invention belongs to dry vacuum asepwirator pump field, in particular to a kind of miniature evolvent type swirl vacuum dry pump.
Background technique
Scroll vacuum pump belongs to non-contact type dry pump, and volution theory is applied to screw compressor earliest, with semiconductor,
The rapid development of the industries such as new material and bio-pharmaceuticals, the continuous mature and people of volution theory clean vacuum environment oil-free
An urgent demand, volution theory is successfully applied in the design and manufacture of vacuum pump, compared to traditional vacuum pump, scroll vacuum pump tool
There is the characteristics of oil-free, cleaning, low vibrating noise, low energy consumption.Most of analysis instruments, detection device, such as mass spectrograph, leak detector
When realizing its function, it is required to certain vacuum environment, as analysis instrument portability degree is continuously improved, to internally provided with vacuum
The requirement of the micromation of pump is also continuously improved, and scroll vacuum pump is particularly suitable for micromation since its structure is more compact.
Domestic and international well-known vacuum equipment producer expands research to dry type scroll vacuum pump, concentrates currently, research is main
It is following two aspect: one, carry out the development of big pumping speed vortex pump, at present the pumping speed maximum of vortex pump be no more than 20L/s, for into
One step adapts to the further harsh reliability and stability requirement of semiconductor technology, widens the application range of vortex pump, each major company
Scroll plate making material and manufacture craft expansion are studied, are expected to develop the big pumping speed pump of 32L/s；Two, relative to big pumping speed,
The development of compact scroll pump just starts, and it is 1L/s that pumping speed is the smallest at present, but machine volume does not still meet high-grade, precision and advanced section
The miniaturization trend of instrument is learned, therefore the development for carrying out miniaturization vortex pump is imperative.
Summary of the invention
In view of the deficiency of the prior art, the present invention provides a kind of miniature evolvent type swirl vacuum dry pump, shows
What is write reduces the volume of pump, and improves operational reliability, compression ratio and final vacuum, meets scientific instrument industry pair
The demand that highly reliable portable minisize vacuum dry pump is increasingly enhanced.
The present invention is achieved through the following technical solutions: a kind of miniature evolvent type swirl vacuum dry pump, including motor,
Main shaft, scroll plate left stator, the right stator of scroll plate, vortex disc rotor, intermediate pump chamber etc., the main shaft use and motor shaft one
Form, the vortex disc rotor are sleeved on the eccentric segment of the main shaft, are machined with whirlpool on the left stator, right stator and rotor
Body is revolved, vortex intermeshing forms several pumping conduits, to realize air extracting function.
Further, in the swirl vacuum dry pump, shafting is cantilever design, and main shaft cantilever end is eccentric crankshaft, from
Be sequentially arranged with vortex disc rotor on air inlet to exhaust side main shaft, the right stator of scroll plate, motor, the support of bearing, balance weight and
If dry bearing.
Further, the scroll plate left stator, vortex disc rotor, the right stator of scroll plate, cooperation position-limit mechanism, rectangle are close
Strip of paper used for sealing, main shaft, bearing collectively form second level extraction sector, improve compression ratio and final vacuum.
Further, the right stator unilateral side of the scroll plate left stator, scroll plate is machined with vortex, and left stator outer surface has
Radiating fin, vortex disc rotor bilateral are machined with vortex, and the vortex circle number of two sides is different and 180 ° of phase phase difference, and inside is opened
There are airflow channel, connection level-one pumping chamber and second level pumping chamber.
Further, the vortex surface outline curves are involute, and vortex top is provided with rectangular seal slot, fills out
Rectangular seal bar, the rectangular seal bar and the sliding friction of vortex mating surface are filled, sealing function is realized, reduces same pumping
Air cavity difference is evacuated the gas leakage in conduit.
Further, it is provided with air inlet in the left stator, opens up exhaust outlet on right stator, is arranged equipped with exhaust valve and auxiliary
Air valve, the exhaust valve and auxiliary exhaust valve are made of valve body, spring and ball, and when just having started pumping, pressure at expulsion is very
Height, much larger than the elastic force that spring in exhaust valve and auxiliary exhaust valve provides, ball is opened exhaust, is arrived when admission pressure is small
When certain value, auxiliary exhaust valve is closed, and guarantees enough compression ratios.
Advantages of the present invention and good effect:
Compared with prior art, second level extraction sector proposed by the present invention breaches traditional vortex by compact design
The pumping speed range of vacuum pump, significantly reduces the volume of pump；It is improved by components such as sealing element, limiting device, exhaust valves
Complete machine reliability of operation, increases the compression ratio of pump, and then improve final vacuum；Using the motor that main shaft is direct-connected,
Transmission loss is reduced, keeps pump startup steady, is run more energy saving.Miniature evolvent type swirl vacuum provided by the invention is dry
Pump, because its is small in size, final vacuum is high, runs smoothly, low noise, and energy conservation cleans the advantages that oil-free, can substitute diaphragm pump
As the preferred unit of small miniature cleaning vacuum acquiring system, especially suitable for the portable scientific analysis instrument quickly grown
In.
Detailed description of the invention
Fig. 1 is the schematic diagram of miniature evolvent type swirl vacuum dry pump；
Fig. 2 is second level extraction sector schematic diagram；
Fig. 3 is scroll plate left stator schematic diagram；
Fig. 4 is that vortex disc rotor and limiting device cooperate schematic diagram；
Fig. 5 is main exhaust valve and auxiliary exhaust valve schematic diagram.
Specific embodiment
The invention will be further described with reference to the accompanying drawing.Figure number explanation: motor 1, main shaft 2 are vortexed to face left and determine
Son 3, the right stator 4 of scroll plate, vortex disc rotor 5, intermediate pump chamber 6, air inlet 7, exhaust outlet 8, pumping conduit 9, the support of bearing 10,
Balance weight 11, needle bearing 12, lip-type packing 13, deep groove ball bearing 14, holding screw 15, position-limit mechanism 16, rectangular seal
Item 17, vortex 18, radiating fin 19, airflow channel 20, level-one pumping chamber 21, second level pumping chamber 22, exhaust valve 23, auxiliary row
Air valve 24, valve body 25, spring 26, ball 27.
Fig. 1 show a kind of miniature evolvent type swirl vacuum dry pump schematic diagram of the present invention, including motor 1, master
The right stator 4 of axis 2, scroll plate left stator 3, scroll plate, vortex disc rotor 5, intermediate pump chamber 6, air inlet 7, exhaust outlet 8 etc., it is described
Main shaft is used to be intermeshed with motor shaft unitary form, the left stator 3, right stator 4 and rotor 5, forms several pumping slots
Road 9, to realize air extracting function.
The shafting of the swirl vacuum dry pump is cantilever design, and 2 cantilever end of main shaft is eccentric crankshaft, from air inlet side to
Vortex disc rotor 5, the right stator 4 of scroll plate, the support of bearing 10, motor 1, balance weight 11 are sequentially installed on exhaust side main shaft 2
And if dry bearing.Wherein, vortex disc rotor 5 is mounted on the cantilever end of main shaft 2, the right stator 4 of scroll plate by needle bearing 12
Lip-type packing 13 is housed between main shaft, deep groove ball bearing 14, the support of bearing 10, balance weight 11 installed by holding screw 15
On main shaft 2.
The scroll plate left stator 3, vortex disc rotor 5, the right stator 4 of scroll plate cooperate position-limit mechanism 16, rectangular seal
Item 17, main shaft 2, needle bearing 12, collectively form second level extraction sector, improve the compression ratio of pump, and position-limit mechanism can be axial
Displacement, cannot rotate, to realize limit function, and completely cut off level-one pumping chamber 21 and second level pumping chamber 22, play sealing function,
To improve the final vacuum of pump.
The scroll plate left stator 3, right 4 unilateral side of stator of scroll plate are machined with vortex 18, and 3 outer surface of left stator has scattered
Hot fin 19,5 bilateral of vortex disc rotor are machined with vortex 17, and the vortex circle number of two sides is different and 180 ° of phase phase difference,
Inside is provided with airflow channel 20, connection level-one pumping chamber 21 and second level pumping chamber 22.
18 surface outline curves of vortex are involute, and vortex top is provided with rectangular seal slot, load square
Shape sealing strip 17, the rectangular seal bar 17 and the sliding friction of vortex mating surface realize sealing function, reduce same level-one
Pumping chamber difference is evacuated the gas leakage in conduit.
It is provided with air inlet in the left stator 3, opens up exhaust outlet on right stator 4, exhaust valve 23 and auxiliary exhaust are housed
Valve 24, the exhaust valve and auxiliary exhaust valve are made of valve body 25, spring 26 and ball 27, and valve body 25 is screwed onto right stator
On 4, ball 27 is pressed on to the exhaust outlet of right stator 4 by the elastic force of spring 26, plays sealing and scavenging action, spring
Elastic force can be adjusted by decrement.When just starting pumping, pressure at expulsion is very high, is much larger than exhaust valve and auxiliary exhaust valve
The elastic force that middle spring provides, ball are opened exhaust, and when admission pressure is small arrives certain value, auxiliary exhaust valve is closed, and are protected
Demonstrate,prove enough compression ratios.
The miniature evolvent type swirl vacuum dry pump course of work are as follows: pumped gas is from scroll plate left stator 3
Air inlet 7 is drawn into level-one pumping chamber 21, and under the driving of motor 1, main shaft 2 rotates, and passes through needle bearing 12, band orbiter
Rotor 5 moves, and position-limit mechanism 16 is housed between vortex disc rotor 5 and the right stator 4 of scroll plate, to prevent vortex disc rotor 5
It is pivoted, makes it that can only do revolution translation around the centre of gyration, so that the gas in level-one pumping chamber 21 be made to enter intermeshing
The pumping conduit 9 that is formed of vortex in, and be constantly compressed to center, by the airflow channel 20 inside vortex disc rotor 5, into
Enter second level pumping chamber 22, equally continues the center of being compressed to, the exhaust valve 23 through the right stator 4 of scroll plate and 24 row of auxiliary exhaust valve
Out, pumping process is completed.
Claims (6)
1. a kind of miniature evolvent type swirl vacuum dry pump, which is characterized in that including motor, main shaft, scroll plate left stator, be vortexed
The right stator of disk, vortex disc rotor, intermediate pump chamber；
The main shaft, which is used, is sleeved on the eccentric segment of the main shaft, the whirlpool with motor shaft unitary form, the vortex disc rotor
Vortex is machined on the right stator of capstan left stator, scroll plate and vortex disc rotor, vortex intermeshing forms several
It is evacuated conduit, to realize air extracting function.
2. a kind of miniature evolvent type swirl vacuum dry pump as described in claim 1, which is characterized in that swirl vacuum dry pump
In, shafting is cantilever design, and main shaft cantilever end is eccentric crankshaft, is sequentially arranged with scroll plate on from air inlet to exhaust side main shaft
Rotor, the right stator of scroll plate, motor, the support of bearing, if balance weight and dry bearing.
3. a kind of miniature evolvent type swirl vacuum dry pump as described in claim 1, which is characterized in that the vortex is faced left
Stator, vortex disc rotor, the right stator of scroll plate cooperate position-limit mechanism, rectangular seal bar, main shaft, bearing, collectively form second level pumping
Mechanism of qi structure, improves compression ratio and final vacuum.
4. a kind of miniature evolvent type swirl vacuum dry pump as described in claim 1, which is characterized in that the vortex is faced left
The right stator unilateral side of stator, scroll plate is machined with vortex, and there are radiating fin, vortex disc rotor bilateral in scroll plate left stator outer surface
It is machined with vortex, the vortex circle number of two sides is different and 180 ° of phase phase difference, and inside is provided with airflow channel, connection level-one pumping
Chamber and second level pumping chamber.
5. a kind of miniature evolvent type swirl vacuum dry pump as described in claim 1, which is characterized in that the vortex body surface
Facial contour curve is involute, and vortex top is provided with rectangular seal slot, loads rectangular seal bar, the rectangular seal bar
With vortex mating surface sliding friction, sealing function is realized, reduce the gas leakage in same pumping chamber difference pumping conduit.
6. a kind of miniature evolvent type swirl vacuum dry pump as described in claim 1, which is characterized in that the vortex is faced left
It is provided with air inlet on stator, opens up exhaust outlet on the right stator of scroll plate, exhaust valve and auxiliary exhaust valve, the exhaust valve are housed
Be made of with auxiliary exhaust valve valve body, spring and ball, just started pumping when, pressure at expulsion is very high, much larger than exhaust valve with
The elastic force that spring provides in auxiliary exhaust valve, ball are opened exhaust, when admission pressure is small arrives certain value, auxiliary exhaust
Valve is closed, and guarantees enough compression ratios.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811420735.4A CN109555684A (en) | 2018-11-27 | 2018-11-27 | A kind of miniature evolvent type swirl vacuum dry pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811420735.4A CN109555684A (en) | 2018-11-27 | 2018-11-27 | A kind of miniature evolvent type swirl vacuum dry pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109555684A true CN109555684A (en) | 2019-04-02 |
Family
ID=65867558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811420735.4A Pending CN109555684A (en) | 2018-11-27 | 2018-11-27 | A kind of miniature evolvent type swirl vacuum dry pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109555684A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111207069A (en) * | 2020-02-20 | 2020-05-29 | 贝德凯利电气（深圳）有限公司 | Double-channel output oil pump with pressure controlled by one-way valve |
| CN111336105A (en) * | 2020-02-26 | 2020-06-26 | 安徽美芝精密制造有限公司 | Scroll compressor and refrigeration equipment |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH084673A (en) * | 1994-06-16 | 1996-01-09 | Daikin Ind Ltd | Scroll type fluid device |
| CN1415861A (en) * | 2001-10-29 | 2003-05-07 | 三菱电机株式会社 | Whirl compressor |
| CN203463284U (en) * | 2013-08-28 | 2014-03-05 | 陕西赛恩斯压缩机有限公司 | Scroll air compressor |
| CN104612968A (en) * | 2014-12-19 | 2015-05-13 | 东北大学 | A two-stage vortex dry vacuum pump |
| CN205805916U (en) * | 2016-06-24 | 2016-12-14 | 泰州市马恒达机械有限公司 | Oil-free scroll vacuum pump |
| CN108443142A (en) * | 2018-05-18 | 2018-08-24 | 东北大学 | A kind of bilateral twin-stage vortex dry vacuum pump |
| CN108533488A (en) * | 2018-06-12 | 2018-09-14 | 江苏赫曦新能源有限公司 | A kind of balanced type vortex compressor |
-
2018
- 2018-11-27 CN CN201811420735.4A patent/CN109555684A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH084673A (en) * | 1994-06-16 | 1996-01-09 | Daikin Ind Ltd | Scroll type fluid device |
| CN1415861A (en) * | 2001-10-29 | 2003-05-07 | 三菱电机株式会社 | Whirl compressor |
| CN203463284U (en) * | 2013-08-28 | 2014-03-05 | 陕西赛恩斯压缩机有限公司 | Scroll air compressor |
| CN104612968A (en) * | 2014-12-19 | 2015-05-13 | 东北大学 | A two-stage vortex dry vacuum pump |
| CN205805916U (en) * | 2016-06-24 | 2016-12-14 | 泰州市马恒达机械有限公司 | Oil-free scroll vacuum pump |
| CN108443142A (en) * | 2018-05-18 | 2018-08-24 | 东北大学 | A kind of bilateral twin-stage vortex dry vacuum pump |
| CN108533488A (en) * | 2018-06-12 | 2018-09-14 | 江苏赫曦新能源有限公司 | A kind of balanced type vortex compressor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111207069A (en) * | 2020-02-20 | 2020-05-29 | 贝德凯利电气（深圳）有限公司 | Double-channel output oil pump with pressure controlled by one-way valve |
| CN111336105A (en) * | 2020-02-26 | 2020-06-26 | 安徽美芝精密制造有限公司 | Scroll compressor and refrigeration equipment |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190402 |
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| RJ01 | Rejection of invention patent application after publication |