KR101810703B1 - 퍼지 가스 시스템을 구비한 건식 진공 펌프 및 퍼징 방법 - Google Patents

퍼지 가스 시스템을 구비한 건식 진공 펌프 및 퍼징 방법 Download PDF

Info

Publication number
KR101810703B1
KR101810703B1 KR1020127016175A KR20127016175A KR101810703B1 KR 101810703 B1 KR101810703 B1 KR 101810703B1 KR 1020127016175 A KR1020127016175 A KR 1020127016175A KR 20127016175 A KR20127016175 A KR 20127016175A KR 101810703 B1 KR101810703 B1 KR 101810703B1
Authority
KR
South Korea
Prior art keywords
purge
pressure
chamber
stage
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020127016175A
Other languages
English (en)
Korean (ko)
Other versions
KR20120127576A (ko
Inventor
필립 존 스테판즈
이안 데이비드 스톤스
말콤 윌리암 그레이
폴 데이비드 넬러
Original Assignee
에드워즈 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에드워즈 리미티드 filed Critical 에드워즈 리미티드
Publication of KR20120127576A publication Critical patent/KR20120127576A/ko
Application granted granted Critical
Publication of KR101810703B1 publication Critical patent/KR101810703B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020127016175A 2009-12-24 2010-11-23 퍼지 가스 시스템을 구비한 건식 진공 펌프 및 퍼징 방법 Active KR101810703B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0922564.0A GB0922564D0 (en) 2009-12-24 2009-12-24 Pump
GB0922564.0 2009-12-24
PCT/GB2010/051946 WO2011077105A2 (en) 2009-12-24 2010-11-23 Pump

Publications (2)

Publication Number Publication Date
KR20120127576A KR20120127576A (ko) 2012-11-22
KR101810703B1 true KR101810703B1 (ko) 2018-01-25

Family

ID=41716909

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127016175A Active KR101810703B1 (ko) 2009-12-24 2010-11-23 퍼지 가스 시스템을 구비한 건식 진공 펌프 및 퍼징 방법

Country Status (8)

Country Link
US (1) US9334863B2 (https=)
EP (1) EP2516863B1 (https=)
JP (1) JP5814934B2 (https=)
KR (1) KR101810703B1 (https=)
CN (1) CN102762867B (https=)
GB (1) GB0922564D0 (https=)
TW (1) TWI564484B (https=)
WO (1) WO2011077105A2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220111690A (ko) * 2019-12-18 2022-08-09 파이퍼 배큠 진공 펌프 및 정화 가스를 분사하기 위한 방법
KR102612899B1 (ko) 2023-06-29 2023-12-13 프로인주식회사 용적 이송식 건식 펌프

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007446B (zh) * 2014-06-12 2016-07-06 北京华航无线电测量研究所 一种共形结构气路防回流吹扫装置
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe
JP2018096337A (ja) * 2016-12-16 2018-06-21 株式会社アンレット ルーツブロワ
GB2561190A (en) * 2017-04-04 2018-10-10 Edwards Ltd Purge gas feeding means, abatement systems and methods of modifying abatement systems
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
FR3079886B1 (fr) * 2018-04-05 2020-04-24 Pfeiffer Vacuum Pompe a vide de type seche
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
FR3097599B1 (fr) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
CN112077813B (zh) * 2020-09-10 2024-10-29 北京通嘉宏瑞科技有限公司 一种便于维修真空泵的分类置物架及其使用方法
FR3119209B1 (fr) * 2021-01-25 2023-03-31 Pfeiffer Vacuum Pompe à vide de type sèche et groupe de pompage
US12376665B2 (en) 2021-10-14 2025-08-05 Kozhya LLC Sp. z o.o. Dermal spray apparatus with disposable cartrdige and method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020004016A1 (en) * 2000-04-26 2002-01-10 Yoshinari Suzuki Gas supplying device for vacuum pump
JP2008542532A (ja) 2005-05-23 2008-11-27 エム ケー エス インストルメンツ インコーポレーテッド Ａｌｄ反応物による真空ポンプの損傷を防止する方法及び装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8809621D0 (en) 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
DE59200391D1 (de) * 1991-03-04 1994-09-22 Leybold Ag Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.
DE19709206A1 (de) 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe
US6612820B1 (en) 1999-01-11 2003-09-02 David Garrett Staat Screw compressor having sealed low and high pressure bearing chambers
US7134668B2 (en) * 2001-10-24 2006-11-14 Ebara Corporation Differential pumping seal apparatus
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ
EP1681469A1 (en) 2003-10-21 2006-07-19 Nabtesco Corporation Rotary dry vacuum pump
GB0519742D0 (en) 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020004016A1 (en) * 2000-04-26 2002-01-10 Yoshinari Suzuki Gas supplying device for vacuum pump
JP2008542532A (ja) 2005-05-23 2008-11-27 エム ケー エス インストルメンツ インコーポレーテッド Ａｌｄ反応物による真空ポンプの損傷を防止する方法及び装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220111690A (ko) * 2019-12-18 2022-08-09 파이퍼 배큠 진공 펌프 및 정화 가스를 분사하기 위한 방법
KR102927343B1 (ko) 2019-12-18 2026-02-12 파이퍼 배큠 진공 펌프 및 정화 가스를 분사하기 위한 방법
KR102612899B1 (ko) 2023-06-29 2023-12-13 프로인주식회사 용적 이송식 건식 펌프

Also Published As

Publication number Publication date
GB0922564D0 (en) 2010-02-10
US9334863B2 (en) 2016-05-10
EP2516863A2 (en) 2012-10-31
TW201139854A (en) 2011-11-16
US20120251368A1 (en) 2012-10-04
JP2013515899A (ja) 2013-05-09
TWI564484B (zh) 2017-01-01
KR20120127576A (ko) 2012-11-22
EP2516863B1 (en) 2018-10-10
JP5814934B2 (ja) 2015-11-17
CN102762867B (zh) 2015-12-09
WO2011077105A3 (en) 2012-07-12
WO2011077105A2 (en) 2011-06-30
CN102762867A (zh) 2012-10-31

Similar Documents

Publication Publication Date Title
KR101810703B1 (ko) 퍼지 가스 시스템을 구비한 건식 진공 펌프 및 퍼징 방법
US7713040B2 (en) Rotor shaft sealing method and structure of oil-free rotary compressor
CA2795017C (en) Scroll pump
US4990069A (en) Multi-stage roots vacuum pump with sealing module
KR100303453B1 (ko) 다단계스크류진공펌프
EP2821676A1 (en) Centrifugal water vapor compressor and shaft seal system used with same
JP2018518623A (ja) 真空ポンプシステム
US20140205482A1 (en) Multi-stage vacuum pump of the dry pump type
KR950007519B1 (ko) 로터리 형식의 진공펌프장치
EP2499374B1 (en) Corrosion resistant shaft sealing for a vacuum pump
CN112012926B (zh) 无油双螺旋气体压缩机
KR102612899B1 (ko) 용적 이송식 건식 펌프
US20250003427A1 (en) Oil-lubricated vacuum pump with improved oil sealing
CN101523046B (zh) 压缩机滑阀阀座
CN121039397A (zh) 真空泵
KR20250015486A (ko) 진공 펌프
CN119895152A (zh) 改进的旋转叶片泵
JP2024506811A (ja) 乾式真空ポンプ式の真空ポンプおよび吸排気ユニット
JP2004116431A (ja) 容積型真空ポンプ装置

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20120621

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20150911

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20170515

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20171120

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20171213

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20171213

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20201127

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20201127

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20211126

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20211126

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20221125

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20221125

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20241126

Start annual number: 8

End annual number: 8