CN107420306A - 三轴模块化干式真空泵 - Google Patents
三轴模块化干式真空泵 Download PDFInfo
- Publication number
- CN107420306A CN107420306A CN201710821318.XA CN201710821318A CN107420306A CN 107420306 A CN107420306 A CN 107420306A CN 201710821318 A CN201710821318 A CN 201710821318A CN 107420306 A CN107420306 A CN 107420306A
- Authority
- CN
- China
- Prior art keywords
- pump
- chamber
- pump chamber
- pump shaft
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 17
- 238000007906 compression Methods 0.000 claims description 17
- 230000006835 compression Effects 0.000 claims description 16
- 238000012856 packing Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 241001484259 Lacuna Species 0.000 claims description 2
- 210000000515 tooth Anatomy 0.000 claims 1
- 238000005452 bending Methods 0.000 abstract description 10
- 238000006073 displacement reaction Methods 0.000 description 26
- 239000007789 gas Substances 0.000 description 25
- 238000000034 method Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 8
- 239000004519 grease Substances 0.000 description 6
- 230000001050 lubricating effect Effects 0.000 description 6
- 210000000078 claw Anatomy 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 230000001360 synchronised effect Effects 0.000 description 5
- POIUWJQBRNEFGX-XAMSXPGMSA-N cathelicidin Chemical compound C([C@@H](C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CO)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H]([C@@H](C)CC)C(=O)NCC(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1[C@@H](CCC1)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CO)C(O)=O)NC(=O)[C@H](CC=1C=CC=CC=1)NC(=O)[C@H](CC(O)=O)NC(=O)CNC(=O)[C@H](CC(C)C)NC(=O)[C@@H](N)CC(C)C)C1=CC=CC=C1 POIUWJQBRNEFGX-XAMSXPGMSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/50—Bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/60—Shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710821318.XA CN107420306B8 (zh) | 2017-09-13 | 2017-09-13 | 三轴模块化干式真空泵 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710821318.XA CN107420306B8 (zh) | 2017-09-13 | 2017-09-13 | 三轴模块化干式真空泵 |
Publications (3)
Publication Number | Publication Date |
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CN107420306A true CN107420306A (zh) | 2017-12-01 |
CN107420306B CN107420306B (zh) | 2019-02-26 |
CN107420306B8 CN107420306B8 (zh) | 2021-10-08 |
Family
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Family Applications (1)
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CN201710821318.XA Active CN107420306B8 (zh) | 2017-09-13 | 2017-09-13 | 三轴模块化干式真空泵 |
Country Status (1)
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CN (1) | CN107420306B8 (zh) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108916047A (zh) * | 2018-09-14 | 2018-11-30 | 安徽达来电机有限公司 | 一种防错位的二叶轮轴及配套齿轮 |
CN110500275A (zh) * | 2019-09-23 | 2019-11-26 | 兑通真空技术(上海)有限公司 | 一种三轴多级罗茨泵的泵壳体结构 |
CN110594156A (zh) * | 2019-09-23 | 2019-12-20 | 兑通真空技术(上海)有限公司 | 一种三轴多级罗茨泵的驱动结构 |
CN110685912A (zh) * | 2019-10-10 | 2020-01-14 | 兑通真空技术(上海)有限公司 | 一种多轴多级罗茨泵转子连接的结构 |
CN111255690A (zh) * | 2020-04-01 | 2020-06-09 | 江苏格里克真空技术有限公司 | 一种直排串联真空泵组 |
CN111706509A (zh) * | 2020-06-30 | 2020-09-25 | 江苏格里克真空技术有限公司 | 三轴多级罗茨泵 |
CN111720328A (zh) * | 2019-03-20 | 2020-09-29 | 上海伊莱茨真空技术有限公司 | 一种共用驱动轴的多级真空泵 |
CN113048056A (zh) * | 2021-03-18 | 2021-06-29 | 上海樊容工业技术中心 | 一种悬臂混合式干式真空泵 |
CN114593055A (zh) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | 多级干式真空泵 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2088957A (en) * | 1980-12-05 | 1982-06-16 | Boc Ltd | Rotary positive-displacement Fluid-machines |
EP0953771A1 (en) * | 1998-04-27 | 1999-11-03 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Single-stage and multi-stage roots pump |
CN2667203Y (zh) * | 2003-11-06 | 2004-12-29 | 巴德纯 | 多级罗茨式无油真空泵 |
CN101985939A (zh) * | 2010-11-30 | 2011-03-16 | 东北大学 | 一种具有轴端动密封结构的干式真空泵 |
CN101985935A (zh) * | 2010-11-30 | 2011-03-16 | 东北大学 | 一种三轴罗茨真空泵 |
CN101985937A (zh) * | 2010-11-30 | 2011-03-16 | 东北大学 | 一种三轴爪型真空泵 |
-
2017
- 2017-09-13 CN CN201710821318.XA patent/CN107420306B8/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2088957A (en) * | 1980-12-05 | 1982-06-16 | Boc Ltd | Rotary positive-displacement Fluid-machines |
EP0953771A1 (en) * | 1998-04-27 | 1999-11-03 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Single-stage and multi-stage roots pump |
CN2667203Y (zh) * | 2003-11-06 | 2004-12-29 | 巴德纯 | 多级罗茨式无油真空泵 |
CN101985939A (zh) * | 2010-11-30 | 2011-03-16 | 东北大学 | 一种具有轴端动密封结构的干式真空泵 |
CN101985935A (zh) * | 2010-11-30 | 2011-03-16 | 东北大学 | 一种三轴罗茨真空泵 |
CN101985937A (zh) * | 2010-11-30 | 2011-03-16 | 东北大学 | 一种三轴爪型真空泵 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108916047A (zh) * | 2018-09-14 | 2018-11-30 | 安徽达来电机有限公司 | 一种防错位的二叶轮轴及配套齿轮 |
CN111720328A (zh) * | 2019-03-20 | 2020-09-29 | 上海伊莱茨真空技术有限公司 | 一种共用驱动轴的多级真空泵 |
EP3795832A1 (en) * | 2019-09-23 | 2021-03-24 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Pump case structure of triaxial multi-stage roots pump |
CN110500275A (zh) * | 2019-09-23 | 2019-11-26 | 兑通真空技术(上海)有限公司 | 一种三轴多级罗茨泵的泵壳体结构 |
CN110594156A (zh) * | 2019-09-23 | 2019-12-20 | 兑通真空技术(上海)有限公司 | 一种三轴多级罗茨泵的驱动结构 |
US11441564B2 (en) * | 2019-09-23 | 2022-09-13 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Driving structure of three-axis multi-stage roots pump |
US11339783B2 (en) * | 2019-09-23 | 2022-05-24 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Pump housing structure of three-axis multi-stage Roots pump |
EP3795831A1 (en) * | 2019-09-23 | 2021-03-24 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Driving structure of triaxial multi-stage roots pump |
CN110685912A (zh) * | 2019-10-10 | 2020-01-14 | 兑通真空技术(上海)有限公司 | 一种多轴多级罗茨泵转子连接的结构 |
EP3805563A1 (en) * | 2019-10-10 | 2021-04-14 | OVG Vacuum Technology (Shanghai) Co., Ltd. | Structure of rotor connection of multi-axial multi-stage roots pump |
CN111255690A (zh) * | 2020-04-01 | 2020-06-09 | 江苏格里克真空技术有限公司 | 一种直排串联真空泵组 |
CN111706509A (zh) * | 2020-06-30 | 2020-09-25 | 江苏格里克真空技术有限公司 | 三轴多级罗茨泵 |
CN114593055A (zh) * | 2020-12-07 | 2022-06-07 | 中国科学院沈阳科学仪器股份有限公司 | 多级干式真空泵 |
CN113048056A (zh) * | 2021-03-18 | 2021-06-29 | 上海樊容工业技术中心 | 一种悬臂混合式干式真空泵 |
CN113048056B (zh) * | 2021-03-18 | 2023-02-28 | 上海樊容工业技术中心 | 一种悬臂混合式干式真空泵 |
Also Published As
Publication number | Publication date |
---|---|
CN107420306B8 (zh) | 2021-10-08 |
CN107420306B (zh) | 2019-02-26 |
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PB01 | Publication | ||
PB01 | Publication | ||
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TA01 | Transfer of patent application right |
Effective date of registration: 20181221 Address after: 201210 Three South Blocks, 78 Jinxin Road, Tangzhen, Pudong New District, Shanghai Applicant after: Rentong Vacuum Technology (Shanghai) Co.,Ltd. Address before: 200040 No. 361 lane, Yuyuan Road, Jingan District, Shanghai 66 Applicant before: Rong Yi |
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Effective date of registration: 20200609 Granted publication date: 20190226 |
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Effective date of registration: 20200731 Granted publication date: 20190226 |
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Date of cancellation: 20210301 Granted publication date: 20190226 |
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PD01 | Discharge of preservation of patent | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210322 Address after: 201700 south side of 1st floor, building 7, 155 Yingxiu Road, Qingpu Industrial Park, Qingpu District, Shanghai Patentee after: ELIVAC Co.,Ltd. Address before: 201210 Three South Blocks, 78 Jinxin Road, Tangzhen, Pudong New District, Shanghai Patentee before: Rentong Vacuum Technology (Shanghai) Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CI03 | Correction of invention patent |
Correction item: Patentee|Address|Patent agency|Agent Correct: ELIVAC Co.,Ltd.|201700 south side of 1st floor, building 7, 155 Yingxiu Road, Qingpu Industrial Park, Qingpu District, Shanghai|Shanghai Shenxin law firm 31272|Shen Dongdong False: Rentong Vacuum Technology (Shanghai) Co.,Ltd.|201210 Three South Blocks, 78 Jinxin Road, Tangzhen, Pudong New District, Shanghai|Beijing keen Intellectual Property Agency Co.,Ltd. 11514|Li Hongbao Number: 09-01 Volume: 35 Correction item: Patentee|Address|Patent agency|Agent Correct: ELIVAC Co.,Ltd.|201700 south side of 1st floor, building 7, 155 Yingxiu Road, Qingpu Industrial Park, Qingpu District, Shanghai|Shanghai Shenxin law firm 31272|Shen Dongdong False: Rentong Vacuum Technology (Shanghai) Co.,Ltd.|201210 Three South Blocks, 78 Jinxin Road, Tangzhen, Pudong New District, Shanghai|Beijing keen Intellectual Property Agency Co.,Ltd. 11514|Li Hongbao Number: 09-01 Page: The title page Volume: 35 |
|
CI03 | Correction of invention patent | ||
OR01 | Other related matters | ||
OR01 | Other related matters | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Three axis modular dry vacuum pump Effective date of registration: 20231221 Granted publication date: 20190226 Pledgee: Agricultural Bank of China Limited Shanghai Yangtze River Delta Integrated Demonstration Zone Sub branch Pledgor: ELIVAC Co.,Ltd. Registration number: Y2023310000903 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |