CN114593055A - 多级干式真空泵 - Google Patents
多级干式真空泵 Download PDFInfo
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- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
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Abstract
本发明涉及真空技术领域,具体地说是一种多级干式真空泵,其中主泵体内设有主动转子轴和从动转子轴,且主动转子轴两端和从动转子轴两端分别安装于第一侧封板和第二侧封板上,并且主动转子轴的驱动轴端伸入至齿轮箱中并通过挠性联轴器与电机的电机转子轴连接,电机转子轴另一端转动安装于电机的壳体后端,主动转子轴上套设有主动齿轮,从动转子轴上套设有从动齿轮与所述主动齿轮啮合,主泵体包括多级腔体,且在各级腔体内均设有主动转子和从动转子,并且各级腔体内的主动转子均套装于所述主动转子轴上,各级腔体内的从动转子均套装于所述从动转子轴上。本发明运行更加可靠平稳,耐冲击性更强,具有体积小、抽速大、节约能源和空间等特点。
Description
技术领域
本发明涉及真空技术领域,具体地说是一种多级干式真空泵。
背景技术
多级干式真空泵广泛用于化工、造纸、冶金、薄膜制备、食品等行业,也是IC装备行业中常用的一种真空泵,但随着技术发展,对于多级真空泵而言,客户要求其满足更高的转速、更小体积、运行更稳定且更耐冲击,因此需要对多级干式真空泵结构作出改进。
发明内容
本发明的目的在于提供一种多级干式真空,运行更加可靠平稳,泵的耐冲击性更强,与以往多级干式真空泵相比具有体积小、抽速大、节约能源和空间等特点。
本发明的目的是通过以下技术方案来实现的:
一种多级干式真空泵,包括依次相连的电机、齿轮箱、第一侧封板、主泵体、第二侧封板和油箱,其中主泵体内设有主动转子轴和从动转子轴,且所述主动转子轴的驱动轴端转动安装于第一侧封板上、从动轴端转动安装于第二侧封板上,并且所述主动转子轴的驱动轴端伸入至所述齿轮箱中并通过挠性联轴器与所述电机的电机转子轴连接,所述电机转子轴另一端转动安装于电机的壳体后端,在所述主动转子轴位于齿轮箱内的轴端上套设有主动齿轮,所述从动转子轴的驱动轴端转动安装于第一侧封板上、从动轴端转动安装于第二侧封板上,且所述从动转子轴的驱动轴端伸入至所述齿轮箱中并套设有从动齿轮与所述主动齿轮啮合,所述主泵体包括多级腔体,且靠近油箱一侧的腔体上设有进气口,靠近齿轮箱一侧的腔体上设有出气口,在各级腔体内均设有主动转子和从动转子,且各级腔体内的主动转子均套装于所述主动转子轴上,各级腔体内的从动转子均套装于所述从动转子轴上。
所述电机包括电机定子、电机转子轴和壳体,其中壳体与所述齿轮箱固连,电机定子固设于壳体内壁上,电机转子轴穿过电机定子且一端伸入至所述齿轮箱中并通过挠性联轴器与主动转子轴连接,所述电机转子轴两端分别通过电机轴承转动安装于壳体上。
所述主动转子轴两端以及所述从动转子轴两端均设有轴承、双唇式轴封和迷宫式轴封,且双唇式轴封和迷宫式轴封分设于轴承两侧。
所述从动转子轴内设置轴向通孔,在从动转子轴两端均设置滤油装置,同时在从动转子轴安装双唇式轴封处开设径向通道与所述轴向通孔连通,第一侧封板位于主动转子轴和从动转子轴之间的部分以及第二侧封板位于主动转子轴和从动转子轴之间的部分均设有连通气孔,双唇式轴封两唇之间开有通气孔,并且所述通气孔与对应侧封板内的连通气孔连通,在齿轮箱侧的从动转子轴轴端内设有单向阀。
所述第一侧封板内的轴承通过第一侧压盖压紧固定,且所述第一侧压盖与第一侧封板为螺纹连接,所述第一侧压盖上设有固定用的齿部,在第一侧封板上设有间隙固定片,且所述间隙固定片设有与第一侧压盖相配合的齿部。
所述主动转子轴两端以及所述从动转子轴两端均设有提油叶片。
所述主泵体包括前腔体、三级腔体、四级腔体和五级腔体,其中一级主动转子和一级从动转子以及二级主动转子和二级从动转子均设于所述前腔体中,其余各级主动转子和从动转子分别设于对应的腔体中。
主泵体内的各级转子中,首级转子为罗茨转子,末级转子为五叶罗茨转子,中间的各级转子为非对称爪型转子。
所述主泵体上下表面配置有通过电磁阀控制水流通断的水冷排,各级腔体内设有水冷通道结构,另外所述油箱、齿轮箱和电机壳体内均设有水冷通道结构。
所述主泵体腔体外形上下侧为平直段,左右两侧为弧形端,且四角设有凸起。
本发明的优点与积极效果为:
1、本发明是在已有悬臂式多级干式真空泵的基础上发展而来,改为两端支持后,同时电机改为独立的轴承支持方式,并通过挠性联轴器与泵相连,且传动力矩的主动齿轮位于电机与泵之间,传递扭矩更加可靠,平稳,泵的耐冲击性更强,泵的运转更加平衡,抗粉尘及面对苛刻工艺工作的能力均有所提升。
2、本发明采用双唇轴封配合迷宫式密封和滤油装置,解决了油蒸汽向真空室的泄漏问题,保证了泵腔体的清洁度。
3、本发明的转子型线采用了特殊设计,降低了剐蹭的风险。
4、本发明的主泵体,油箱,齿轮箱,电机均配置水冷管,保证腔体温度在预设范围,同时保证通过水冷形式,对润滑油进行冷却。
5、本发明在抽气过程中可保持真空环境不受污染,适用于半导体、石化、冶金、食品、医药、电子、包装、印刷等行业。
6、本发明与以往多级干式真空泵相比具有体积小、抽速大、节约能源、节约空间、抗冲击、抗粉尘、抗苛刻工艺能力提升等特点。
附图说明
图1为本发明的整体示意图,
图2为图1中的A-A视图,
图3为图2中的E处放大图,
图4为图2中的F处放大图,
图5为图2中的从动转子轴轴端剖视图,
图6为图1中的B-B视图,
图7为图1中的C-C视图,
图8为图1中的D-D视图,
图9为图1中的G-G视图。
其中,1为电机,101为电机定子,102为主动齿轮,103为从动齿轮,104为电机轴承,105为挠性联轴器,106为电机转子轴;2为主动转子轴,201为一级主动转子,202为二级主动转子,203为三级主动转子,204为四级主动转子,205为五级主动转子;3为从动转子轴,301为一级从动转子,302为二级从动转子,303为三级从动转子,304为四级从动转子,305为五级从动转子;4为第一侧封板,5为五级腔体,6为四级腔体,7为三级腔体,8为前腔体,9为第二侧封板,10为油箱,11为齿轮箱,12为双唇式轴封,13为迷宫式轴封,14为轴承,15为提油叶片,16为第一侧压盖,17为单向阀,18为滤油装置,19为间隙固定片。
具体实施方式
下面结合附图对本发明作进一步详述。
如图1~9所示,本发明包括依次相连的电机1、齿轮箱11、第一侧封板4、主泵体、第二侧封板9和油箱10,其中主泵体内设有主动转子轴2和从动转子轴3,且所述主动转子轴2的驱动轴端转动安装于第一侧封板4上、从动轴端转动安装于第二侧封板9上,并且所述主动转子轴2的驱动轴端伸入至所述齿轮箱11中并通过挠性联轴器105与所述电机1的电机转子轴106连接,所述电机转子轴106另一端通过电机轴承104转动安装于电机1的壳体后端,在所述主动转子轴2位于齿轮箱11内的轴端上套设有主动齿轮102,所述从动转子轴3的驱动轴端转动安装于第一侧封板4上、从动轴端转动安装于第二侧封板9上,且所述从动转子轴3的驱动轴端伸入至所述齿轮箱11中并套设有从动齿轮103与所述主动齿轮102啮合,所述主泵体包括多级腔体,且靠近油箱10一侧的腔体上设有进气口,靠近齿轮箱11一侧的腔体上设有出气口,在各级腔体内均设有主动转子和从动转子,且各级腔体内的主动转子均套装于所述主动转子轴2上,各级腔体内的从动转子均套装于所述从动转子轴3上。
如图2所示,所述电机1包括电机定子101、电机转子轴106和壳体,其中壳体与所述齿轮箱11固连,电机定子101固设于壳体内壁上,电机转子轴106穿过电机定子101且一端伸入至所述齿轮箱11中并通过挠性联轴器105与主动转子轴2连接,电机转子轴106两端分别通过电机轴承104支撑转动安装于壳体的对应端部上。所述电机转子轴106为两端支撑形式,使电机1具有独立的支撑结构,电机1与泵采用挠性联轴器105连接,传动力矩主动齿轮102位于电机1与主泵体之间,传递扭矩更加可靠平稳。
如图3~4所示,所述主动转子轴2两端以及所述从动转子轴3两端均设有轴承14、双唇式轴封12和迷宫式轴封13,且双唇式轴封12和迷宫式轴封13分设于轴承14两侧,所述轴承14、双唇式轴封12和迷宫式轴封13分别安装于对应的侧封板内,其中主动转子轴2两端以及所述从动转子轴3两端通过轴承14实现转动,所述双唇式轴封12和迷宫式轴封13起到隔离油气混合物,保证泵腔内清洁的作用,并配合滤油装置18起到过滤油的作用,具体为:
如图5所示,所述从动转子轴3内设置轴向通孔,在从动转子轴3两端均设置滤油装置18,同时在从动转子轴3安装双唇式轴封12处开设径向通道与所述轴向通孔连通,在每个侧封板位于主动转子轴2和从动转子轴3之间的部分设有连通气孔,而双唇式轴封12两唇之间开有通气孔,并且所述通气孔与对应侧封板内的连通气孔连通,从而实现主动转子轴2上的双唇式轴封12和从动转子轴3上的双唇式轴封12连通,部分过滤后的气体会通过双唇式轴封12进到泵腔内,另外在齿轮箱11侧的从动转子轴3轴端内配置单向阀17,防止泵腔内工艺气体倒流入齿轮箱11内腐蚀齿轮箱11,破坏润滑油油品质量,导致轴承润滑失效。所述双唇式轴封12配合迷宫式轴封13和滤油装置18,解决了油蒸汽向真空室的泄漏问题,保证了泵腔体的清洁度。
如图2所示,所述主动转子轴2两端以及所述从动转子轴3两端均设有提油叶片15,其中油箱10内的提油叶片15只润滑第二侧封板9内的轴承14,齿轮箱11内的提油叶片15除了润滑第一侧封板11内的轴承14外,还用于润滑电机轴承104。另外在所述油箱10、齿轮箱11和电机1壳体内均设有水冷管,以保证油箱10及齿轮箱11内润滑油温度在合理范围,保证了润滑的可靠性。
如图4所示,第一侧封板4内的轴承14通过第一侧压盖16压紧固定,且所述第一侧压盖16与第一侧封板4为螺纹连接,其通过螺纹沿着轴向旋进或旋出,第一侧压盖16旋进时推动第一侧封板4内的轴承14外环,进而使整个转子部件被推动,从而调整转子与第一侧封板4轴向间隙。如图8所示,所述第一侧压盖16上设有固定用的齿部,在第一侧封板4上设有间隙固定片19,且所述间隙固定片19设有与第一侧压盖16相配合的齿部,当轴向间隙调整到预设值时,利用所述间隙固定片19齿部与第一侧压盖16上齿部配合将第一侧压盖16锁住,从而起到轴向间隙固定的作用。
如图1~2所示,本发明采用五级转子结构,所述主泵体包括前腔体8、三级腔体7、四级腔体6和五级腔体5,其中一级主动转子201和一级从动转子301以及二级主动转子202和二级从动转子302均设于所述前腔体8中,三级主动转子203和三级从动转子303设于所述三级腔体7中,四级主动转子204和四级从动转子304设于所述四级腔体6中,五级主动转子205和五级从动转子305设于所述五级腔体5中。各级转子中,所述一级主动转子201和一级从动转子301如图9所示为罗茨转子,末级的五级主动转子205和五级从动转子305如图6所示为五叶罗茨转子,中间的各级如图7所示为非对称爪型转子,其中罗茨转子头部进行修行处理,在最易剐蹭处增加一段圆弧,非对称爪型转子将外圆处型线改为两端圆弧,在靠近爪型转子内压缩处将此处外圆直径减小,进行尾部修形后,在轴向每级爪型转子间轴套处,主动轴轴套与从动轴轴套直径不一致,压缩侧的轴套直径略小于非压缩侧。转子和轴均采用键连接形式,保证转子扭矩的准确有效传递。
本发明的主泵体温度可控,在主泵体上下表面配置有水冷排,通过电磁阀控制水流的通断,同时配合腔体内水冷通道结构,保证腔体温度控制在预设范围。主泵体腔体外形轮廓采用圆弧型和矩形相结合形式,其上下侧为平直段,左右侧为弧形端,有助于腔体外面温度控制,同时在四角增加有助于散热凸起结构,同时在油箱10和齿轮箱11处增加排油结构,方便润滑油的更换。
本发明的工作原理为:
本发明工作时,电机1中的电机转子轴106两端独立支撑并通过电机定子101磁场作用实现转动,进而带动主动转子轴2转动,主动转子轴2通过主动齿轮102和从动齿轮103配合带动从动转子轴3转动,进而实现各级主动转子和从动转子转动,主泵体的前腔体8设有进气口,五级腔体5设有出气口,气体通过各级转子作用由所述进气口进入,并由所述出气口排出。
Claims (10)
1.一种多级干式真空泵,其特征在于:包括依次相连的电机(1)、齿轮箱(11)、第一侧封板(4)、主泵体、第二侧封板(9)和油箱(10),其中主泵体内设有主动转子轴(2)和从动转子轴(3),且所述主动转子轴(2)的驱动轴端转动安装于第一侧封板(4)上、从动轴端转动安装于第二侧封板(9)上,并且所述主动转子轴(2)的驱动轴端伸入至所述齿轮箱(11)中并通过挠性联轴器(105)与所述电机(1)的电机转子轴(106)连接,所述电机转子轴(106)另一端转动安装于电机(1)的壳体后端,在所述主动转子轴(2)位于齿轮箱(11)内的轴端上套设有主动齿轮(102),所述从动转子轴(3)的驱动轴端转动安装于第一侧封板(4)上、从动轴端转动安装于第二侧封板(9)上,且所述从动转子轴(3)的驱动轴端伸入至所述齿轮箱(11)中并套设有从动齿轮(103)与所述主动齿轮(102)啮合,所述主泵体包括多级腔体,且靠近油箱(10)一侧的腔体上设有进气口,靠近齿轮箱(11)一侧的腔体上设有出气口,在各级腔体内均设有主动转子和从动转子,且各级腔体内的主动转子均套装于所述主动转子轴(2)上,各级腔体内的从动转子均套装于所述从动转子轴(3)上。
2.根据权利要求1所述的多级干式真空泵,其特征在于:所述电机(1)包括电机定子(101)、电机转子轴(106)和壳体,其中壳体与所述齿轮箱(11)固连,电机定子(101)固设于壳体内壁上,电机转子轴(106)穿过电机定子(101)且一端伸入至所述齿轮箱(11)中并通过挠性联轴器(105)与主动转子轴(2)连接,所述电机转子轴(106)两端分别通过电机轴承(104)转动安装于壳体上。
3.根据权利要求1所述的多级干式真空泵,其特征在于:所述主动转子轴(2)两端以及所述从动转子轴(3)两端均设有轴承(14)、双唇式轴封(12)和迷宫式轴封(13),且双唇式轴封(12)和迷宫式轴封(13)分设于轴承(14)两侧。
4.根据权利要求3所述的多级干式真空泵,其特征在于:所述从动转子轴(3)内设置轴向通孔,在从动转子轴(3)两端均设置滤油装置(18),同时在从动转子轴(3)安装双唇式轴封(12)处开设径向通道与所述轴向通孔连通,第一侧封板(4)位于主动转子轴(2)和从动转子轴(3)之间的部分以及第二侧封板(9)位于主动转子轴(2)和从动转子轴(3)之间的部分均设有连通气孔,双唇式轴封(12)两唇之间开有通气孔,并且所述通气孔与对应侧封板内的连通气孔连通,在齿轮箱(11)侧的从动转子轴(3)轴端内设有单向阀(17)。
5.根据权利要求3所述的多级干式真空泵,其特征在于:所述第一侧封板(4)内的轴承(14)通过第一侧压盖(16)压紧固定,且所述第一侧压盖(16)与第一侧封板(4)为螺纹连接,所述第一侧压盖(16)上设有固定用的齿部,在第一侧封板(4)上设有间隙固定片(19),且所述间隙固定片(19)设有与第一侧压盖(16)相配合的齿部。
6.根据权利要求1所述的多级干式真空泵,其特征在于:所述主动转子轴(2)两端以及所述从动转子轴(3)两端均设有提油叶片(15)。
7.根据权利要求1所述的多级干式真空泵,其特征在于:所述主泵体包括前腔体(8)、三级腔体(7)、四级腔体(6)和五级腔体(5),其中一级主动转子(201)和一级从动转子(301)以及二级主动转子(202)和二级从动转子(302)均设于所述前腔体(8)中,其余各级主动转子和从动转子分别设于对应的腔体中。
8.根据权利要求1所述的多级干式真空泵,其特征在于:主泵体内的各级转子中,首级转子为罗茨转子,末级转子为五叶罗茨转子,中间的各级转子为非对称爪型转子。
9.根据权利要求1所述的多级干式真空泵,其特征在于:所述主泵体上下表面配置有通过电磁阀控制水流通断的水冷排,各级腔体内设有水冷通道结构,另外所述油箱(10)、齿轮箱(11)和电机(1)壳体内均设有水冷通道结构。
10.根据权利要求1所述的多级干式真空泵,其特征在于:所述主泵体腔体外形上下侧为平直段,左右两侧为弧形端,且四角设有凸起。
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