JP2013515899A5 - - Google Patents

Download PDF

Info

Publication number
JP2013515899A5
JP2013515899A5 JP2012545437A JP2012545437A JP2013515899A5 JP 2013515899 A5 JP2013515899 A5 JP 2013515899A5 JP 2012545437 A JP2012545437 A JP 2012545437A JP 2012545437 A JP2012545437 A JP 2012545437A JP 2013515899 A5 JP2013515899 A5 JP 2013515899A5
Authority
JP
Japan
Prior art keywords
lubrication chamber
pressure
gas
purge
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012545437A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013515899A (ja
JP5814934B2 (ja
Filing date
Publication date
Priority claimed from GBGB0922564.0A external-priority patent/GB0922564D0/en
Application filed filed Critical
Publication of JP2013515899A publication Critical patent/JP2013515899A/ja
Publication of JP2013515899A5 publication Critical patent/JP2013515899A5/ja
Application granted granted Critical
Publication of JP5814934B2 publication Critical patent/JP5814934B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012545437A 2009-12-24 2010-11-23 ポンプ Active JP5814934B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0922564.0A GB0922564D0 (en) 2009-12-24 2009-12-24 Pump
GB0922564.0 2009-12-24
PCT/GB2010/051946 WO2011077105A2 (en) 2009-12-24 2010-11-23 Pump

Publications (3)

Publication Number Publication Date
JP2013515899A JP2013515899A (ja) 2013-05-09
JP2013515899A5 true JP2013515899A5 (https=) 2014-01-16
JP5814934B2 JP5814934B2 (ja) 2015-11-17

Family

ID=41716909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012545437A Active JP5814934B2 (ja) 2009-12-24 2010-11-23 ポンプ

Country Status (8)

Country Link
US (1) US9334863B2 (https=)
EP (1) EP2516863B1 (https=)
JP (1) JP5814934B2 (https=)
KR (1) KR101810703B1 (https=)
CN (1) CN102762867B (https=)
GB (1) GB0922564D0 (https=)
TW (1) TWI564484B (https=)
WO (1) WO2011077105A2 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104007446B (zh) * 2014-06-12 2016-07-06 北京华航无线电测量研究所 一种共形结构气路防回流吹扫装置
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
DE202015007606U1 (de) * 2015-11-03 2017-02-06 Leybold Gmbh Trockenvakuumpumpe
JP2018096337A (ja) * 2016-12-16 2018-06-21 株式会社アンレット ルーツブロワ
GB2561190A (en) * 2017-04-04 2018-10-10 Edwards Ltd Purge gas feeding means, abatement systems and methods of modifying abatement systems
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
FR3079886B1 (fr) * 2018-04-05 2020-04-24 Pfeiffer Vacuum Pompe a vide de type seche
FR3086705B1 (fr) * 2018-09-27 2020-10-23 Pfeiffer Vacuum Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge
FR3092879B1 (fr) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Pompe à vide primaire de type sèche
FR3097599B1 (fr) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
FR3105313B1 (fr) * 2019-12-18 2021-12-31 Pfeiffer Vacuum Pompe à vide et procédé d’injection d’un gaz de purge
CN112077813B (zh) * 2020-09-10 2024-10-29 北京通嘉宏瑞科技有限公司 一种便于维修真空泵的分类置物架及其使用方法
FR3119209B1 (fr) * 2021-01-25 2023-03-31 Pfeiffer Vacuum Pompe à vide de type sèche et groupe de pompage
US12376665B2 (en) 2021-10-14 2025-08-05 Kozhya LLC Sp. z o.o. Dermal spray apparatus with disposable cartrdige and method
KR102612899B1 (ko) 2023-06-29 2023-12-13 프로인주식회사 용적 이송식 건식 펌프

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8809621D0 (en) 1988-04-22 1988-05-25 Boc Group Plc Dry pump with closed loop filter
EP0365695B1 (de) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Zweiwellenvakuumpumpe mit Schöpfraum
DE59200391D1 (de) * 1991-03-04 1994-09-22 Leybold Ag Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.
DE19709206A1 (de) 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vakuumpumpe
US6612820B1 (en) 1999-01-11 2003-09-02 David Garrett Staat Screw compressor having sealed low and high pressure bearing chambers
JP2001304115A (ja) 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
US7134668B2 (en) * 2001-10-24 2006-11-14 Ebara Corporation Differential pumping seal apparatus
JP4232505B2 (ja) * 2003-03-27 2009-03-04 アイシン精機株式会社 真空ポンプ
EP1681469A1 (en) 2003-10-21 2006-07-19 Nabtesco Corporation Rotary dry vacuum pump
US8679287B2 (en) 2005-05-23 2014-03-25 Mks Instruments, Inc. Method and apparatus for preventing ALD reactants from damaging vacuum pumps
GB0519742D0 (en) 2005-09-28 2005-11-09 Boc Group Plc Method of pumping gas

Similar Documents

Publication Publication Date Title
JP2013515899A5 (https=)
JP5814934B2 (ja) ポンプ
RU104650U1 (ru) Консольный центробежный насос
JP6775527B2 (ja) 真空ポンプシステム
CN104822943B (zh) 用于对腔室抽真空的真空泵系统以及用于控制真空泵系统的方法
ATE512300T1 (de) Dosierpumpe für eines reduktionsmittels
JP2006525869A5 (https=)
JP2012518878A5 (https=)
JP2011256880A5 (https=)
JP2008201588A (ja) 流体または粉体搬送装置
JP2005155540A (ja) 多段ドライ真空ポンプ
GB2478259A (en) A compressor
CN107002681A (zh) 用于产生真空的泵送系统及利用此泵送系统的泵送方法
CN103140679B (zh) 中央流双隔膜泵
CN104279147A (zh) 隔膜真空泵
WO2010097384A3 (de) Multi-inlet-vakuumpumpe
JP6615132B2 (ja) 真空ポンプシステム
WO2026066891A1 (zh) 一种化学品输送系统
CN107002680A (zh) 用于产生真空的泵送系统及利用此泵送系统的泵送方法
GB2442737B (en) Self-priming centrifugal pump
CN105134620B (zh) 涡扇干式真空泵
JP4908074B2 (ja) 蒸気の廃熱回収及び減圧装置
CN102282374A (zh) 用于流体输送的机器
JP5269491B2 (ja) 蒸気の廃熱回収装置
CN211474414U (zh) 一种介质隔离往复柱塞泵及具有其的液体输送系统