WO2010097384A3 - Multi-inlet-vakuumpumpe - Google Patents

Multi-inlet-vakuumpumpe Download PDF

Info

Publication number
WO2010097384A3
WO2010097384A3 PCT/EP2010/052282 EP2010052282W WO2010097384A3 WO 2010097384 A3 WO2010097384 A3 WO 2010097384A3 EP 2010052282 W EP2010052282 W EP 2010052282W WO 2010097384 A3 WO2010097384 A3 WO 2010097384A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump device
pump
rotor disks
vacuum pump
inlet
Prior art date
Application number
PCT/EP2010/052282
Other languages
English (en)
French (fr)
Other versions
WO2010097384A2 (de
Inventor
Christian Beyer
Markus Henry
Heinz ENGLÄNDER
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Priority to US13/203,309 priority Critical patent/US8926266B2/en
Priority to EP10711634.5A priority patent/EP2401505B1/de
Priority to JP2011551484A priority patent/JP5553847B2/ja
Publication of WO2010097384A2 publication Critical patent/WO2010097384A2/de
Publication of WO2010097384A3 publication Critical patent/WO2010097384A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Die Multi-Inlet-Vakuumpumpe weist eine ersten Pumpeinrichtung (10), mit einem ersten Rotorelement (18), mit mehreren in Förderrichtung (36) hintereinander angeordneten ersten Rotorscheiben (20), sowie eine zweiten Pumpeinrichtung (12) mit einem zweiten Rotorelement (26), mit mehreren in Förderrichtung (36) hintereinander angeordneten zweiten Rotorscheiben (28) auf, wobei der Durchmesser der zweiten Rotorscheiben (28) zumindest teilweise größer ist, als der Durchmesser der ersten Rotorscheiben (20). Ferner weist die Nulti-Inlet-Vakuumpumpe einem Haupteinlass (32) durch den ein erster Fluidstrom (34) von der ersten Pumpeinrichtung (10) angesaugt und in Richtung der zweiten Pumpeinrichtung ( 12) gefördert wird, auf. Ebenso weist die Pumpe einen Zwischeneinlass (38) durch den ein zweiter Fluidstrom (40) von der zweiten Pumpeinrichtung (12) angesaugt und in Richtung eines Pumpenauslasses gefördert wird, auf. Ein Vereinen der beiden Fluidströme (34, 40) erfolgt innerhalb der zweiten Pumpeinrichtung (12) insbesondere zwischen zwei benachbarten zweiten Rotorscheiben (28) der zweiten Pumpeinrichtung (12).
PCT/EP2010/052282 2009-02-28 2010-02-23 Multi-inlet-vakuumpumpe WO2010097384A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US13/203,309 US8926266B2 (en) 2009-02-28 2010-02-23 Multi-inlet vacuum pump
EP10711634.5A EP2401505B1 (de) 2009-02-28 2010-02-23 Multi-inlet-vakuumpumpe
JP2011551484A JP5553847B2 (ja) 2009-02-28 2010-02-23 複数入口式真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009011082.8 2009-02-28
DE102009011082A DE102009011082A1 (de) 2009-02-28 2009-02-28 Multi-Inlet-Vakuumpumpe

Publications (2)

Publication Number Publication Date
WO2010097384A2 WO2010097384A2 (de) 2010-09-02
WO2010097384A3 true WO2010097384A3 (de) 2010-11-18

Family

ID=42371817

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/052282 WO2010097384A2 (de) 2009-02-28 2010-02-23 Multi-inlet-vakuumpumpe

Country Status (6)

Country Link
US (1) US8926266B2 (de)
EP (1) EP2401505B1 (de)
JP (1) JP5553847B2 (de)
DE (1) DE102009011082A1 (de)
TW (1) TW201040394A (de)
WO (1) WO2010097384A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI457503B (zh) * 2012-05-23 2014-10-21 Prosol Corp 一種渦輪真空泵浦結構改良
DE202013010204U1 (de) * 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
DE202013010209U1 (de) * 2013-11-12 2015-02-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Welle
KR101843394B1 (ko) * 2015-12-21 2018-03-29 최태천 믹싱 기능이 구비된 펌프 어셈블리
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
EP3767109B1 (de) 2019-07-15 2021-09-08 Pfeiffer Vacuum Gmbh Vakuumsystem
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0464292A1 (de) * 1990-07-06 1992-01-08 Alcatel Cit Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US6030189A (en) * 1995-10-20 2000-02-29 Leybold Vakuum Gmbh Friction vacuum pump with intermediate inlet

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9725146D0 (en) 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0464292A1 (de) * 1990-07-06 1992-01-08 Alcatel Cit Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US6030189A (en) * 1995-10-20 2000-02-29 Leybold Vakuum Gmbh Friction vacuum pump with intermediate inlet

Also Published As

Publication number Publication date
JP2012519247A (ja) 2012-08-23
TW201040394A (en) 2010-11-16
US20110311348A1 (en) 2011-12-22
EP2401505B1 (de) 2018-09-26
US8926266B2 (en) 2015-01-06
DE102009011082A1 (de) 2010-09-02
JP5553847B2 (ja) 2014-07-16
EP2401505A2 (de) 2012-01-04
WO2010097384A2 (de) 2010-09-02

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