JP5749779B2 - ウェブ材料の自動検査のための方法 - Google Patents
ウェブ材料の自動検査のための方法 Download PDFInfo
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- JP5749779B2 JP5749779B2 JP2013229627A JP2013229627A JP5749779B2 JP 5749779 B2 JP5749779 B2 JP 5749779B2 JP 2013229627 A JP2013229627 A JP 2013229627A JP 2013229627 A JP2013229627 A JP 2013229627A JP 5749779 B2 JP5749779 B2 JP 5749779B2
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Textile Engineering (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- General Factory Administration (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Treatment Of Fiber Materials (AREA)
Description
本発明の目的のために、この出願で使用される以下の用語は、次のように定義される:
「ウェブ」は、1方向内の固定された寸法及び、直交する方向内に所定若しくは中間の長さを有する材料のシートを指し、
「連続的な」は、画像が、単一の線の連続によって又はセンサ要素(ピクセル)の単一列に光学的に描くウェブの領域によって形成されることを指し、
「ピクセル」は、1つ以上のデジタル値によって表わされる画像(picture)要素を指し、
「欠陥」は、製品内の望ましくない発生を指し、
「異常(単数)」又は「異常(複数)」は、その特性及び重度によって、欠陥であり得る又は欠陥であり得ない、標準製品からの逸脱を指す。
「アプリケーション固有」は、必要条件、例えばウェブの意図された使用に基づく、等級レベルを定義することを指し、
「歩留り」は、材料のパーセント、製品の単位数又はいくつかの他の方法で表示されたウェブの利用を示し、
「製品」は、例えば携帯電話ディスプレイ又はテレビスクリーンのためのフィルムの矩形シートなど、ウェブから製造された個々のシート(構成要素とも呼ばれる)であり、
「変換」は、ウェブを製品に物理的に切断するプロセスである。
Claims (1)
- 少なくとも1セットの基準マークをウェブに適用する工程と、
複数の作業をウェブ上で実施する工程と、
前記少なくとも1セットの基準マークを使用して第1座標系に従って、第1作業に関する第1セットのデジタル情報を生成する工程であって、前記第1セットのデジタル情報が、前記ウェブ上の第1セットの領域に関する位置データを含み、前記第1セットの領域に関する前記位置データが前記第1座標系に従う工程と、
前記少なくとも1セットの基準マークを使用して第2座標系に従って、第2作業に関する第2セットのデジタル情報を生成する工程であって、前記第2セットのデジタル情報が、前記ウェブ上の第2セットの領域に関する位置データを含み、前記第2セットの領域に関する前記位置データが前記第2座標系に従う工程と、
前記少なくとも1セットの基準マークを使用して前記第1セットの領域に関する前記位置データと前記第2セットの領域に関する前記位置データとを位置合わせして集合データを作成する工程であって、前記第1セットの領域に関する前記位置データと前記第2セットの領域に関する前記位置データが対象の座標系に従う工程と、
前記集合データを分析して前記ウェブ内の欠陥の位置を識別する工程であって、前記欠陥の前記位置が前記対象の座標系に従う工程と、
前記ウェブから製品を製造するための変換制御計画を出力する工程であって、前記変換制御計画は、前記対象の座標系に従って前記集合データから決定された前記欠陥の位置に基づく工程と、を含む方法であって、
前記生成する工程が、X線、超音波、紫外線(UV)カメラ、UVセンサ、赤外線(IR)カメラ、IRセンサ、マシンビジョンシステム、β線厚さ計、物理的接触式センサ、超音波、スペクトル計器、スペクトルカメラ、静電容量測定器、干渉計センサ、ヘイズ測定、三次元(3D)表面測定装置、又はデジタル撮像装置のうちの少なくとも1つを使用してデジタル情報を生成することを含み、
さらに前記方法は、
前記第1作業からの前記第1セットのデジタル情報を処理して、前記第1作業に関するローカルな異常データを作成する工程であって、前記第1作業に関するローカルな異常データは前記第1座標系に固有である工程と、
前記第2作業からの前記第2セットのデジタル情報を処理して、前記第2作業に関するローカルな異常データを作成する工程であって、前記第2作業に関するローカルな異常データは前記第2座標系に固有である工程と、
前記第1作業と前記第2作業に関する前記ローカルな異常データを位置合わせし、該位置合わせされた位置データに基づいて前記集合データに従った集合異常情報を作成する工程と、
前記集合異常情報を分析し、前記異常のどれが前記ウェブ内の実際の欠陥を表しているかを決定する工程であって、前記実際の欠陥の位置は前記対象の座標系に従う工程と、
前記対象の座標系に従って前記ウェブに関して決定された前記位置合わせされた前記実際の欠陥の位置データに基づいて、前記変換制御計画を作成する工程とを含む方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/828,369 US8175739B2 (en) | 2007-07-26 | 2007-07-26 | Multi-unit process spatial synchronization |
US11/828,369 | 2007-07-26 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010518249A Division JP5497643B2 (ja) | 2007-07-26 | 2008-06-11 | ウェブ材料の自動検査のための方法及びシステム |
Publications (2)
Publication Number | Publication Date |
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JP2014044739A JP2014044739A (ja) | 2014-03-13 |
JP5749779B2 true JP5749779B2 (ja) | 2015-07-15 |
Family
ID=39789844
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010518249A Active JP5497643B2 (ja) | 2007-07-26 | 2008-06-11 | ウェブ材料の自動検査のための方法及びシステム |
JP2013229627A Expired - Fee Related JP5749779B2 (ja) | 2007-07-26 | 2013-11-05 | ウェブ材料の自動検査のための方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010518249A Active JP5497643B2 (ja) | 2007-07-26 | 2008-06-11 | ウェブ材料の自動検査のための方法及びシステム |
Country Status (8)
Country | Link |
---|---|
US (1) | US8175739B2 (ja) |
EP (1) | EP2176648B1 (ja) |
JP (2) | JP5497643B2 (ja) |
KR (1) | KR101476481B1 (ja) |
CN (1) | CN101796396B (ja) |
IL (1) | IL203384A (ja) |
TW (1) | TWI463285B (ja) |
WO (1) | WO2009014818A1 (ja) |
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US8175739B2 (en) | 2012-05-08 |
KR101476481B1 (ko) | 2014-12-24 |
JP2010534833A (ja) | 2010-11-11 |
CN101796396A (zh) | 2010-08-04 |
WO2009014818A1 (en) | 2009-01-29 |
US20090028416A1 (en) | 2009-01-29 |
CN101796396B (zh) | 2013-09-11 |
JP2014044739A (ja) | 2014-03-13 |
JP5497643B2 (ja) | 2014-05-21 |
TWI463285B (zh) | 2014-12-01 |
KR20100046035A (ko) | 2010-05-04 |
TW200910036A (en) | 2009-03-01 |
IL203384A (en) | 2014-01-30 |
EP2176648A1 (en) | 2010-04-21 |
EP2176648B1 (en) | 2019-12-18 |
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