JP5747022B2 - 成膜方法及び成膜用基板の作製方法 - Google Patents
成膜方法及び成膜用基板の作製方法 Download PDFInfo
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- JP5747022B2 JP5747022B2 JP2012505594A JP2012505594A JP5747022B2 JP 5747022 B2 JP5747022 B2 JP 5747022B2 JP 2012505594 A JP2012505594 A JP 2012505594A JP 2012505594 A JP2012505594 A JP 2012505594A JP 5747022 B2 JP5747022 B2 JP 5747022B2
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Description
前記吸収層上に成膜材料を含む材料層を形成し、
前記第1の基板の他方の面側から前記材料層に前記成膜材料の昇華温度より低い温度で第1の加熱処理をすることにより、前記材料層内の不純物を除去し、
前記第1の基板の一方の面と、第2の基板の被成膜面とを対向させて配置し、
前記第1の基板の他方の面から前記材料層に第2の加熱処理をすることにより、前記第2の基板の前記被成膜面に前記成膜材料を含む層を形成することを特徴とする成膜方法である。
前記吸収層上に第1の成膜材料、第2の成膜材料及び下記式(1)を満たす高分子化合物を含む材料層を形成し、
前記第1の基板の他方の面側から前記材料層に前記高分子化合物のガラス転移温度より低い温度で第1の加熱処理をすることにより、前記材料層内の不純物を除去し、
前記第1の基板の一方の面と、第2の基板の被成膜面とを対向させて配置し、
前記第1の基板の他方の面から前記材料層に第2の加熱処理をすることにより、前記第2の基板の前記被成膜面に前記第1の成膜材料と前記第2の成膜材料とを含む層を形成することを特徴とする成膜方法である。
Ta−100≦S≦400
ただし、式(1)中、Sは高分子化合物のガラス転移温度(℃)を示し、Taは、第1の成膜材料又は第2の成膜材料の有する昇華温度のうち高い温度(℃)を示す。
前記吸収層上に成膜材料を含む材料層を形成し、
前記基板の他方の面側から材料層に前記成膜材料の昇華温度より低い温度で加熱処理をすることにより、前記材料層内の不純物を除去することを特徴とする成膜用基板の作製方法である。
前記吸収層上に第1の成膜材料、第2の成膜材料及び下記式(1)を満たす高分子化合物を含む材料層を形成し、
前記基板の他方の面側から材料層に、前記高分子化合物のガラス転移温度より低い温度で加熱処理をすることにより、前記材料層内の不純物を除去することを特徴とする成膜用基板の作製方法である。
Ta−100≦S≦400 ・・・(1)
ただし、式(1)中、Sは高分子化合物のガラス転移温度(℃)を示し、Taは、第1の成膜材料又は第2の成膜材料の有する昇華温度のうち高い温度(℃)を示す。
本実施の形態では、本発明の一態様の成膜方法について説明する。なお、本実施の形態では、本発明の一態様の成膜方法を利用して、発光素子のEL層を形成する場合について説明する。また、本実施の形態は、光源を用いて加熱処理を行う場合について説明する。図1(A)〜(D)は、本発明の一態様の成膜方法を説明するための断面図である。
次に、図1(D)に示すように、この成膜用基板10を用いて材料層13を被成膜基板20上に転写して成膜する方法について説明する。
本実施の形態では、本発明の一態様の成膜方法について説明する。なお、本実施の形態では、本発明の一態様の成膜方法を利用して、発光素子のEL層を形成する場合について説明する。なお、本実施の形態に示す成膜方法において、特に記載がない場合には、実施の形態1と同様の材料及び作製方法によって行うものとする。
照射された光は、第1の基板101を透過して、反射層102が形成された領域においては反射し、反射層102に設けられた開口部112においては透過して、開口部と重なる領域の吸収層103において吸収される。吸収された光が熱エネルギーへと変換されることで、当該領域の吸収層103と重なる領域の材料層105が成膜材料の昇華温度より低い温度に加熱される(第1の加熱処理)。これにより、材料層105内の水分や残留溶媒などの不純物が除去される。なお、この不純物は、その分子量が300以下のものである。材料層105の加熱温度が100℃以上であると、分子量300以下の不純物は十分に除去される。
本実施の形態では、本発明の一態様の成膜方法について説明する。なお、本実施の形態では、本発明の一態様の成膜方法を利用して、発光素子のEL層を形成する場合について説明する。また、本実施の形態は、光源を用いて加熱処理を行う場合について説明する。図3(A)〜(D)は、本発明の一態様の成膜方法を説明するための断面図であり、図1と同一部分には同一符号を付す。
Ta−70≦S≦400 ・・・(2)
ただし、式(1)、(2)中、Sは高分子化合物のガラス転移温度(℃)を示し、Taは、第1の成膜材料又は第2の成膜材料の昇華温度のうち高い温度(℃)を示す。
次に、図3(D)に示すように、この成膜用基板10aを用いて材料層16を被成膜基板20上に転写して成膜する方法について説明する。
本実施の形態では、本発明の一態様の成膜方法について説明する。なお、本実施の形態では、本発明の一態様の成膜方法を利用して、発光素子のEL層を形成する場合について説明する。なお、本実施の形態に示す成膜方法において、特に記載がない場合には、実施の形態3と同様の材料及び作製方法によって行うものとする。
11 第1の基板
12 吸収層
13,16 材料層
13a,16a EL層
14 不純物
15,15a 有機材料
16b 高分子化合物を有する層
17 高分子化合物(ポリマー)
21 フラッシュランプ
21a,21b 矢印
23,108,213 電極層
101,201 第1の基板
102,203 反射層
103,207 吸収層
104,205 断熱層
105,209 材料層
106 保護層
107,211 第2の基板
109,217 EL層
110,110a 矢印
111,215 絶縁物
Claims (4)
- 第1の基板の一方の面上に吸収層を形成し、
前記吸収層上に第1の成膜材料、第2の成膜材料及び下記式(1)を満たす高分子化合物を含む材料層を形成し、
前記第1の基板の他方の面側から前記材料層に前記高分子化合物のガラス転移温度より低い温度で第1の加熱処理をすることにより、前記材料層内の不純物を除去し、
前記第1の基板の一方の面と、第2の基板の被成膜面とを対向させて配置し、
前記第1の基板の他方の面から前記材料層に第2の加熱処理をすることにより、前記第2の基板の前記被成膜面に前記第1の成膜材料と前記第2の成膜材料とを含む層を形成することを特徴とする成膜方法。
Ta−100≦S≦400 ・・・(1)
ただし、式(1)中、Sは高分子化合物のガラス転移温度(℃)を示し、Taは、第1の成膜材料又は第2の成膜材料の有する昇華温度のうち高い温度(℃)を示す。 - 請求項1において、
前記第1の加熱処理及び前記第2の加熱処理それぞれは、光源を用いて前記第1の基板の他方の面側から光を照射し、前記吸収層が光を吸収することで加熱される方式を用いることを特徴とする成膜方法。 - 基板の一方の面上に吸収層を形成し、
前記吸収層上に第1の成膜材料、第2の成膜材料及び下記式(1)を満たす高分子化合物を含む材料層を形成し、
前記基板の他方の面側から材料層に、前記高分子化合物のガラス転移温度より低い温度で加熱処理をすることにより、前記材料層内の不純物を除去することを特徴とする成膜用基板の作製方法。
Ta−100≦S≦400 ・・・(1)
ただし、式(1)中、Sは高分子化合物のガラス転移温度(℃)を示し、Taは、第1の成膜材料又は第2の成膜材料の有する昇華温度のうち高い温度(℃)を示す。 - 請求項3において、
前記加熱処理は、光源を用いて前記基板の他方の面側から光を照射し、前記吸収層が光を吸収することで加熱される方式を用いることを特徴とする成膜用基板の作製方法。
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