JP5722897B2 - 焼成用ラック - Google Patents
焼成用ラック Download PDFInfo
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- JP5722897B2 JP5722897B2 JP2012526489A JP2012526489A JP5722897B2 JP 5722897 B2 JP5722897 B2 JP 5722897B2 JP 2012526489 A JP2012526489 A JP 2012526489A JP 2012526489 A JP2012526489 A JP 2012526489A JP 5722897 B2 JP5722897 B2 JP 5722897B2
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- 238000010304 firing Methods 0.000 claims description 46
- 239000000463 material Substances 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 230000003746 surface roughness Effects 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000002791 soaking Methods 0.000 description 3
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0031—Treatment baskets for ceramic articles
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/003—Apparatus, e.g. furnaces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0037—Supports specially adapted for semi-conductors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F2003/1042—Sintering only with support for articles to be sintered
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3873—Silicon nitrides, e.g. silicon carbonitride, silicon oxynitride
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
- C04B2235/428—Silicon
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
- C04B2235/9623—Ceramic setters properties
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D2005/0081—Details
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Furnace Charging Or Discharging (AREA)
- Ceramic Products (AREA)
Description
(第1の参考形態)
図1と図2は本発明の第1の参考形態を示すものである。本参考形態の焼成用ラック1は略立方体形状を有し、セッター保持手段は、4隅の垂直辺を構成する4本の角部垂直支柱2と、該4本の角部垂直支柱2(2a、2b、2c、2d)の下端部を支持する略ロ字状の下端支持枠4と、該4本の垂直支柱2の上端部を支持する略ロ字状の上端支持枠3から構成されている。図1に示すように、該焼成用ラック1は、平板状セッター7を挿入して使用するものである。
本発明の焼成用ラックは通常、不活性ガス雰囲気下で、1300〜1450℃程度の高温条件下で使用される。このため本発明においては、セッター保持手段が0.01〜30wt%のSiを含有するSi−SiC、再結晶SiC、Si3N4−SiCの何れかの材質から構成される。
図5と図6は、本発明の実施形態を示すものである。本実施形態の焼成用ラック1は、セッター保持手段が、周辺部に複数の段積み用突起11を備えた枠状の平板部材10からなるものである。図5の実施形態では、長方形の平板部材10は左右両側に四角形の孔12を備え、この部分に平板状セッター7が載せられる。平板部材10の一辺の左右両端と対向する辺の中央部には段積み用突起11が突設され、孔12を囲む位置には段積み用突起11よりも低い位置決め用突起13が突設されている。
図7と図8は、本発明の第2の参考形態を示すものである。本参考形態の焼成用ラック1は、セッター保持手段が、複数の段積み用突起15を備え対向配置された一対の直線部材16と、各段積み用突起15の上部凹面17間に掛け渡された梁18とからなるものである。段積み用突起15は山型の突起であり、その下側には凹部19が形成されている。梁18は断面角型の棒状体であり、その両端が段積み用突起15の上部凹面17に嵌め込まれ、その上に平板状セッター7が載せられる。
2(2a、2b、2c、2d)角部垂直支柱
21 水平溝部
3 上端支持枠
4 下端支持枠
5(5aと5b)中間垂直支柱
51 水平孔部
6 梁
7 平板状セッター
8 突起部
10 平板部材
11 段積み用突起
12 四角形の孔
13 位置決め用突起
15 段積み用突起
16 直線部材
17 上部凹面
18 梁
19 凹部
Claims (7)
- 複数枚の平板状セッターをセッター保持手段により垂直方向に多段に保持する焼成用ラックであって、該セッター保持手段が、0.01〜30wt%のSiを含有するSi−SiC、再結晶SiC、Si3N4−SiCの何れかの材質からなり、該セッター保持手段は、孔の周辺部に複数の段積み用突起と、これよりも低い位置決め用突起が突設された枠状の平板部材からなり、平板状セッターを保持させた状態で多段に積層され、各平板状セッターをその外周側面の70〜100%を露出させた状態で保持するものであることを特徴とする焼成用ラック。
- セッター保持手段を構成する部材が、Si−SiCからなり、その化学組成はSiC:70〜99wt%、Si:1〜30wt%であり、SiC+Siを100wt%として、さらにAl:0.01〜0.2wt%、Fe:0.01〜0.2wt%、Ca:0.01〜0.2wt%を含有することを特徴とする請求項1に記載の焼成用ラック。
- セッター保持手段を構成する部材の算術平均による表面粗さがRa=0.1〜30μmであり、その熱輻射率が、波長8μmで80〜100%、波長12μmで20〜40%、波長19μmで60〜80%であることを特徴とする請求項2に記載の焼成用ラック。
- セッター保持手段を構成する部材の算術平均による表面粗さがRa=0.1〜30μm、弾性率が200〜400GPa、強度が100〜400MPaで、室温における熱伝導率が150〜240W/m・k、気孔率が1%以下であることを特徴とする請求項1に記載の焼成用ラック。
- セッター保持手段を構成する部材が再結晶SiCからなり、その化学組成はSiC:99〜100wt%であり、SiCを100wt%としてさらにAl:0.01〜0.2wt%、Fe:0.01〜0.2wt%、Ca:0.01〜0.2wt%を含有することを特徴とする請求項1に記載の焼成用ラック。
- セッター保持手段を構成する部材がSi3N4−SiCからなり、その化学組成はSiC:70〜80wt%、Si3N4:20〜30wt%であり、SiC+Si3N4を100wt%としてさらにAl:0.1〜0.5wt%、Fe:0.1〜0.5wt%、Ca:0.01〜0.2wt%を含有することを特徴とする請求項1に記載の焼成用ラック。
- 平板状セッターの材質が、0.01〜30wt%のSiを含有するSi−SiCであることを特徴とする請求項1に記載の焼成用ラック。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012526489A JP5722897B2 (ja) | 2010-07-26 | 2011-07-25 | 焼成用ラック |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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JP2010167311 | 2010-07-26 | ||
JP2010167311 | 2010-07-26 | ||
JP2012526489A JP5722897B2 (ja) | 2010-07-26 | 2011-07-25 | 焼成用ラック |
PCT/JP2011/066826 WO2012014835A1 (ja) | 2010-07-26 | 2011-07-25 | 焼成用ラック |
Publications (2)
Publication Number | Publication Date |
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JPWO2012014835A1 JPWO2012014835A1 (ja) | 2013-09-12 |
JP5722897B2 true JP5722897B2 (ja) | 2015-05-27 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012526489A Active JP5722897B2 (ja) | 2010-07-26 | 2011-07-25 | 焼成用ラック |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP5722897B2 (ja) |
KR (1) | KR101726912B1 (ja) |
CN (1) | CN103097845B (ja) |
MY (1) | MY184778A (ja) |
TW (1) | TWI528013B (ja) |
WO (1) | WO2012014835A1 (ja) |
Cited By (1)
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CN107024113A (zh) * | 2016-01-31 | 2017-08-08 | 湖南大学 | 一种砂轮立式烧结装置 |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5857358B2 (ja) * | 2013-08-30 | 2016-02-10 | 日本碍子株式会社 | ラック |
WO2015054230A1 (en) * | 2013-10-07 | 2015-04-16 | Saint-Gobain Ceramics & Plastics, Inc. | Refractory article |
CN103743204B (zh) * | 2014-01-08 | 2015-09-09 | 长兴明晟冶金炉料有限公司 | 球形炉料烘箱 |
TWI612024B (zh) * | 2016-06-29 | 2018-01-21 | 丸十股份有限公司 | 陶瓷成形體的燒製輔助具 |
JP6811196B2 (ja) * | 2018-01-10 | 2021-01-13 | 日本碍子株式会社 | 焼成用セッター |
KR102206851B1 (ko) * | 2018-04-18 | 2021-01-22 | 주식회사 엘지화학 | 소성용 카트리지 |
KR102610471B1 (ko) * | 2018-08-22 | 2023-12-05 | 주식회사 엘지화학 | 고체 산화물 연료전지 셀 소성용 장치 및 소성 방법 |
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WO2021033375A1 (ja) * | 2019-08-16 | 2021-02-25 | 日本碍子株式会社 | 焼成用ラック及び焼成用治具 |
CN112496319A (zh) * | 2019-09-16 | 2021-03-16 | 宿迁启祥电子科技有限公司 | 一种烧结装置及钨合金材料的制备方法 |
AU2022238288A1 (en) * | 2021-03-16 | 2023-09-07 | Dsb Technologies, Llc | Racking system for use in continuous sintering furnaces |
CN113634821B (zh) * | 2021-08-04 | 2022-06-03 | 江苏陆氏金刚石工具有限公司 | 一种避免金刚石锯片相互黏结的承载装置 |
JP7560691B1 (ja) | 2024-03-28 | 2024-10-02 | ノリタケ株式会社 | 焼成用治具 |
JP7560690B1 (ja) | 2024-03-28 | 2024-10-02 | ノリタケ株式会社 | 焼成用治具およびフレーム |
JP7515762B1 (ja) | 2024-03-28 | 2024-07-12 | 株式会社ノリタケカンパニーリミテド | 焼成用治具 |
JP7515761B1 (ja) | 2024-03-28 | 2024-07-12 | 株式会社ノリタケカンパニーリミテド | 焼成用治具 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH061660A (ja) * | 1992-06-25 | 1994-01-11 | Ngk Insulators Ltd | 耐クリープ性Si−SiC質焼結体 |
JPH07280207A (ja) * | 1994-04-14 | 1995-10-27 | Ngk Insulators Ltd | ラジアントチューブ |
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JP4869048B2 (ja) | 2006-02-15 | 2012-02-01 | 日本碍子株式会社 | 平板瓦焼成用窯道具 |
JP4818300B2 (ja) | 2008-03-25 | 2011-11-16 | 日本碍子株式会社 | 電子部品焼成用セッター及びその製造方法 |
JP4787308B2 (ja) * | 2008-12-01 | 2011-10-05 | 日本碍子株式会社 | 焼成用棚組 |
CN201476585U (zh) * | 2009-08-06 | 2010-05-19 | 江西雅华工业陶瓷有限公司 | 整体框架式陶瓷产品承烧板 |
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- 2011-07-25 KR KR1020137001813A patent/KR101726912B1/ko active IP Right Grant
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- 2011-07-25 WO PCT/JP2011/066826 patent/WO2012014835A1/ja active Application Filing
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JPH061660A (ja) * | 1992-06-25 | 1994-01-11 | Ngk Insulators Ltd | 耐クリープ性Si−SiC質焼結体 |
JPH07280207A (ja) * | 1994-04-14 | 1995-10-27 | Ngk Insulators Ltd | ラジアントチューブ |
JPH10311686A (ja) * | 1997-05-13 | 1998-11-24 | Ngk Insulators Ltd | 窯炉用棚組構造体 |
JP2000319721A (ja) * | 1999-05-07 | 2000-11-21 | Ngk Insulators Ltd | セラミックチューブ及びこれを用いた誘導加熱炉 |
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JP2003014378A (ja) * | 2001-06-27 | 2003-01-15 | Maruju:Kk | 焼成用治具 |
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CN103097845B (zh) | 2015-05-06 |
WO2012014835A1 (ja) | 2012-02-02 |
TWI528013B (zh) | 2016-04-01 |
KR101726912B1 (ko) | 2017-04-13 |
JPWO2012014835A1 (ja) | 2013-09-12 |
MY184778A (en) | 2021-04-21 |
KR20130130676A (ko) | 2013-12-02 |
TW201224382A (en) | 2012-06-16 |
CN103097845A (zh) | 2013-05-08 |
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